An optical filter may include a substrate. The optical filter may include a set of alternating high refractive index layers and low refractive index layers disposed onto the substrate to polarization beam split incident light. The set of alternating high refractive index layers and low refractive index may layers may be disposed such that a first polarization of the incident light with a spectral range of less than approximately 800 nanometers (nm) is reflected by the optical filter and a second polarization of the incident light with a spectral range of greater than approximately 800 nm is passed through by the optical filter. The high refractive index layers may be hydrogenated silicon (Si:H). The low refractive index layers may be silicon dioxide (SiO2).
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1. A polarizing optical coating, comprising:
a set of layers including:
a first subset of layers,
the first subset of layers comprising hydrogenated silicon (Si:H) with a first refractive index; and
a second subset of layers,
the second subset of layers comprising a material with a second refractive index,
the second refractive index being less than the first refractive index,
a first polarization of incident light, associated with the polarizing optical coating, being in the s-plane,
a second polarization of the incident light being in the p-plane,
the polarizing optical coating being associated with greater than or equal to 95% transmission for the second polarization of the incident light at a spectral range of at least one of:
approximately 890 nm to approximately 940 nm, or
approximately 930 nm to approximately 960,
the polarizing optical coating being associated with greater than or equal to 95% reflectance for the incident light in the s-plane,
the first subset of layers including a first layer associated with a first thickness,
the second subset of layers including a second layer associated with a second thickness, and
the second thickness being different from the first thickness.
16. An optical filter, comprising:
a substrate; and
a set of alternating high refractive index layers and low refractive index layers disposed onto the substrate to polarization beam split incident light,
such that a first polarization of the incident light with a spectral range of less than approximately 800 nanometers (nm) is reflected by the optical filter and a second polarization of the incident light with a spectral range of greater than approximately 800 nm is passed through by the optical filter,
the first polarization of the incident light being in the s-plane,
the second polarization of the incident light being in the p-plane,
the optical filter being associated with greater than or equal to 95% transmission for the second polarization of the incident light at a spectral range of at least one of:
approximately 890 nm to approximately 940 nm, or
approximately 930 nm to approximately 960 nm, and
the optical filter being associated with greater than or equal to 95% reflectance for the incident light in the s-plane,
the high refractive index layers being hydrogenated silicon (Si:H),
the low refractive index layers being silicon dioxide (SiO2),
the optical filter being associated with a quantity of layers of the high refractive index layers and the low refractive index layers, and
the quantity of layers being in a range of 10 layers to 100 layers.
18. An optical system, comprising:
an optical transmitter to emit near-infrared (NIR) light toward a person for gesture recognition, toward an object for detecting objects in proximity to a vehicle or the person, or toward the object for detecting a proximity to the object using a lidar technique;
a polarizing optical filter to filter an input optical signal and provide the filtered input optical signal,
the input optical signal including the NIR light from the optical transmitter and ambient light from another optical source,
the polarizing optical filter including a set of dielectric thin film layers,
the set of dielectric thin film layers including:
a first subset of layers of hydrogenated silicon with a first refractive index, and
a second subset of layers of a material with a second refractive index less than the first refractive index,
a first polarization of incident light, associated with the polarizing optical filter, being in the s-plane,
a second polarization of the incident light being in the p-plane,
the polarizing optical filter being associated with greater than or equal to 95% transmission for the second polarization of the incident light at a spectral range of at least one of:
approximately 890 nm to approximately 940 nm, or
approximately 930 nm to approximately 960,
the optical filter being associated with greater than or equal to 95% reflectance for the incident light in the s-plane,
the first subset of layers including a first layer associated with a first thickness,
the second subset of layers including a second layer associated with a second thickness, and
the second thickness being different from the first thickness; and
an optical receiver to receive the filtered input optical signal and provide an output electrical signal.
2. The polarizing optical coating of
where at least one of the first thickness or the second thickness is between 3 nm and 300 nm, and
where the material includes at least one of:
a silicon dioxide (SiO2) material,
an aluminum oxide (Al2O3) material,
a titanium dioxide (TiO2) material,
a niobium pentoxide (Nb2O5) material,
a tantalum pentoxide (Ta2O5) material, or
a magnesium fluoride (MgF2) material.
3. The polarizing optical coating of
where the first subset of layers are high refractive index layers (H) and the second subset of layers are low refractive index layers (L),
where the set of layers are arranged in at least one of:
an (H-L)m order,
an (H-L)m-H order,
an (L-H)m order, or
an L-(H-L)m order,
where m is a quantity of layers, and
where the quantity of layers is selected based on an intended set of optical characteristics.
4. The polarizing optical coating of
5. The polarizing optical coating of
6. The polarizing optical coating of
7. The polarizing optical coating of
8. The polarizing optical coating of
9. The polarizing optical coating of
10. The polarizing optical coating of
11. The polarizing optical coating of
12. The polarizing optical coating of
13. The polarizing optical coating of
the first plane of polarization being orthogonal to the second plane of polarization.
14. The polarizing optical coating of
15. The polarizing optical coating of
17. The optical filter of
where the optical filter is associated with greater than or equal to 99% transmission for the second polarization of the incident light at the spectral range of approximately 890 nm to approximately 940 nm; and
where the optical filter is associated with greater than or equal to 99% reflectance for the incident light in the s-plane.
19. The optical system of
20. The optical system of
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In some instances, it may be desirable to block certain wavelengths of energy and/or only transmit certain wavelengths energy to a detector. For example, some detectors may be sensitive to energy in certain wavelengths. In one example, an optical transmitter may emit light that is ultimately received by an optical receiver. For example, in a gesture recognition system, the optical transmitter may transmit near infrared (NIR) light toward a user, and the NIR light may be reflected off the user toward the optical receiver. In this case, the optical receiver may capture information regarding the NIR light, and the information may be used to identify a gesture being performed by the user. For example, a device may use the information to generate a three dimensional representation of the user, and to identify the gesture being performed by the user based on the three dimensional representation. However, during transmission of the NIR light toward the user and/or during reflection from the user toward the optical receiver, ambient light may interfere with the NIR light. Thus, the optical receiver may be optically coupled to an optical filter, such as a bandpass filter, to filter ambient light and to pass through NIR light toward the optical receiver.
In some instances, the optical filter may include a polarizing beamsplitter. In general, a polarizing beamsplitter physically separates an incident beam of energy into two linearly polarized sub-beams (“P” and “S”). One “sub-beam” contains “P” polarized energy (e.g., the electric field is parallel or within the plane of incidence of the incident beam). The second “sub-beam” contains “S” polarized energy (e.g., the electric field is perpendicular to the plane of incidence of the incident beam).
According to some possible implementations, a polarizing optical coating may include a set of layers. The set of layers may include a first subset of layers. The first subset of layers may include hydrogenated silicon (Si:H) with a first refractive index. The set of layers may include a second subset of layers. The second subset of layers may include a material with a second refractive index. The second refractive index may be less than the first refractive index.
According to some possible implementations, an optical filter may include a substrate. The optical filter may include a set of alternating high refractive index layers and low refractive index layers disposed onto the substrate to polarization beam split incident light. The set of alternating high refractive index layers and low refractive index may layers may be disposed such that a first polarization of the incident light with a spectral range of less than approximately 800 nanometers (nm) is reflected by the optical filter and a second polarization of the incident light with a spectral range of greater than approximately 800 nm is passed through by the optical filter. The high refractive index layers may be hydrogenated silicon (Si:H). The low refractive index layers may be silicon dioxide (SiO2).
According to some possible implementations, an optical system may include an optical transmitter to emit near-infrared (NIR) light. The optical system may include a polarizing optical filter to filter an input optical signal and provide the filtered input optical signal. The input optical signal may include the NIR light from the optical transmitter and ambient light from another optical source. The polarizing optical filter may include a set of dielectric thin film layers. The set of dielectric thin film layers may include a first subset of layers of hydrogenated silicon with a first refractive index. The set of dielectric thin film layers may include second subset of layers of a material with a second refractive index less than the first refractive index. The filtered input optical signal may include a reduced intensity of ambient light relative to the input optical signal. An optical receiver may receive the filtered input optical signal and provide an output electrical signal.
The following detailed description of example implementations refers to the accompanying drawings. The same reference numbers in different drawings may identify the same or similar elements. As used herein, the terms “substantially,” “approximately,” and “about” indicate a range of values within +/−5% of a stated value.
An optical receiver may receive light initiating from an optical source, such as an optical transmitter. For example, the optical receiver may receive near infrared (NIR) light from the optical transmitter and reflected off a target, such as a user or an object. In this case, the optical receiver may receive the NIR light as well as ambient light, such as visible spectrum light. The ambient light may reduce an accuracy of a determination relating to the NIR light. For example, in a gesture recognition system, the ambient light may reduce an accuracy of generation of a three-dimensional image of the target based on the NIR light. Thus, the optical receiver may be optically coupled to an optical filter, such as a bandpass filter, to filter ambient light and to pass through NIR light toward the optical receiver.
The optical filter may include a set of dielectric thin film layers. The set of dielectric thin film layers are selected and deposited to block a portion of out-of-band light below and/or above a particular threshold, such as below 700 nanometers (nm). For example, the set of dielectric thin film layers may be selected to filter out the ambient light. The optical filter may perform a polarization beamsplitting functionality for the light. For example, the optical filter may reflect a first portion of the light with a first polarization and may pass through a second portion of the light with a second polarization when the second polarization is desired to be received by the optical receiver.
However, an excess quantity of dielectric thin film layers may result in a relatively thick coating. The relatively thick coating may be expensive to manufacture as a result of sequential deposition of each dielectric thin film layer, and may experience an excessive stress condition resulting in poor durability. Moreover, the relatively thick coating may be associated with an insufficient flatness for a polarization beamsplitting functionality. Furthermore, when silicon layers are used for a portion of the dielectric thin film layers, the silicon layers may be associated with a relatively high absorption coefficient for light below approximately 1100 nm, which may make the silicon layers unsuitable for utilization as a high index material in a polarizing beamsplitter with a relatively high transmission requirement for a pass band below approximately 1100 nm.
Implementations, described, herein, may utilize a hydrogenated silicon (Si:H) material as a set of high index layers for polarizing optical coating, such as an optical polarizing filter. In this way, the optical filter (i.e., the polarizing optical coating) may reflect ambient light and pass through NIR light, and may perform a polarization beamsplitting functionality. Based on using hydrogenated silicon as a material for the set of high index layers of the optical filter, a thickness of the optical filter and a cost of the optical filter are reduced, and a durability of the optical filter and a set of optical characteristics of the optical filter are improved relative to utilizing another type of material for the optical filter.
It should be understood that the implementations, described herein may be utilized for a traditional polarizing beamsplitter (e.g., the P-polarized energy is transmitted and S-polarized energy is reflected) and/or a reverse polarization beamsplitting (e.g., the P-polarized energy is reflected and S-polarized energy is transmitted).
Although implementations, described herein, may be described in terms of an optical filter in a sensor system, implementations described herein may be used in another type of system, may be used external to a system, or the like.
As further shown in
As further shown in
As further shown in
In a traditional polarizing beamsplitter, the first polarization portion of input optical signal 160 may be reflected S-polarized light and the second polarization portion of input optical signal 170 may be transmitted P-polarized light. In contrast, in a reverse polarizing beamsplitter, the first polarization portion of input optical signal 160 may be reflected P-polarized light and the second polarization portion of input optical signal 170 may be transmitted S-polarized light. It should also be understood that in some implementations, the energy may travel in the opposite direction to that shown in in
As indicated above,
As shown in
As indicated above,
As shown in
As further shown in
Although
As indicated above,
Optical filter coating portion 410 includes a set of optical filter layers. For example, optical filter coating portion 410 includes a first set of layers 430-1 through 430-N (N≥1) and a second set of layers 440-1 through 440-(N+1). Layers 430 may include a set of layers of a high refractive index material (H layers), such as hydrogenated silicon layers. Layers 440 may include a set of layers of a low refractive index material (L layers), such as silicon dioxide layers, aluminum oxide (Al2O3) layers, magnesium fluoride (MgF2) layers, or the like. In some implementations, layers 430 and 440 may be stacked in a particular order, such as an (H-L)m (m≥1) order, an (H-L)m-H order, an (L-H)m order, an L-(H-L)m order, or the like. For example, as shown, layers 430 and 440 are positioned in an (H-L)n-H order with an H layer disposed at a surface of optical filter 400 and an H layer disposed at a surface of substrate 420.
In some implementations, optical filter coating portion 410 may be associated with a particular quantity of layers, m. For example, as described with regard to
In some implementations, a particular hydrogenated silicon based material may be selected for the H layers 430. In some implementations, layers 430 and/or 440 may be associated with a particular extinction coefficient, such as an extinction coefficient of less than approximately 0.001, less than approximately 0.0007, less than approximately 0.0006, less than approximately 0.0005, an extinction coefficient of less than approximately 0.0003, an extinction coefficient of less than approximately 0.0001, or the like over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, the wavelength of approximately 954 nm, or the like). In some implementations, layers 430 may be selected and/or manufactured to include a refractive index of greater than approximately 3, approximately 3.5, approximately 3.6, approximately 3.7, approximately 3.75 or the like over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, the wavelength of approximately 954 nm, or the like. In another example, layers 430 may be selected to include a refractive index of approximately 3.6 at a wavelength of approximately 830 nm. In some implementations, layers 430 and/or 440 may be manufactured to cause a first portion of light to be blocked (e.g., less than approximately 800 nm, less than approximately 700 nm, etc.) and a second portion of light to be passed (e.g., a spectral range less than approximately 1700 nm, at approximately 1550 nm, less than approximately 1100 nm, etc.).
In some implementations, a particular material may be selected for L layers 440. For example, layers 440 may include a set of silicon dioxide (SiO2) layers, a set of aluminum oxide (Al2O3) layers, a set of titanium dioxide (TiO2) layers, a set of niobium pentoxide (Nb2O5) layers, a set of tantalum pentoxide (Ta2O5) layers, a set of magnesium fluoride (MgF2) layers, or the like. In this case, layers 440 may be selected to include a refractive index lower than that of the layers 430 over, for example, a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, the wavelength of approximately 954 nm, or the like). For example, layers 440 may be selected to be associated with a refractive index of less than 3 over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, a spectral range of approximately 800 nm, the wavelength of approximately 954 nm, or the like).
In another example, layers 440 may be selected to be associated with a refractive index of less than 2.5 over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, a spectral range of approximately 800 nm, the wavelength of approximately 954 nm, or the like). In another example, layers 440 may be selected to be associated with a refractive index of less than 2 over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, a spectral range of approximately 800 nm, the wavelength of approximately 954 nm, or the like). In another example, layers 440 may be selected to be associated with a refractive index of less than 1.5 over a particular spectral range (e.g., the spectral range of approximately 800 nm to approximately 1100 nm, the spectral range of approximately 900 nm to approximately 1000 nm, the wavelength of approximately 954 nm, or the like). In some implementations, the particular material may be selected for L layers 440 based on a desired width of an out-of-band blocking spectral range, a desired center-wavelength shift associated with a change of AOI, or the like.
In some implementations, optical filter coating portion 410 may be fabricated using a sputtering procedure. For example, optical filter coating portion 410 may be fabricated using a pulsed-magnetron based sputtering procedure to sputter alternating layers 430 and 440 on a glass substrate. In some implementations, optical filter coating portion 410 may be associated with a relatively low center-wavelength shift with change in AOI. For example, optical filter coating portion 410 may cause a center-wavelength shift of less than approximately 20 nm, approximately 15 nm, approximately 12 nm, or the like in magnitude with a change in incidence angle from 0° to 30°. In some implementations, optical filter coating portion 410 is attached to a substrate, such as substrate 420. For example, optical filter coating portion 410 may be attached to a glass substrate. In some implementations, optical filter coating portion 410 may be associated with an incident medium, such as an air medium or glass medium, with a reflection of greater than 50% in a first polarization plane, with a transmission of greater than 50% in a second polarization plane, with a nominal AOI of incident light relative to a surface of optical filter 400 from 15° to 75°, and with a range of angles of incident light relative to the nominal AOI of 0° to 45°. In some implementations, optical filter 400 may be disposed between a set of prisms.
In some implementations, an annealing procedure may be utilized to fabricate optical filter coating portion 410. For example, after sputter deposition of layers 430 and 440 on a substrate, optical filter 400 may be annealed to improve one or more optical characteristics of optical filter 400, such as reducing an absorption coefficient of optical filter 400 relative to another optical filter for which an annealing procedure is not performed.
As indicated above,
In this way, a set of hydrogenated silicon layers may be used as a high index material for an optical filter coating of an optical filter to provide out-of-band blocking of visible light, transmission of NIR light, and polarization beamsplitting with a reduced thickness, cost, and time of manufacture relative to another type of material used for a set of high index layers. Moreover, based on using hydrogenated silicon, out-of-band blocking and in-band transmission are improved relative to another type of material.
The foregoing disclosure provides illustration and description, but is not intended to be exhaustive or to limit the implementations to the precise form disclosed. Modifications and variations are possible in light of the above disclosure or may be acquired from practice of the implementations.
Some implementations are described herein in connection with thresholds. As used herein, satisfying a threshold may refer to a value being greater than the threshold, more than the threshold, higher than the threshold, greater than or equal to the threshold, less than the threshold, fewer than the threshold, lower than the threshold, less than or equal to the threshold, equal to the threshold, etc.
Even though particular combinations of features are recited in the claims and/or disclosed in the specification, these combinations are not intended to limit the disclosure of possible implementations. In fact, many of these features may be combined in ways not specifically recited in the claims and/or disclosed in the specification. Although each dependent claim listed below may directly depend on only one claim, the disclosure of possible implementations includes each dependent claim in combination with every other claim in the claim set.
No element, act, or instruction used herein should be construed as critical or essential unless explicitly described as such. Also, as used herein, the articles “a” and “an” are intended to include one or more items, and may be used interchangeably with “one or more.” Furthermore, as used herein, the term “set” is intended to include one or more items (e.g., related items, unrelated items, a combination of related items, and unrelated items, etc.), and may be used interchangeably with “one or more.” Where only one item is intended, the term “one” or similar language is used. Also, as used herein, the terms “has,” “have,” “having,” or the like are intended to be open-ended terms. Further, the phrase “based on” is intended to mean “based, at least in part, on” unless explicitly stated otherwise.
Rowlands, Scott, Hendrix, Karen Denise
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