A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.
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9. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
an outer nozzle surface and plural O-ring nozzle grooves in said outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
a cylindrical body having said outer nozzle surface and said plural O-ring nozzle grooves in said outer nozzle surface, and
an axial evacuation slot comprising slot sections in the outer nozzle surface extending from a radial outer end of the cylindrical body to the O-ring nozzle grooves.
1. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
a cylindrical outer nozzle surface and plural O-ring nozzle grooves in said cylindrical outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
nozzle groove surfaces indented with respect to said cylindrical outer nozzle surface and defined by said O-ring nozzle grooves, and
an axial evacuation slot comprising slot sections in said cylindrical outer nozzle surface extending from an end of said side gas injection nozzle inside said nozzle pocket, and slot sections in said nozzle groove surfaces.
6. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
an outer nozzle surface and plural O-ring nozzle grooves in said outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
a cylindrical body having said outer nozzle surface and said plural O-ring nozzle grooves in said outer nozzle surface,
a gas injection passage forming an orifice at a radially inner end of the cylindrical body,
an axially extending gas delivery insert hole extending through the cylindrical body near a radially outer end of the cylindrical body, and
an internal radial nozzle gas flow passage that extends through the cylindrical body from the axially extending gas delivery insert hole to the gas injection passage.
2. The side gas injection kit of
3. The side gas injection kit of
plural gas delivery insert pockets in said top liner ring;
plural gas delivery inserts extending into said gas delivery insert pockets;
each of said gas delivery inserts comprising plural O-ring insert grooves concentric with said gas delivery insert, and second plural O-rings in said plural O-ring insert grooves compressed against an interior side wall of a corresponding one of said plural gas delivery insert pockets.
4. The side gas injection kit of
said side gas injection nozzles comprise a ceramic material, said gas delivery insert comprises steel and a top liner surface comprises a protective layer comprising an anodized material or Yttria.
5. The side gas injection kit of
7. The side gas injection kit of
8. The side gas injection kit of
10. The side gas injection kit of
11. The side gas injection kit of
12. The side gas injection kit of
13. The side gas injection kit of
14. The side gas injection kit of
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This application is a continuation of U.S. application Ser. No. 14/762,219, filed on Jul. 21, 2015, which is a national phase filing of PCT Application PCT/US14/14389, filed on Feb. 3, 2014, which claims priority to U.S. Provisional Application No. 61/777,225, filed Mar. 12, 2013.
1. Technical Field The disclosure is related to process gas distribution in a plasma reactor for processing a workpiece such as a semiconductor wafer.
2. Background Discussion
Control of process gas distribution in the chamber of a plasma reactor affects process control of etch rate distribution or deposition rate distribution on a workpiece during plasma processing. Gas injection nozzles can be located at the center and periphery of the chamber. It is desirable to control gas injection at both the chamber center and at the periphery. One problem is that systems that control radial distribution of process gas flow rate generally do not control azimuthal distribution of process gas flow rate. As employed in this specification, the term “azimuthal” refers to the circumferential direction in a cylindrical processing chamber. Another problem is that systems that control azimuthal distribution of gas flow rate using gas injectors near the side wall suffer from pressure drops along the azimuthal direction.
A related problem is how to feed process gas to different zones of gas injectors in such a manner as to avoid asymmetries in gas distribution while at the same time providing full control of both radial and azimuthal gas distributions.
Another problem is how to provide a gas distribution system that solves all of the foregoing problems in a structure affording rapid disassembly and re-assembly with close-fitting tolerances without damage.
The formation of gas distribution passages in one layer has generally limited the location of the gas injectors of the chamber to that one layer, which is typically flat and has no particular effect upon gas flow within the chamber.
A plasma reactor having a chamber interior, a workpiece support and a tunable gas nozzle, includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.
In one embodiment, the tunable gas nozzle has two gas inputs, and N is four and M is three. The reactor may further include a gas supply panel coupled to a gas input of the three-way gas flow controller. In one embodiment, a process controller is coupled to the M-way gas flow ratio controller and to the N-way gas flow ratio controller, and a user interface is coupled to the process controller.
In one embodiment, the side gas plenum includes plural sets of gas flow channels, and each one of the sets of gas flow channels includes: (a) an arcuate gas distribution channel having a pair of ends coupled to a corresponding pair of the plural side gas outlets, and (b) an arcuate gas supply channel, one end of the arcuate gas supply channel connected to a corresponding one of the plurality of N gas inlets, and an opposite end of the arcuate gas supply channel coupled to the gas distribution channel proximate a middle point of the gas distribution channel.
In a related embodiment, the plural sets of gas flow channels are of equal path lengths between respective gas inlet and a respective side gas outlet.
In one embodiment, the cylindrical side wall includes a liner edge, the plasma reactor further including: (a) a gas delivery ring over the liner edge, the plural sets of gas flow channels being formed in the gas delivery ring, and (b) a top liner ring over the gas delivery ring, the plural side gas outlets extending into the top liner ring, the top liner ring including a top liner ring surface facing the chamber interior.
In a related embodiment, each of the plural side gas outlets includes: (a) a side gas injection nozzle extending radially in the top liner ring toward the chamber interior and including an axially extending gas delivery insert-receiving hole, and (b) a gas delivery insert extending from the gas delivery ring into the axially extending gas delivery insert-receiving hole.
The plasma reactor may further include an axial internal gas flow passage in the gas delivery insert and a radial internal gas flow nozzle passage through a side wall of the axially extending gas delivery insert hole, the axial internal gas flow passage being in registration with the radial internal gas flow nozzle passage.
In one embodiment, the top liner ring includes plural nozzle pockets in the top liner ring surface, the side gas injection nozzle extending into a corresponding one of the nozzle pockets. Moreover, the side gas injection nozzle includes plural O-ring nozzle grooves concentric with the side gas injection nozzle, the plasma reactor further including first plural O-rings in the plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of the nozzle pockets.
In one embodiment, the side gas injection nozzle further includes: (a) a cylindrical outer nozzle surface, wherein the O-ring nozzle grooves define nozzle groove surfaces indented with respect to the cylindrical outer nozzle surface, and (b) an axial evacuation slot including slot sections in the cylindrical outer nozzle surface beginning at an end of the side gas injection nozzle inside the nozzle pocket, and slot sections in the nozzle groove surfaces.
In further embodiment, there is a gap between the cylindrical outer nozzle surface and the interior side wall of a corresponding one of the nozzle pockets, the slot sections in the nozzle groove surfaces providing an evacuation path around the first plural O-rings, the slot sections in the cylindrical outer nozzle surface providing an evacuation path to the gap.
In one embodiment, the top liner ring further includes plural gas delivery insert pockets facing the gas delivery ring, a portion of the gas delivery insert extending into a corresponding one of the gas delivery insert pockets. In the same embodiment, the gas delivery insert includes plural O-ring insert grooves concentric with the gas delivery insert, the plasma reactor further including second plural O-rings in the plural O-ring insert grooves compressed against an interior side wall of a corresponding one of the plural gas delivery insert pockets.
In one embodiment, each of the plural gas outlets further includes an axial port in the gas delivery ring extending to the axial internal gas flow passage of the gas delivery insert.
In an embodiment, the side gas injection nozzle includes a ceramic material, and the gas delivery ring and the gas delivery insert include steel, and the top liner surface and the cylindrical side wall includes a protective layer including an anodized material or Yttria.
In a further aspect, a side gas injection kit is provided, including: a top liner ring including plural nozzle pockets, plural side gas injection nozzles extending into the nozzle pockets, each of the plural side gas injection nozzles including: (a) an outer nozzle surface and plural O-ring nozzle grooves in the outer nozzle surface and concentric with the side gas injection nozzle, and (b) first plural O-rings in the plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of the nozzle pockets.
In one embodiment, the side gas injection nozzle further includes: (a) nozzle groove surfaces indented with respect to the outer nozzle surface and formed in the O-ring nozzle grooves, and (b) an axial evacuation slot including slot sections in the cylindrical outer nozzle surface beginning at an end of the side gas injection nozzle inside the nozzle pocket, and slot sections in the nozzle groove surfaces.
In a related embodiment, the side gas injection kit further includes a gap between the cylindrical outer nozzle surface and an interior side wall of a corresponding one of the nozzle pockets, the slot sections in the nozzle groove surfaces providing an evacuation path around the first plural O-rings, the slot sections in the cylindrical outer nozzle surface providing an evacuation path to the gap.
In a further related embodiment, the side gas injection kit further comprises: (a) plural gas delivery insert pockets in the top liner ring, (b) plural gas delivery inserts extending into the gas delivery insert pockets, and (c) each of the gas delivery inserts including plural O-ring insert grooves concentric with the gas delivery insert, and second plural O-rings in the plural O-ring insert grooves compressed against an interior side wall of a corresponding one of the plural gas delivery insert pockets.
So that the manner in which the exemplary embodiments of the present invention are attained can be understood in detail, a more detailed description of the invention, briefly summarized above, may be obtained by reference to the embodiments thereof which are illustrated in the appended drawings. It is to be appreciated that certain well known processes are not discussed herein in order to not obscure the invention.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
The gas injection pattern in the chamber 100 has three concentric zones including a center zone governed by the center gas nozzle 114, an inner zone governed by the side gas nozzle 116 and a peripheral zone governed by the gas outlets 122. The user may adjust the gas flow ratios among the three concentric zones by controlling the three-way gas flow ratio controller 126. In addition, the user may govern azimuthal (circumferential) gas distribution by controlling the four-way gas flow ratio controller 124. An advantage is that the gas flow ratio controllers 124 and 126 provide simultaneous independent control of both radial distribution of gas flow and azimuthal distribution of gas flow. A further advantage is that the gas outlets 122 at the chamber periphery are fed in parallel, and the pressure losses are uniformly distributed in the azimuthal direction.
The injection nozzle 148 of
The cylindrical insert post 202 has O-ring grooves 206, 208 concentric with the cylindrical insert post 202 in which O-rings 209 (
The description of
Radial distribution of gas flow is adjusted by controlling the three-way gas flow ratio controller 126. Independently, azimuthal gas distribution is adjusted by controlling the four-way gas flow ratio controller 124. An advantage is that the gas flow ratio controllers 124 and 126 provide simultaneous independent control of both radial distribution of gas flow and azimuthal distribution of gas flow. A further advantage is that the gas outlets 122 at the chamber periphery are fed in parallel, and the pressure losses are uniformly distributed in the azimuthal direction. This latter feature simplifies control of azimuthal gas distribution.
The gas injection inserts 146 facilitate the location of the injection nozzles 148 in the concave surface 156 of the top gas ring 140. Gas injection from the side is optimized because the injection nozzles 148 are located in the concave surface 156 of the top liner ring 140, and the injected gas is guided by the concave surface 156. The top gas ring 140 and the injection nozzles 148 are located in a plane above the gas delivery ring 144 containing the four pairs of recursive gas flow channels 136, 138. Gas flow paths spanning the gap between the plane of the injection nozzles 148 and the gas delivery ring 144 are provided by the gas delivery inserts 146.
Referring to
The modular parts may be conveniently and repetitively assembled and disassembled in the manner depicted in
Assembly procedure in
While the illustrated embodiment exemplifies four-way symmetry involving eight injection nozzles 148, other symmetries may be employed involving a different number of injection nozzles 148.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Yousif, Imad, Banna, Samer, Tantiwong, Kyle, Rozenzon, Yan, Knyazik, Vladimir, Keating, Bojenna
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