A memory device that includes a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output. For each of the differential sense amplifiers, the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines, and the second input is connected to another one of the bit lines. Alternately, one or more sense amplifiers are configured to detect signal amplitudes on the bit lines, and the device includes calculation circuitry configured to produce output signals each based upon a difference in signal amplitudes on two of the bit lines.
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10. A method of programming a memory device having a plurality of memory cells arranged in rows and columns, and a plurality of bit lines each connected to one of the columns of memory cells, the method comprising:
performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, by:
applying one or more programming voltages to the first memory cell;
applying one or more read voltages to the first and second memory cells to produce first read signals on the first and second bit lines; and
determining that a difference in amplitudes of the first read signals does not match a target value, and in response applying one or more programming voltages to the second memory cell.
4. A memory device comprising:
a plurality of memory cells arranged in rows and columns;
a plurality of bit lines each connected to one of the columns of memory cells;
one or more sense amplifiers configured to detect signal amplitudes on the bit lines; and
calculation circuitry configured to produce output signals each based upon a difference in signal amplitudes on two of the bit lines; and
a controller configured to perform a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein a first of the output signals is based upon a difference in signal amplitudes on the first and second bit lines, by:
applying one or more programming voltages to the first memory cell;
applying one or more read voltages to the first and second memory cells so that the first output signal has a first amplitude;
determining the first amplitude does not match a target value, and in response applying one or more programming voltages to the second memory cell.
1. A memory device comprising:
a plurality of memory cells arranged in rows and columns;
a plurality of bit lines each connected to one of the columns of memory cells;
a plurality of differential sense amplifiers, each having first and second inputs and an output, wherein for each of the differential sense amplifiers:
the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs,
the first input is connected to one of the bit lines, and
the second input is connected to another one of the bit lines; and
a controller configured to perform a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by:
applying one or more programming voltages to the first memory cell;
applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude;
determining the first amplitude does not match a target value, and in response applying one or more programming voltages to the second memory cell.
7. A method of programming a memory device having a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output, wherein for each of the differential sense amplifiers the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines and the second input is connected to another one of the bit lines, the method comprising:
performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by:
applying one or more programming voltages to the first memory cell;
applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude; and
determining the first amplitude does not match a target value, and in response applying one or more programming voltages to the second memory cell.
12. A method of programming a memory device having a plurality of memory cells arranged in rows and columns, and a plurality of bit lines each connected to one of the columns of memory cells, the method comprising:
performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells to produce first read signals on the first and second bit lines;
c) ceasing the program operation if a difference in amplitudes of the first read signals matches a target value;
d) repeating steps (a)-(c) if an absolute value of the difference in amplitudes of the first read signals is less than the target value;
e) determining that the absolute value of the difference in amplitudes of the first read signals is greater than the target value, and in response:
f) applying one or more programming voltages to the second memory cell;
g) applying one or more read voltages to the first and second memory cells to produce second read signals on the first and second bit lines; and
h) ceasing the program operation if a difference in amplitudes of the second read signals matches the target value; and
i) repeating steps (f)-(h) if an absolute value of the difference in amplitudes of the second read signals is greater than the target value.
6. A memory device comprising:
a plurality of memory cells arranged in rows and columns;
a plurality of bit lines each connected to one of the columns of memory cells;
one or more sense amplifiers configured to detect signal amplitudes on the bit lines; and
calculation circuitry configured to produce output signals each based upon a difference in signal amplitudes on two of the bit lines; and
a controller configured to perform a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein a first of the output signals is based upon a difference in signal amplitudes on the first and second bit lines, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells so that the first output signal has a first amplitude;
c) ceasing the program operation if the first amplitude matches a target value;
d) repeating steps (a)-(c) if an absolute value of the first amplitude is less than the target value;
e) determining that the absolute value of the first amplitude is greater than the target value, and in response:
f) applying one or more programming voltages to the second memory cell;
g) applying one or more read voltages to the first and second memory cells so that the first output signal has a second amplitude; and
h) ceasing the program operation if an absolute value of the second amplitude matches the target value;
i) repeating steps (f)-(h) if the absolute value of the second amplitude is greater than the target value.
3. A memory device comprising:
a plurality of memory cells arranged in rows and columns;
a plurality of bit lines each connected to one of the columns of memory cells;
a plurality of differential sense amplifiers, each having first and second inputs and an output, wherein for each of the differential sense amplifiers:
the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs,
the first input is connected to one of the bit lines, and
the second input is connected to another one of the bit lines; and
a controller configured to perform a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude;
c) ceasing the program operation if the first amplitude matches a target value;
d) repeating steps (a)-(c) if an absolute value of the first amplitude is less than the target value;
e) determining that the absolute value of the first amplitude is greater than the target value, and in response:
f) applying one or more programming voltages to the second memory cell;
g) applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a second amplitude; and
h) ceasing the program operation if an absolute value of the second amplitude matches the target value;
i) repeating steps (f)-(h) if the absolute value of the second amplitude is greater than the target value.
9. A method of programming a memory device having a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output, wherein for each of the differential sense amplifiers the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines and the second input is connected to another one of the bit lines, the method comprising:
performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude;
c) ceasing the program operation if the first amplitude matches a target value;
d) repeating steps (a)-(c) if an absolute value of the first amplitude is less than the target value;
e) determining that the absolute value of the first amplitude is greater than the target value, and in response:
f) applying one or more programming voltages to the second memory cell;
g) applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a second amplitude; and
h) ceasing the program operation if an absolute value of the second amplitude matches the target value;
i) repeating steps (f)-(h) if the absolute value of the second amplitude is greater than the target value.
2. The device of
apply one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a second amplitude; and
determine the second amplitude matches the target value.
5. The device of
apply one or more read voltages to the first and second memory cells so that the first output signal has a second amplitude; and
determine the second amplitude matches the target value.
8. The method of
applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a second amplitude; and
determining the second amplitude matches the target value.
11. The method of
applying one or more read voltages to the first and second memory cells to produce second read signals on the first and second bit lines; and
determining a difference in amplitudes of the second read signals matches the target value.
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This application claims the benefit of U.S. Provisional Application No. 62/558,816 filed Sep. 14, 2017, and which is incorporated herein by reference.
The present invention relates to non-volatile memory arrays.
Split gate non-volatile memory cells, and arrays of such cells, are well known. For example, U.S. Pat. No. 5,029,130 (“the '130 patent”) discloses an array of split gate non-volatile memory cells. The memory cell is shown in
The memory cell is erased (where electrons are removed from the floating gate) by placing a high positive voltage on the control gate 22, which causes electrons on the floating gate 20 to tunnel through the intermediate insulation 24 from the floating gate 20 to the control gate 22 via Fowler-Nordheim tunneling.
The memory cell is programmed (where electrons are placed on the floating gate) by placing a positive voltage on the control gate 22, and a positive voltage on the drain 16. Electron current will flow from the source 14 towards the drain 16. The electrons will accelerate and become heated when they reach the gap between the control gate 22 and the floating gate 20. Some of the heated electrons will be injected through the gate oxide 26 onto the floating gate 20 due to the attractive electrostatic force from the floating gate 20.
The memory cell is read by placing positive read voltages on the drain 16 and control gate 22 (which turns on the channel region under the control gate). If the floating gate 20 is positively charged (i.e. erased of electrons and positively coupled to the drain 16), then the portion of the channel region under the floating gate 20 is turned on as well, and current will flow across the channel region 18, which is sensed as the erased or “1” state. If the floating gate 20 is negatively charged (i.e. programmed with electrons), then the portion of the channel region under the floating gate 20 is mostly or entirely turned off, and current will not flow (or there will be little flow) across the channel region 18, which is sensed as the programmed or “0” state.
The architecture of the memory array is shown in
Those skilled in the art understand that the source and drain can be interchangeable, where the floating gate can extend partially over the source instead of the drain, as shown in
Split gate memory cells having more than two gates are also known. For example, memory cells have source region 14, drain region 16, floating gate 20 over a first portion of channel region 18, a control gate 22 over a second portion of the channel region 18, a coupling gate 28 over the floating gate 20, and an erase gate 30 over the source region 14 are known, as shown in
The architecture for a four-gate memory cell array can be configured as shown in
TABLE 1
CG 22a
BL 16a
SL 14a
CG 28a
EG 30a
Sel.
Unsel.
Sel.
Unsel.
Sel.
Unsel.
Sel.
Unsel.
Sel.
Unsel.
Erase
0 V
0 V
0 V
0 V
0 V
0 V
0 V
0 V
11.5 V
0 V
Read
2.5 V
0 V
0.8 V
0 V
0 V
0 V
2.5 V
2.5 V
0 V
0 V
Program
1 V
0 V
1 μA
2.5 V
4.5 V
0.5 V
10.5 V
0/2.5 V
4.5 V
0.5 V
Split gate non-volatile memory cells having three conductive gates, and arrays of such cells, are also known. For example, U.S. Pat. No. 7,315,056 (“the '056 patent”) discloses an array of split gate non-volatile memory cells. The memory cell is shown in
The memory cell is erased (where electrons are removed from the floating gate) by placing a high positive voltage on the PE gate 32, which causes electrons on the floating gate 20 to tunnel through the intermediate insulation from the floating gate 20 to the PE gate 32 via Fowler-Nordheim tunneling.
The memory cell is programmed (where electrons are placed on the floating gate) by placing a positive voltage on the control gate 22, and a positive voltage on the source region 14 and a positive voltage on the PE gate 32. Electron current will flow from the drain 16 towards the source 14. The electrons will accelerate and become heated when they reach the gap between the control gate 22 and the floating gate 20. Some of the heated electrons will be injected through the gate oxide onto the floating gate 20 due to the attractive electrostatic force from the floating gate 20.
The memory cell is read by placing positive read voltages on the drain 16 and control gate 22 (which turns on the channel region under the control gate). If the floating gate 20 is positively charged (i.e. erased of electrons and positively coupled to the source 14), then the portion of the channel region under the floating gate 20 is turned on as well, and current will flow across the channel region 18, which is sensed as the erased or “1” state. If the floating gate 20 is negatively charged (i.e. programmed with electrons), then the portion of the channel region under the floating gate 20 is mostly or entirely turned off, and current will not flow (or there will be little flow) across the channel region 18, which is sensed as the programmed or “0” state.
Exemplary operating voltages can be:
TABLE 2
Control Gate
Drain
PE Gate
Source
Operation
(22)
(16)
(32)
(14)
Erase
0
0
10-12
Volts
0
Program
1-2
Volts
~1
μA
4-6
Volts
6-8 Volts
Read
1.5-3.3
Volts
0.5-1.0
Volts
0
0
The architecture of the memory array is shown in
Recently, new applications for split gate non-volatile memory cells have been developed that requires each memory cell to be programmed to specific values (including analog values) for either multibit storage or analog signal storage. Programming can be performed by programming the memory cells using one or more short program voltage pulses, followed by a program verify operation to confirm the program state of the memory cell. If the cell is insufficiently programmed, one or more additional program pulses are applied. This continues until the program verify operation confirms the cell has achieved the desired program state.
However, if the program verify operation determines that a cell has been over-programmed (i.e., overshoot), there is no way to erase just that memory cell. The entire row, multiple rows, a block, or the entire array of memory cells would have be erased to address the over-programmed cell. Then, programming of all the erased cells would have to begin again from the beginning.
There is a need for a memory cell array that allows for compensation of an over-programmed memory cell without having to erase the surrounding memory cells.
The aforementioned problems and needs are addressed by a memory device that includes a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output. For each of the differential sense amplifiers, the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines, and the second input is connected to another one of the bit lines.
A memory device includes a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, one or more sense amplifiers configured to detect signal amplitudes on the bit lines, and calculation circuitry configured to produce output signals each based upon a difference in signal amplitudes on two of the bit lines.
A method of programming a memory device having a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output, wherein for each of the differential sense amplifiers the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines and the second input is connected to another one of the bit lines. The method includes performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by applying one or more programming voltages to the first memory cell, applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude, and determining the first amplitude does not match a target value, and in response applying one or more programming voltages to the second memory cell.
A method of programming a memory device having a plurality of memory cells arranged in rows and columns, a plurality of bit lines each connected to one of the columns of memory cells, and a plurality of differential sense amplifiers each having first and second inputs and an output, wherein for each of the differential sense amplifiers the differential sense amplifier is configured to generate an output signal on the output having an amplitude that is based upon a difference in signal amplitudes on the first and second inputs, the first input is connected to one of the bit lines and the second input is connected to another one of the bit lines. The method includes performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, wherein the first and second bit lines are connected to the first and second inputs, respectively, of a first of the differential sense amplifiers, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells so that a signal on the output of the first differential sense amplifier has a first amplitude;
c) ceasing the program operation if the first amplitude matches a target value;
d) repeating steps (a)-(c) if an absolute value of the first amplitude is less than the target value;
e) determining that the absolute value of the first amplitude is greater than the target value, and in response:
A method of programming a memory device having a plurality of memory cells arranged in rows and columns, and a plurality of bit lines each connected to one of the columns of memory cells, where the method includes performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, by applying one or more programming voltages to the first memory cell, applying one or more read voltages to the first and second memory cells to produce first read signals on the first and second bit lines, and determining that a difference in amplitudes of the first read signals does not match a target value, and in response applying one or more programming voltages to the second memory cell.
A method of programming a memory device having a plurality of memory cells arranged in rows and columns, and a plurality of bit lines each connected to one of the columns of memory cells. The method includes performing a program operation on a first of the memory cells that is connected to a first of the bit lines and on a second of the memory cells that is connected to a second of the bit lines, by:
a) applying one or more programming voltages to the first memory cell;
b) applying one or more read voltages to the first and second memory cells to produce first read signals on the first and second bit lines;
c) ceasing the program operation if a difference in amplitudes of the first read signals matches a target value;
d) repeating steps (a)-(c) if an absolute value of the difference in amplitudes of the first read signals is less than the target value;
e) determining that the absolute value of the difference in amplitudes of the first read signals is greater than the target value, and in response:
Other objects and features of the present invention will become apparent by a review of the specification, claims and appended figures.
The present invention involves a new architecture configuration for arrays of split-gate non-volatile memory cells that provide single cell compensation of over-programmed memory cells, or of under-programmed memory cells. The architecture involves pairs of memory cells (each pair referred to collectively as “supercell” 40), where the read outputs of the memory cell pair are provided as inputs to a differential sense amplifier 42, as shown in
In the case where Cell 10A is being programmed to a desired target positive programming state, one or more programming pulses of voltages are used to program Cell 10A. One or more intervening read operations are used to confirm the programming state of Cell 10. The process is repeated until the desired programming state is achieved. However, if Cell 10A becomes over-programmed, that can be compensated for by programming Cell 10B to a level approximately equal to the over-shoot. Then, when the output of Cell 10B is effectively subtracted from the output of Cell 10A by the differential sense amplifier 42, the desired programming output (as the output 42a of the differential sense amplifier 42) is achieved. This solution avoids having to erase Cell 10A and start over if it becomes over-programmed. If Cell 10B is over-programmed, then Cell 10A can again be programmed to a level approximately equal to the original over programmed state plus the amount of over-shoot of Cell 10B. This alternating programming of Cells 10A and 10B can continue until the precise desired programming state of the supercell 40 is achieved.
Similarly, where there is a desired negative programming state, Cell 10B is programmed to achieve that state because it is provided as a negative input to the differential sense amplifier 42 (as confirmed by one or more intervening read operations). If Cell 10B is over-programmed in trying to achieve that state, Cell 10A is programmed to a level approximately equal to the over-shoot, and so on, until the precise desired programming state of the supercell 40 (when the output of Cell 10A is effectively added to the (negative) output of Cell 10B by the differential sense amplifier 42) is achieved. Therefore, in either case (desired programming state is positive or negative), the programming of the first cell is performed until the absolute value of the output signal on output 42a matches a target value. If the first cell is becomes over programmed instead (i.e., the absolute value of the output signal exceeds the target value), then the second cell is programmed to reduce the absolute value of the output signal until it matches the target value.
An exemplary program operation of the upper left most supercell 40 (i.e., supercell 40 having memory cells 10A and 10B connected to word lines WL0 and WL 1 and bit lines BL0 and BL1) can begin by applying one or more programming voltages to cell 10A. Then, one or more read voltages are applied to supercell 40 to determine if the desired program state was achieved (i.e. the amplitude of the signal on output 42a of differential sense amplifier 42-1 matches a target value). Matching includes the signal amplitude being exactly the target value, or within a certain range around the target value. If there is match, programming ceases. If there is no match because of an undershoot, the above programming and reading is repeated. If there is no match because of an overshoot, then one or more programming voltages are applied to cell 10B to compensate for the overshoot. Then, one or more read voltages are applied to the supercell to determine if the desired program state was achieved (i.e., the amplitude of the signal on output 42a of differential sense amplifier 42-1 matches the target value). The above overshoot or undershoot programming and reading continues until the amplitude of the signal on the differential sense amplifier output matches the target value.
It is to be understood that the present invention is not limited to the embodiment(s) described above and illustrated herein, but encompasses any and all variations falling within the scope of any claims. For example, references to the present invention herein are not intended to limit the scope of any claim or claim term, but instead merely make reference to one or more features that may be covered by one or more of the claims. Materials, processes and numerical examples described above are exemplary only, and should not be deemed to limit the claims. Single layers of material could be formed as multiple layers of such or similar materials, and vice versa. Lastly, while the calculation circuitry 50 is shown as being separate from the sense amplifiers 48, the calculation circuitry 50 could be incorporated as part of the sense amplifier circuitry 48. Alternately, the calculation circuitry 50 could be incorporated as part of the controller 44. While the supercells are shown as two adjacent memory cells in the same row, the supercells could include two memory cells in different rows. For example, a supercell 40 could include the memory cell connected to word line WL0 and bit line BL0 and the memory cell connected to word line WL1 and BL1. In fact, the pairing of memory cells to form the super cells 40 for bit lines BL0 and BL1 could include pairing any one of the memory cells connected to bit line BL0 with any one of the memory cells connected to bit line BL1.
It should be noted that, as used herein, the terms “over” and “on” both inclusively include “directly on” (no intermediate materials, elements or space disposed there between) and “indirectly on” (intermediate materials, elements or space disposed there between). Likewise, the term “adjacent” includes “directly adjacent” (no intermediate materials, elements or space disposed there between) and “indirectly adjacent” (intermediate materials, elements or space disposed there between), “mounted to” includes “directly mounted to” (no intermediate materials, elements or space disposed there between) and “indirectly mounted to” (intermediate materials, elements or spaced disposed there between), and “electrically coupled” includes “directly electrically coupled to” (no intermediate materials or elements there between that electrically connect the elements together) and “indirectly electrically coupled to” (intermediate materials or elements there between that electrically connect the elements together). For example, forming an element “over a substrate” can include forming the element directly on the substrate with no intermediate materials/elements there between, as well as forming the element indirectly on the substrate with one or more intermediate materials/elements there between.
Patent | Priority | Assignee | Title |
Patent | Priority | Assignee | Title |
4991141, | Feb 08 1990 | Texas Instruments Incorporated | Sense amplifier and method for sensing the outputs of static random access memory cells |
5029130, | Jan 22 1990 | Silicon Storage Technology, Inc. | Single transistor non-valatile electrically alterable semiconductor memory device |
5327386, | Nov 20 1990 | Mitsubishi Denki Kabushiki Kaisha | Dual port semiconductor memory device with high speed data transfer during reading and writing modes |
6947325, | May 27 2003 | DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT | Non-volatile semiconductor memory device and controlling method of the same |
7315056, | Jun 07 2004 | Silicon Storage Technology, Inc | Semiconductor memory array of floating gate memory cells with program/erase and select gates |
7927994, | Dec 06 2010 | Silicon Storage Technology, Inc. | Split gate non-volatile flash memory cell having a floating gate, control gate, select gate and an erase gate with an overhang over the floating gate, array and method of manufacturing |
20050237798, | |||
20150029778, | |||
20150318043, | |||
TW200721177, |
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