A solid state image pickup device includes: a photoelectric conversion element line having a plurality of first and second photoelectric conversion elements disposed alternately, the first and second photoelectric conversion elements being sensitive to light of different colors; first and second charge storage area lines for storing electric charges photoelectrically converted by the first and second photoelectric conversion elements; first and second charge read units for reading the electric charges stored in the first and second charge storage area lines; first and second transfer members for sequentially transferring the read electric charges to an external circuit; and first and second charge drain members for draining electric charges in the first and second charge storage members.
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1. A solid state image pickup device comprising:
a photoelectric conversion element line having a plurality of first and second conversion elements disposed alternately, the first and second photoelectric conversion elements converting light having different colors into electric charges; first transfer means for transferring electric charges generated by the plurality of first photoelectric conversion elements to an external circuit; a first transfer gate for transferring the electric charges generated by the plurality of first photoelectric conversion elements to said first transfer means; a first drain for draining unnecessary electric charges generated by the plurality of first photoelectric conversion elements; a first drain gate for transferring the unnecessary electric charges generated by the plurality of first photoelectric conversion elements to said first drain; second transfer means for transferring electric charges generated by the plurality of second photoelectric conversion elements to an external circuit; a second transfer gate for transferring the electric charges generated by the plurality of second photoelectric conversion elements to said second transfer means; a second drain for draining unnecessary electric charges generated by the plurality of second photoelectric conversion elements; a second drain gate for transferring the unnecessary electric charges generated by the plurality of second photoelectric conversion elements to said second drain; and a controller for independently controlling a charge transfer by said first and second transfer gates or by said first and second drain gates.
29. An image sensor having a first line sensor for generating image signals of red and blue colors and a second line sensor for generating image signals of green color, wherein the first line sensor comprising:
a photoelectric conversion element line having a plurality of first and second conversion elements disposed alternately, the first and second photoelectric conversion elements converting light of red and blue colors into electric charges; first transfer means for transferring electric charges generated by the plurality of first photoelectric conversion elements to an external circuit; a first transfer gate for transferring the electric charges generated by the plurality of first photoelectric conversion elements to said first transfer means; a first drain for draining unnecessary electric charges generated by the plurality of first photoelectric conversion elements; a first drain gate for transferring the unnecessary electric charges generated by the plurality of first photoelectric conversion elements to said first drain; second transfer means for transferring electric charges generated by the plurality of second photoelectric conversion elements to an external circuit; a second transfer gate for transferring the electric charges generated by the plurality of second photoelectric conversion elements to said second transfer means; a second drain for draining unnecessary electric charges generated by the plurality of second photoelectric conversion elements; a second drain gate for transferring the unnecessary electric charges generated by the plurality of second photoelectric conversion elements to said second drain; and a controller for independently controlling a charge transfer by said first and second transfer gates or by said first and second drain gates.
2. A solid state image pickup device according to
3. A solid state image pickup device according to
4. A solid state image pickup device according to
5. A solid state image pickup device according to
6. A solid state image pickup device according to
7. A solid state image pickup device according to
8. A solid state image pickup device according to
9. A solid state image pickup device according to
a first amplifier for amplifying a signal corresponding to an amount of electric charges transferred by said first transfer means; and a second amplifier for amplifying a signal corresponding to an amount of electric charges transferred by said second transfer means.
10. A solid state image pickup device according to
a plurality of first charge storage areas for storing electric charges generated by the plurality of first photoelectric conversion elements; and a plurality of second charge storage areas for storing electric charges generated by the plurality of second photoelectric conversion elements, wherein: said first transfer gate is provided between said first charge storage area and said first transfer means and transfers electric charges stored in said first charge storage area to said first transfer means; said first drain gate is provided between said first charge storage area and said first drain and transfers electric charges stored in said first charge storage area to said first drain; said second transfer gate is provided between said second charge storage area and said second transfer means and transfers electric charges stored in said second charge storage area to said second transfer means; and said second drain gate is provided between said second charge storage area and said second drain and transfers electric charges stored in said second charge storage area to said second drain. 11. A solid state image pickup device according to
a first barrier gate for transferring electric charges generated by the first photoelectric conversion element to said first charge storage area; and a second barrier gate for transferring electric charges generated by the second photoelectric conversion element to said second charge storage area.
12. A solid state image pickup device according to
13. A solid state image pickup device according to
14. A solid state image pickup device according to
15. A solid state image pickup device according to
16. A solid state image pickup device according to
17. A solid state image pickup device according to
18. A solid state image pickup device according to
19. A solid state image pickup device according to
20. A solid state image pickup device according to
a plurality of first charge storage areas for storing electric charges generated by the plurality of first photoelectric conversion elements; and a plurality of second charge storage areas for storing electric charges generated by the plurality of second photoelectric conversion elements, wherein: said first transfer gate is provided between said first charge storage area and said first transfer means and transfers electric charges stored in said first charge storage area to said first transfer means; said first drain gate is provided between the first photoelectric conversion element and said first drain and transfers electric charges generated by the first photoelectric conversion element to said first drain; said second transfer gate is provided between said second charge storage area and said second transfer means and transfers electric charges stored in said second charge storage area to said second transfer means; and said second drain gate is provided between the second photoelectric conversion element and said second drain and transfers electric charges generated by the second photoelectric conversion element to said second drain. 21. A solid state image pickup device according to
22. A solid state image pickup device according to
23. A solid state image pickup device according to
24. A solid state image pickup device according to
25. A solid state image pickup device according to
26. A solid state image pickup device according to
27. A solid state image pickup device according to
28. A solid state image pickup device according to
said first and second charge storage areas each have a lamination structure of a first conductive layer, an insulating film, and a charge storage semiconductor region; said first and second drain gates each have a lamination structure of a second conductive layer, an insulating film, and a semiconductor region; the second conductive layer forming the first drain gate is formed on the insulating film formed on the first conductive layer forming the second charge storage area; and the second conductive layer forming the second drain gate is formed on the insulating film formed on the first conductive layer forming the first charge storage area.
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This application is based on Japanese patent application No. 10-135412 filed on May 18, 1998, the entire contents of which are incorporated herein by reference.
a) Field of the Invention
The present invention relates to a solid state image pickup device for converting an optical signal into an electrical signal, and more particularly to a solid state image pickup device capable of being used with an image scanner.
b) Description of the Related Art
A line sensor device having a green channel (G-ch) line sensor and a red/blue channel (R/B-ch) line sensor is known, which can pick up color image information as electrical signals. The G-ch line sensor of this line sensor device is used for picking up mainly a luminance signal, whereas the R/B-ch line sensor is used for picking up mainly color signals. Since a resolution of the color signal lower than that of the luminance signal does not pose any serious problem, the numbers of red (R) pixels and blue (B) pixels of the R/G-ch line sensor are each set to have a half of the number of green (G) pixels of the G-channel line sensor. R and B pixels are alternately disposed in line in the R/B-ch line sensor, whereas only G pixels are consecutively disposed in line.
Red and blue color filters are alternately disposed on the pixels (light reception sensors) of the R/G-ch line sensor, whereas green color filters are consecutively disposed on the pixels of the G-ch line sensor. Both the R/B-ch and G-ch line sensors have the same structure excepting color filters.
Since the R/B-ch line sensor generates electric charges of both R and B pixels, it is necessary to set the same charge storage time or integration time to the R and B pixels.
If the color of a subject is deviated to the red side or blue side, this same integration time is not suitable for both the red and blue colors. Therefore, outputs of pixels on one channel (R-ch or B-ch) have always a lower S/N ratio than the other channel.
It is an object of the present invention to provide a solid image pickup device capable of independently controlling an integration time of each of green, red and blue pixels of a color line sensor device having G-ch and R/B-ch line sensors and realizing a high S/N ratio of each color output.
According to one aspect of the present invention, there is provided a solid state image pickup device comprising: a photoelectric conversion element line having a plurality of first and second conversion elements disposed alternately, the first and second photoelectric conversion elements converting light having different colors into electric charges;first transfer means for transferring electric charges generated by the plurality of first photoelectric conversion elements to an external circuit; a first transfer gate for transferring the electric charges generated by the plurality of first photoelectric conversion elements to the first transfer means; a first drain for draining unnecessary electric charges generated by the plurality of first photoelectric conversion elements; a first drain gate for transferring the unnecessary electric charges generated by the plurality of first photoelectric conversion elements to the first drain; second transfer means for transferring electric charges generated by the plurality of second photoelectric conversion elements to an external circuit; a second transfer gate for transferring the electric charges generated by the plurality of second photoelectric conversion elements to the second transfer means; a second drain for draining unnecessary electric charges generated by the plurality of second photoelectric conversion elements; a second drain gate for transferring the unnecessary electric charges generated by the plurality of second photoelectric conversion elements to the second drain; and a controller for independently controlling a charge transfer by the first and second transfer gates or by the first and second drain gates.
According to another aspect of the present invention, there is provided a solid state image pickup device comprising: a photoelectric conversion element line having a plurality of first and second photoelectric conversion elements disposed alternately, the first and second photoelectric conversion elements being sensitive to light of different colors; a line of first charge storage areas disposed adjacent to each of the plurality of first photoelectric conversion elements for storing electric charges photoelectrically converted by the first photoelectric conversion elements; first charge reading means disposed adjacent to the first charge storage area line for reading electric charges stored in the first charge storage area; first transfer means disposed adjacent to the first charge reading means for sequentially transferring the read electric charges to an external circuit; a line of second charge storage areas disposed adjacent to each of the plurality of second photoelectric conversion elements at positions different from the first charge storage area line for storing electric charges photoelectrically converted by the second photoelectric conversion elements; second charge reading means disposed adjacent to the second charge storage area line for reading electric charges stored in the second charge storage area; second transfer means disposed adjacent to the second charge reading means for sequentially transferring the read electric charges to an external circuit; first charge draining means disposed adjacent to each charge storage area of the first charge storage area line for draining electric charges in the first charge storage area; and second charge draining means disposed adjacent to each charge storage area of the second charge storage area line for draining electric charges in the second charge storage area.
The photoelectric conversion element line with first and second photoelectric conversion elements for generating color signals is provided with the first and second charge draining means for draining electric charges stored in the photoelectric conversion elements, independently for the first and second photoelectric conversion elements. Accordingly, the charge storage time or integration time can be controlled independently for the first and second photoelectric conversion elements.
It is possible to independently set an optimum integration time of each color and generate a color signal with an improved S/N ratio.
In the R/B-ch CCD 302 shown in
Charge storage units 20 and 30 are disposed adjacent to upper and lower sides of the photodiode unit 10 shown in FIG. 1. The upper charge storage unit 20 accumulates charges of R pixels, and the lower charge storage unit 30 accumulates charges of B pixels. A transfer register unit 40 is disposed on the upper side of the upper transfer register unit 20, and a transfer register unit 50 is disposed on the lower side of the lower transfer register unit 30. The upper transfer register unit 40 transfers charges of R pixels to an output stage 60, and the lower transfer register unit 50 transfers charges of B pixels to an output state 70. The output stage 60 amplifies an image signal corresponding to the charge amounts of R pixels and outputs it, and the output stage 70 amplifies an image signal corresponding to the charge amounts of B pixels and outputs it. The above-described operations are controlled by a controller 401.
The charge storage units 20 and 30 are disposed in a position relation substantially symmetrical to a center line axis of the photodiode unit 10. The transfer register units 40 and 50 are also disposed in a position relation substantially symmetrical to the center line axis of the photodiode unit 10.
The term "position relation substantially symmetrical" is intended to include a shift in the horizontal direction by an amount corresponding to one photodiode of the photodiode unit 10. More specifically, the position relation substantially symmetrical includes the case wherein the charge storage units 20 and 30 are shifted in the horizontal direction by an amount corresponding to one charge storage area and the case wherein the transfer register units 40 and 50 are shifted in the horizontal direction by an amount corresponding to one transfer register area.
In the G-ch CCD 303 shown in
Charge storage units 90 and 100 are disposed adjacent to upper and lower sides of the photodiode unit 80. The upper charge storage unit 90 accumulates charges of G pixels at even columns for example, and the lower charge storage unit 100 accumulates charges of G pixels at odd columns. A transfer register unit 110 is disposed on the upper side of the upper transfer register unit 90, and a transfer register unit 120 is disposed on the lower side of the lower transfer register unit 100. The upper transfer register unit 110 transfers charges of G pixels at the even columns, and the lower transfer register unit 120 transfers charges of G pixels at the odd columns. The charges transferred from the upper and lower transfer register units 110 and 120 are supplied to an output state 130. The output stage 130 amplifies an image signal corresponding to G pixels at even and odd columns and outputs it. The above-described operations are controlled by a controller 402.
As shown in
Charges generated by the photodiodes PD_R and PD_B flow into storage areas ST_R and ST_B of the charge storage units 20 and 30 when upper and lower gates BG are opened. Namely the charges of an R pixel are stored in the storage area ST_R, and the charges of a B pixel are stored in the storage area ST_B.
The storage area ST_R of the charge storage unit 20 and the storage area ST_B of the charge storage unit 30 are provided with respective clear gates CLG_R and CLG_B for drain control of unnecessary charges. When the clear gate CLG_R is opened, charges in the storage area ST_R are drained to a drain CLD. When the clear gate CLG_B is opened, charges in the storage area ST_B are drained to the drain CLD.
Each of the storage areas ST_R and ST_B is provided with a gate TG for transferring the accumulated signal charges to the charge transfer register units 40 and 50. The R transfer register unit 40 is provided with electrodes φ1 and φ2 alternately disposed for transferring R signal charges, and the B transfer register unit 50 is provided with electrodes φ1 and φ2 alternately disposed for transferring B signal charges. As two-phase drive voltages are alternately applied to the electrodes φ1 and φ2, the transfer register units 40 and 50 transfer signal charges.
In addition to the p-type region 201, the silicon substrate has a p-type region 202, an n-type region 203, an n-type region 204, an n-type region 205 and a p-type region 206. On a first insulating film (e.g., SiO2 film) formed on the surface of the silicon substrate, first polysilicon patterns 208 and 210 are formed. A second insulating film is formed covering the first and second polysilicon patterns 208 and 210, and on this second insulating film, second polysilicon patterns 207 and 209 are formed.
The photodiode PD has the n-type region 203 in the surface layer of the silicon substrate, the n-type region 204 under the region 203, the p-type region 201 under the region 204. When light is applied to the substrate surface, charges are generated. The p-type region 202 prevents charges from being drained from the photodiode PD.
The gate BG has the second polysilicon pattern (conductive layer) 207 formed on the insulating films (e.g., SiO2 film) above the p-type region 201. As a positive potential is applied to the second polysilicon pattern 207, the potential under the gate BG lowers more than that of the photodiode PD so that charges generated in the photodiode PD flow into the storage area ST.
The storage area ST has the first polysilicon pattern (conductive layer) 208 formed on the insulating film above the p-type region 201. As a positive potential is applied to the first polysilicon pattern 208, the storage area is formed in the surface layer of the p-type region 201. As the clear gate CLG (
The gate TG has the second polysilicon pattern (conductive layer) 209 formed on the insulating films above the p-type region 201. As a positive potential is applied to the second polysilicon pattern 209, the gate TG is opened so that charges stored in the storage area ST are transferred to the n-type region 205 under the transfer electrode φ1. The n-type region 205 corresponds to the transfer register units 40 and 50 shown in FIG. 3.
The transfer electrodes φ1 and φ2 (
In the state that the clear gate CLG (
As shown in
Next, as the clear gate CLG (
After a predetermined time lapse, while a high level voltage is applied to the electrode φ1 as shown in
As a low level voltage is applied to the transfer gate TG as shown in
In the above operation, the integration time (charge storage time) corresponds to a period from the timing t1 or t2 when the clear gate CLG voltage is turned to the low level to the timing t3 when the transfer gate TG voltage is turned to the low level, i.e., the period indicated by a two-head arrow shown in
As shown in
In the G-ch CCD shown in
As appreciated from the foregoing description of the embodiment, the R/B-ch CCD with alternately disposed R and B pixels is structured to have the two-line distribution form separating the CCD into R and B channels. The clear gates CLG_R and CLG_B capable of independently controlling charge drains of color pixels are provided between the photodiodes PD and transfer register units 40 and 50. It is therefore possible to independently control the integration times of both channels of R and B pixels.
Next, a solid state image pickup device 301 according to a second embodiment of the invention will be described with reference to
Similar to the first embodiment, the R/B-ch CCD of the second embodiment is structured to have the two-line distribution form, as shown in FIG. 6. Signal charges generated by photodiodes PD_R for R pixels are transferred to an upper transfer register unit 45, and signal charges generated by photodiodes PR_B for B pixels are transferred to a lower transfer register unit 55. In the following description, since the operations of the channels of both R and B pixels are fundamentally the same, the suffixes R and B are omitted.
Referring to
The clear gate CLG made of the second polysilicon pattern is formed adjacent to a photodiode unit 15. The drain CLD for charge drain is formed adjacent to the clear gate CLG. As shown in
The storage electrode ST made of the first polysilicon pattern is formed adjacent to the photodiode unit 15. The transfer electrode TG serving as a transfer gate is formed adjacent to the storage electrode ST. As shown in
Therefore, as shown in the cross sectional view of FIG. 8A and the potential diagram of
As shown in
The photodiodes PD_B of B pixels drain unnecessary charges to the upper clear drains CLD_B via the gates CLG_B, and accumulate necessary drains in the lower storage areas ST_B.
The second polysilicon pattern of the clear drain CLD_B extends on the insulating film above the first polysilicon pattern of the storage electrode ST_R. The second polysilicon pattern of the clear drain CLD_R extends on the insulating film above the first polysilicon pattern of the storage electrode ST_B.
The operation of the embodiment will be described with reference to the waveforms shown in FIG. 7 and the cross sectional view and potential diagrams shown in
In the state that a high level voltage (5 V in
Next, as a low level voltage (0 V in
The state shown in
Next, at a timing t12 shown in
Next, at a timing t13 shown in
The integration start timing is the timing t11, and the integration end timing is the timing t13. The integration time is t13-t11=TT1+TT2. By independently controlling the gates CLG_R of R pixels and gates CLG_B of B pixels, it becomes possible to independently control the integration times of R and B pixels.
The integration times of R and B pixels may be controlled independently by independently controlling the storage electrodes ST_R and ST_B of R and B pixels and the gates TG.
The same integration time is used for all G pixels of the G-ch CCD, and the structure and operation of the G-ch CCD are similar to those of the R/B-ch CCD.
In the second embodiment described above, both the G-ch CCD and R/B-ch CCD are structured to have the two-line distribution form, and the R and B pixel channels of the R/B-ch CCD are separated into two transfer register units (CCD). It is therefore possible to independently control the integration times of G, R and B pixels.
The present invention has been described in connection with the preferred embodiments. The invention is not limited only to the above embodiments. It is apparent that various modifications, improvements, combinations, and the like can be made by those skilled in the art.
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