The present invention is directed to a locking apparatus and loadboard assembly of a semiconductor testing device apparatus. The loadboard assembly includes a printed circuit board containing a device under test and an interface board secured to the bottom of the printed circuit board. The interface board has two members with a space between them. Spacers connect the members to form apertures for contact pins on a test head. The loadboard assembly is placed on top of a locking apparatus which is mounted on the top surface of the test head. The placement of the loadboard on the locking apparatus is done according to two pins of different cross-sections that extend through two holes in the interface board and printed circuit board of the loadboard assembly. When the loadboard assembly is placed on the locking mechanism, rollers mounted on the interface board are received in cam slots of a cam member of the locking apparatus. These rollers follow the cam slots as the cam member is moved. Based on the profile of the cam slots, the loadboard assembly can be gradually lowered to achieve contact between the printed circuit board and the contact pins on the test head and to lock the interface board.
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1. A system for testing a semiconductor device by establishing electrical contact between said device and a plurality of pins on a test head, said system comprising:
a circuit board for mounting said device thereon; a mounting plate connected to said circuit board, said mounting plate comprising an outer member having a plurality of cam followers, an inner member and a plurality of radial members, the outer member surrounding the inner member, said radial members extending inwardly from said outer member to retain the inner member in a centered position relative to said outer member wherein the outer member, the inner member and the radial members define a plurality of apertures, said plurality of pins extending through the plurality of apertures; a cam member adapted to be secured to said test head, said cam member having a plurality of inclined cam slots, each cam slot having a top opening opposite the test head to receive a cam follower of said mounting plate and extending downward from the top opening toward the test head along an inner peripheral surface and terminating at a lower closed end, said cam member further having a plurality of rollers for movably supporting said cam member on the test head; and a plurality of rails adapted to be mounted on the test head and engaged with the rollers, each rail adapted to secure and guide a roller, wherein movement of said cam member in a horizontal plane relative to the test head engages the cam followers of the mounting plate to follow the cam slots such that said mounting plate and said circuit board move in a vertical direction relative to said test head such that said pins extending through said plurality of apertures contact said circuit board to establish said electrical contact.
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1. Field of the Invention
The present invention relates to a locking apparatus and loadboard assembly for use in a semiconductor device testing apparatus and, more particularly, to a locking apparatus and loadboard assembly that provide unrestricted access to the loadboard, place no limitations on the size of the loadboard, ensure the correct alignment of the loadboard and provide even pressure on spring-loaded contact pins for proper testing.
2. Description of the Related Art
Semiconductor device testing apparatuses test various types of semiconductor devices including integrated circuits. Integrated circuits are tested to ensure that they will function properly in the consumer domain. Because integrated circuits must be individually tested, it is desirable that a semiconductor device testing apparatus accurately test integrated circuits at a low manufacturing test cost.
During the fabrication process, integrated circuits are tested in wafer form and in packaged form. In wafer form, a probe card is used to establish a temporary electrical contact between the integrated circuit to be tested (known as the device-under-test or DUT) and the semiconductor device testing apparatus (known as automatic test equipment or ATE). After completion of testing in wafer form, the integrated circuit is packaged and tested. Testing in packaged form includes a performance board or loadboard as the interface between the DUT and the ATE. The loadboard is a multi-layer printed circuit board that is mounted directly on the ATE. The DUT is inserted into a socket on the loadboard to establish electrical contact for testing.
The pogo pins 5 are spring-loaded and press against the loadboard 7 to establish electrical contact for testing. The loadboard 7 is positioned for such contact by being directly placed on the top surface 6 of the test head 2, known as the test head chassis or Hifix. The loadboard 7 is in turn a mount for socket 8. The DUT 9 in packaged form is inserted into socket 8 to establish electrical contact for testing. Thus, the test signals are transmitted from the tester 1 to the DUT 9 through the pin cards 4, contact pins 5, loadboard 7 and socket 8. The resulting signals from the DUT 9 are received by the tester 1 for evaluation through the same elements.
During testing, it is necessary to tightly secure the loadboard 7 to prevent any movement of the ATE from affecting the electrical contacts. This is typically achieved by a locking mechanism. The conventional locking mechanisms include a fixed slot with clamping to secure the loadboard and electrically or pneumatically controlled mechanisms to hold the loadboard in its position.
Loadboard size and access are important criterion for integrated circuit testing in a mass manufacturing environment. A large size loadboard allows for testing of multiple DUTs in parallel, thereby providing significant savings in manufacturing test cost. Unrestricted access provides further significant savings by reducing access time and maintenance and repair time. In view of the importance of size and access to lowering manufacturing test cost, the limitations on size and the restrictions on access placed by conventional locking mechanisms on loadboards such as in
Aside from the loadboard size and access, loadboard orientation is another factor affecting manufacturing test cost. When a loadboard is placed on the top surface of the test head, it must be oriented correctly for proper testing. Determining the correct orientation without orientation aids can be time consuming, and an improperly oriented loadboard on the top surface can be costly to correct. The loadboard 11 in
Another factor affecting manufacturing test cost is the quality of the contact between the contact pins and the loadboard. The contact pins are spring-loaded and press against the loadboard to establish electrical contact for testing. If the loadboard does not provide even pressure on the contact pins, some contact pins may not properly press the loadboard for testing. Conventional ATEs use electric or pneumatic controlled levers to hold the loadboard in its position. However, these mechanisms are expensive and costly to maintain and repair.
It is an object of the present invention to provide a locking apparatus and loadboard assembly that overcome the above limitations of conventional locking mechanisms. The locking apparatus and loadboard assembly of the present invention provide unrestricted access to the loadboard, do not limit the size of the loadboard, ensure correct orientation of the loadboard and provide even pressure between the loadboard and the contact pins for proper testing. Furthermore, the locking apparatus and loadboard assembly can be manufactured independently at low cost.
In one embodiment of the present invention, the loadboard assembly includes a printed circuit board containing a device under test and an interface board secured to the bottom of the printed circuit board. This arrangement provides stiffness to the printed circuit board. It also allows for the entire top surface of the printed circuit board to be exposed, thereby eliminating any restrictions on size and access for the printed circuit board.
The loadboard assembly is then placed on top of a locking apparatus which is mounted on the top surface of a test head. The placement of the loadboard on the locking apparatus is done by aligning two pins of different cross-sections to extend through two holes in the interface board and printed circuit board of the loadboard assembly. This ensures that the loadboard assembly has the correct orientation for testing. Furthermore, by placing the loadboard assembly on top of the locking apparatus, access to the loadboard remains unrestricted and loadboard size remains unlimited.
When the loadboard assembly is placed on the locking mechanism, rollers mounted on the interface board are received in cam slots of a cam member of the locking apparatus. These rollers follow the grooves of the cam slots as the cam member is moved. Based on the shape of the cam slots, the loadboard assembly can be gradually lowered to achieve contact between the printed circuit board and the contact pins on the test head and to lock the interface board. In this manner, even pressure is applied to the contact pins to ensure proper testing.
These and other features and advantages of embodiments of the present invention will be apparent to those skilled in the art from the following detailed description of the embodiments of the invention, when read with the drawings and the appended claims.
In the following description of preferred embodiments, reference is made to accompanying drawings which form a part hereof and in which is shown by way of illustration specific embodiments in which the invention may be practiced. It is to be understood that other embodiments may be utilized and structural changes may be made without departing from the scope of the preferred embodiments of the present invention.
The interface board 20 of the loadboard assembly is a metallic plate of aluminum alloy designed to provide stiffness to the printed board 60. It has two concentric annular members 21 and 22. The members 21 and 22 have different diameters such that the outer member 21 surrounds the inner member 22 with an annular-shaped space 24 between them. The interface board 20 further includes spacers 23 that span the annular-shaped space 24 to connect the outer member 21 and the inner member 22 at multiple points. The spacers divide the annular-shaped space 24 into a number of separate spaces.
The outer member 21, the inner member 22 and the spacers 23 all have holes 33 which correspond to holes 63 on the printed circuit board. These holes are used to secure the interface board 20 to the back surface of the printed circuit board 60. The interface board 20 and the printed circuit board 60 can be secured or joined together by screws, studs or other similar connection means. Because the outer member 21, the inner member 22 and the spacers 23 are all used in securing the interface board 20 to the printed circuit board 60, the entire printed circuit board 60 is supported thereby providing enhanced stiffness to the printed circuit board 60. By having the interface board 20 secured to bottom surface of the printed circuit board 60, the entire top surface of the printed circuit board 60 is exposed. This allows for complete access to the printed circuit board 60 and removing any restrictions on its size.
To assist in properly securing the interface board 20 and the printed circuit board 60, the outer member 21 of the interface board 20 also includes two mechanical studs or pins 29 and 30 of different radii. Corresponding holes 64 and 65 in the printed circuit board 60 receive the two mechanical studs 29 and 30 when the interface board 20 and the printed circuit board 60 are secured together to form the loadboard assembly. Because the mechanical studs 29 and 30 have different radii, the interface board 20 and the printed circuit board 60 will only be joined if the studs 29 and 30 are correctly oriented to be received by their respective holes 64 and 65. Studs of the same radius may also provide orientation assistance by being asymmetrically placed on the outer member 21.
The outer member 21 of the interface board further includes two holes 31 and 32 with different diameters. Holes 31 and 32 have a common axis (as shown by the center lines in
The outer member 21 of the interface board 20 also includes four mounts 27 with interface board rollers 26. The mounts 27 are attached to the outer member 21 by screws 28 such that the interface board rollers 26 extend beyond the outer diameter of the outer member 21. As will be further explained with respect to
Although
The cam member 40 is rotatable along the top surface 55 of the test head by four cam member rollers 42 resting on the top surface 55 of the test head. The cam member rollers 42 are secured to the inner peripheral surface of the cam member 40 and are guided by rails 43 during rotation. The rails 43 are secured separately from the cam member 40 to the top surface 55 of the test head by screws 45. Because the secured rails 43 abut the inner peripheral surface of the cam member 40, the rails also have an arcuate profile. As a result, when handle 47 is used to move the cam member 40, the cam member 40 is rotated in an arc-shaped movement between the two ends of the rails 43. At each end of the rails 43, there is a ball-point rivet 46 to act as detents to prevent inadvertent sliding of the roller 42 from the end position. Such rivets 46 may also be used in cam slots 41 to prevent the inadvertent sliding of the interface board rollers 26 in the slots. Rail rollers 44 secured to the rails 43 assist the cam member 40 to rotate smoothly.
Although the present invention has been described with four cam slots 41, four cam member rollers 42 and four rails 43, any number of slots, cam member rollers and rails may be utilized. It should also be noted that the cam member 40 may be moved by an automatic electric or pneumatic motor as opposed to manual movement through handle 47.
Correct orientation of the loadboard assembly is ensured through the use of holes 31/61 and 32 (not shown)/62 and mechanical stud 50 and radio pin 51. When the interface board 20 is connected to the printed circuit board 60, holes 31/62 and 32/62 are in alignment. Each pair of holes has a diameter designed to only receive a pin of given cross-section. If the loadboard assembly is not orientated such that holes 31/61 receive the radio pin 51 and holes 32/62 receive the mechanical stud 50, the interface board 20 of the assembly will not be inserted into the cam member 40.
If the orientation of the loadboard assembly is correct, the interface board rollers 26 of the interface board 20 are received in the openings 41a of the cam slots 41 as shown by the dashed lines in FIG. 6. The interface board 20 through its rollers 26 supports the printed circuit board 60 with the socket 67 and the integrated circuit 68 on the cam member 40. Additional support is provided by the mounts 27 of the interface board rollers 26 which can rest on top of the rails 43. The interface board 20 supports the printed circuit board 60 in a manner that allows the spring loaded contact pins 54 to extend through the annular-shaped space 24 of the interface board 20 and come into contact with the connection lines 66 of the printed circuit board 60 when the printed circuit board 60 is lowered. Although
As
After testing is completed, the printed circuit board 60 and the interface board 20 may be gradually raised by moving the handle 47 in a counterclockwise direction. The cam member rollers 42 move from the locked end of rails 43 to the unlocked end. As they do, the cam member 40 rotates forcing interface board rollers 26 to follow the grooves 41b toward the openings 41a. The slanted profile of grooves 41b gradually raises the interface board 20 and the printed circuit board 60 in a vertical direction relative to the test head and away from the contact pins 54. When the interface board rollers 26 reach the openings 41a of the cam slot 41, the interface board 20 and the printed circuit board 60 can be removed from the locking apparatus.
It should be noted that the profile of the cam slot 41 can be varied to obtain different ranges and/or directions of motion for the interface board 20.
Although the present invention has been described with a annular-shaped cam member 40 and an annular-shaped interface board 20, other arrangements may be utilized. One such arrangement is a rectangular-shaped cam member and interface board. The following discussion of the rectangular-shaped cam member and interface board will focus on certain structural differences between these members and their corresponding members in an annular arrangement. The discussion will not address alignment pins, the connection between the printed circuit board and the interface board and other similar matters that can be used in any arrangement.
In the rectangular arrangement, the interface board comprises two concentric squares or rectangles connected at multiple points through spacers in the same manner as shown in
The rectangular-shaped cam member or lock-arm is shaped like the interface board. It is slightly larger than the interface board such that the interface board can be received within it. The rectangular-shaped cam member has two cam slots on each side to receive the interface board rollers. Each cam slot has an opening and extends downwardly along the inner peripheral surface of the rectangular-shaped cam member to form a groove that terminates at a closed end. Because the shape of cam member is rectangular and because the opening of cam slot is above the end of the groove, the profile of the groove is linear and slanted. It should be noted that other profiles of the groove may be utilized.
The rectangular-shaped cam member also has cam member rollers attached to its sides that reside on the top surface of the test head. The rollers are guided by linear rails or lock-guides. Once a handle or other movement means is used to move the cam member, the cam member rollers guided by the rails move the cam member in a linear direction. The rollers of the interface board follow the linear and slanted profile of the grooves to gradually lower the interface board and the printed circuit board toward the contact pins to establish electrical contact for testing.
Although the present invention has been described with respect to testing integrated circuits in packaged form, the concept of the present invention is equally applicable to testing integrated circuits in wafer form. The concept of the present invention is also applicable to testing semiconductor devices other than integrated circuits.
Although the present invention has been fully described in connection with the preferred embodiments thereof with reference to the accompanying drawings, it is to be noted that various changes and modifications will become apparent to those skilled in the art. Such changes and modifications are to be understood as being included within the scope of the present invention as defined by the appended claims.
Rajsuman, Rochit, Le, Anthony, Markert, Niels, Sauer, Robert, Yamoto, Hiroki
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Sep 23 2002 | SAUER, ROBERT | Advantest Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 013340 | /0037 | |
Sep 23 2002 | RAJSUMAN, ROCHIT | Advantest Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 013340 | /0037 | |
Sep 23 2002 | YAMOTO, HIROKI | Advantest Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 013340 | /0037 | |
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