fluid-based switches are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations defined within a first one of the cavities, a plurality of electrical contacts, each electrical contact deposited within one of the indentations, a switching fluid, held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Patent
   6794591
Priority
Apr 14 2003
Filed
Apr 14 2003
Issued
Sep 21 2004
Expiry
Apr 14 2023
Assg.orig
Entity
Large
2
90
EXPIRED
21. A switch, comprising:
first and second mated substrates defining therebetween at least portions of a number of cavities;
a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid; and
a plurality of seal belts deposited within indentations on one of the substrates at a location within one or more of the cavities holding the switching fluid.
1. A switch comprising:
first and second mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations defined within a first one of the cavities;
a plurality of electrical contacts, each electrical contact deposited within one of the indentations;
a switching fluid, held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid; and
an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.
11. A switch comprising:
first and second mated substrates defining therebetween at least portions of a number of cavites, at least one of the substrates defining a plurality of indentations defined within a first one of the cavities;
a plurality of wettable pads, each wettable pad deposited within one of the indentations;
a switching fluid, wettable to said pads and held within the first cavity, that serves to open and block light paths through the first cavity in response to forces that are applied to the switching fluid; and
an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.
2. The switch of claim 1, further comprising a plurality of seal belts deposited on the second substrate at a location within the first cavity.
3. The switch of claim 2, wherein the second substrate defines a plurality of indentations and the seal belts are deposited within the indentations.
4. The switch of claim 1, wherein the first substrate comprises glass.
5. The switch of claim 1, wherein the first substrate comprises ceramic.
6. The switch of claim 1, wherein the indentations are sandblasted in the first substrate.
7. The switch of claim 1, wherein the indentations are laser cut in the first substrate.
8. The switch of claim 1, wherein the indentations are chemically etched in the first substrate.
9. The switch of claim 1, wherein the first substrate includes a first layer and a second layer, the first layer having the plurality of electrical contacts deposited thereon, and the second layer defining a number of ducts, each duct of the second layer leading from the first cavity to one of the electrical contacts deposited on the first layer, the second layer further defining the plurality of indentations, each indentation defined at an opening of one of the ducts at the surface of the second layer, the indentations having a diameter that is larger than that of the ducts at the surface of the second layer.
10. The switch of claim 9, wherein at least one of the ducts defined by the second layer is defined so that a portion of the switching fluid remains in the duct when the forces are applied to the switching fluid to close pairs of the electrical contacts.
12. The switch of claim 11, further comprising a plurality of seal belts deposited on the second substrate at a location within the first cavity.
13. The switch of claim 11, wherein the second substrate defines a plurality of indentations and the seal belts are deposited within the indentations.
14. The switch of claim 11, wherein the first substrate comprises glass.
15. The switch of claim 11, wherein the first substrate comprises ceramic.
16. The switch of claim 11, wherein the indentations are sandblasted in the first substrate.
17. The switch of claim 11, wherein the indentations are laser cut in the first substrate.
18. The switch of claim 11, wherein the indentations are chemically etched in the first substrate.
19. The switch of claim 11, wherein the first substrate includes a first layer and a second layer, the first layer having the plurality of electrical contacts deposited thereon, and the second layer defining a number of ducts, each duct of the second layer leading from the first cavity to one of the electrical contacts deposited on the first layer, the second layer further defining the plurality of indentations, each indentation defined at an opening of one of the ducts at the surface of the second layer, the indentations having a diameter that is larger than that of the ducts at the surface of the second layer.
20. The switch of claim 19, wherein at least one of the ducts defined by the second layer is defined so that a portion of the switching fluid remains in the duct when the forces are applied to the switching fluid to close pairs of the electrical contacts.
22. The switch of claim 21, wherein the indentations are laser cut in one of the substrates.
23. The switch of claim 21, wherein the indentations are sandblasted in one of the substrates.
24. The switch of claim 21, wherein the indentations are chemically etched in one of the substrates.

Liquid metal micro switches (LIMMS) have been made that use a liquid metal, such as mercury, as the switching fluid. The liquid metal may make and break electrical contacts. To change the state of the switch, a force is applied to the switching fluid, which causes it to change form and move. If the adhesion between the electrical contacts and the substrate is poor, the moving switching fluid can sometimes lift the edges of the contacts and cause them to delaminate from the underlying substrate, damaging the switch.

Fluid-based switches are disclosed. In one embodiment, the switch comprises a first substrate and a second substrate mated together. Defined between the substrates are a number of cavites. Additionally, the first substrate defines a plurality of indentations within a first one of the cavities. A plurality of electrical contacts are each deposited within one of the indentations. Held within the first cavity is a switching fluid that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid. The switch also includes an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

In another embodiment, the switch comprises first and second substrates mated together so that a number of cavities are defined between the substrates. The first substrate additionally defines a plurality of indentations within a first one of the cavities. A plurality of wettable pads are each deposited within one of the indentations. Held within the first cavity is a switching fluid that is wettable to the pads. The switching fluid serves to open and block light paths through the first cavity in response to forces that are applied to the switching fluid. An actuating fluid, held within one or more of the cavities, applies the forces to the switching fluid.

Illustrative embodiments of the invention are illustrated in the drawings in which:

FIG. 1 illustrates an elevation of a first exemplary embodiment of a substrate having indentations that may be used in a fluid-based switch;

FIG. 2 an illustrates a plan view of a second exemplary embodiment of a substrate having indentations that may be used in a fluid-based switch;

FIG. 3 illustrates an elevation of the substrate of FIG. 2;

FIG. 4 illustrates a perspective view of a first exemplary embodiment of a switch that may use a substrate having indentations;

FIG. 5 illustrates a perspective view of a second exemplary embodiment of a switch that may use a substrate having indentations;

FIG. 6. illustrates a plan view of a third exemplary embodiment of a switch having indentations; and

FIG. 7 illustrates an elevation of the switch of FIG. 7.

FIG. 1 illustrates a substrate 100 that may be used in a fluid-based switch such as a LIMMS. By way of example, substrate 100 may be ceramic or glass. Substrate 100 may define a plurality of indentations 102, 104, 106. The indentations may be formed by sandblasting, laser cutting, photo imaging, chemical etching, or another suitable process. A plurality of wettable pads, possibly serving as an electrical contacts, 112-116 are each deposited within one of the indentations 102-106.

The indentations 102-106 recede the wettable pads 112-116 from the surface of the substrate 100. As will be described in further detail below, the substrate may be used in a fluid-based switch that uses a switching fluid to change the state of the switch. Creating indentations on the substrate 100 that recede the wettable pads 112-116 from the surface of the substrate may help prevent the switching fluid from lifting the edge of the wettable pads during a switch state change.

FIGS. 2 and 3 illustrate a second exemplary embodiment of a substrate 200 that may be used in a fluid-based switch. A plurality of electrical contacts 222, 224, 226 are deposited on a first layer 201 of the substrate. A second layer 203 is then mated to the first layer 201. By way of example, the second layer may be formed from (or comprise) glass, and the first layer may be formed from (or comprise) a ceramic material. Other suitable materials are also contemplated.

The second layer defines a plurality of ducts 214, 216, 218 that lead from the electrical contacts 222, 224, 226 to a surface of the second layer 203 opposite the electrodes 222, 224, 226. The ducts comprise a bell shape, with the openings of the ducts at the electrodes being wider than the openings of the ducts at the opposite surface of the second layer. The bell shape may have a variety of profiles and may be formed, for example, by masking the second layer and then sandblasting the bell shape(s) into the second layer. Indentations 204, 206, 208 defined by the second layer may be used to recede the openings of the ducts from the surface of the second layer. The indentations have a diameter larger than that of the ducts at the surface of the second layer.

Liquid electrodes (e.g., mercury electrodes) 234, 236, 238 fill at least a portion of each of the ducts. The walls of the ducts may be lined with a wettable material to help the liquid electrodes 234, 236, 238 wet to the ducts. The indentations may also be lined with a wettable material so that a switching fluid used in a fluid-based switch may wet to the indentations. The shape of the ducts 214, 216, 218 may cause the liquid electrodes 234, 236, 238 deposited within each of the ducts to remain within their respective ducts as a switching fluid makes and breaks connections between the electrical contacts 222, 224, 226. The indentations 204, 206, 208 provide a greater contact area for the liquid electrodes 234, 236, 238, and the recessed edges of the indentations may help prevent the wettable linings from lifting their edges and moving out of the indentations.

FIG. 4 illustrates a first exemplary embodiment of a switch including substrate 100. The switch 400 comprises a first substrate 100 and a second substrate 402 mated together. The substrates 100 and 402 define between them a number of cavities 404, 406, and 408. Exposed within one or more of the cavities are a plurality of electrical contacts 112, 114, 116. Each electrical contact 112-116 is deposited within one of the indentations of substrate 100. A switching fluid 418 (e.g., a conductive liquid metal such as mercury) held within one or more of the cavities serves to open and close at least a pair of the plurality of electrical contacts 112-116 in response to forces that are applied to the switching fluid 418. An actuating fluid 410 (e.g., an inert gas or liquid) held within one or more of the cavities serves to apply the forces to the switching fluid 418.

In one embodiment of the switch 400, the forces applied to the switching fluid 418 result from pressure changes in the actuating fluid 410. The pressure changes in the actuating fluid 410 impart pressure changes to the switching fluid 418, and thereby cause the switching fluid 418 to change form, move, part, etc. In FIG. 4, the pressure of the actuating fluid 410 held in cavity 404 applies a force to part the switching fluid 418 as illustrated. In this state, the rightmost pair of electrical contacts 114, 116 of the switch 400 are coupled to one another. If the pressure of the actuating fluid 410 held in cavity 406 is relieved, and the pressure of the actuating fluid 410 held in cavity 408 is increased, the switching fluid 418 can be forced to part and merge so that electrical contacts 114 and 116 are decoupled and electrical contacts 112 and 114 are coupled.

The indentations 102-106 recede the electrical contacts 112-116 from the surface of the substrate 100. This may help prevent the switching fluid from lifting the edge of the electrical contacts during a switch state change.

By way of example, pressure changes in the actuating fluid 410 may be achieved by means of heating the actuating fluid 410, or by means of piezoelectric pumping. The former is described in U.S. Pat. No. 6,323,444 of Kondoh et al. entitled "Electrical Contact Breaker Switch, Integrated Electrical Contact Breaker Switch, and Electrical Contact Switching Method", which is hereby incorporated by reference for all that it discloses. The latter is described in U.S. patent application Ser. No. 10/137,691 of Marvin Glenn Wong filed May 2, 2002 and entitled "A Piezoelectrically Actuated Liquid Metal Switch", which is also incorporated by reference for all that it discloses. Although the above referenced patent and patent application disclose the movement of a switching fluid by means of dual push/pull actuating fluid cavities, a single push/pull actuating fluid cavity might suffice if significant enough push/pull pressure changes could be imparted to a switching fluid from such a cavity. Additional details concerning the construction and operation of a switch such as that which is illustrated in FIG. 4 may be found in the afore-mentioned patent of Kondoh.

A second exemplary embodiment of a switch will now be described with reference to FIG. 5. The switch 500 comprises a first substrate 100 and a second substrate 502 mated together. The substrates 100 and 502 define between them a number of cavities 506, 508, 510. Exposed within one or more of the cavities are a plurality of wettable pads 112-116. A switching fluid 518 (e.g., a liquid metal such as mercury) is wettable to the pads 112-116 and is held within one or more of the cavities. The switching fluid 518 serves to open and block light paths 522/524, 526/528 through one or more of the cavities, in response to forces that are applied to the switching fluid 518. By way of example, the light paths may be defined by waveguides 522-528 that are aligned with translucent windows in the cavity 508 holding the switching fluid. Blocking of the light paths 522/524, 526/528 may be achieved by virtue of the switching fluid 518 being opaque. Indentations 102-106 recede the wettable pads 112-116 from the surface of the substrate 100 which may help prevent the switching fluid from lifting the edge of the pad during a switch state change. An actuating fluid 520 (e.g., an inert gas or liquid) held within one or more of the cavities serves to apply the forces to the switching fluid 518.

Additional details concerning the construction and operation of a switch such as that which is illustrated in FIG. 5 may be found in the aforementioned patent of Kondoh et al., and patent application of Marvin Wong.

FIGS. 6 and 7 illustrate a third exemplary embodiment of a fluid-based switch. The switch 600 includes a switching fluid cavity 604, a pair of actuating fluid cavities 602, 606, and a pair of cavities 608, 610 that connect corresponding ones of the actuating fluid cavites 602, 606 to the switching fluid cavity 604. It is envisioned that more or fewer cavites may be formed in the substrate, depending on the configuration of the switch. For example, the pair of actuating fluid cavities 602, 606 and pair of connecting cavities 608, 610 may be replaced by a single actuating fluid cavity and single connecting cavity.

Portions on one of the substrates 602, 604 may be metallized for the purpose of creating "seal belts" 612, 614, 616. The creation of seal belts 612-616 within a cavity holding switching fluid 618 provides additional surface areas to which the switching fluid 618 may wet. This not only helps in latching the various states that a switching fluid can assume, but also helps to create a sealed chamber from which the switching fluid cannot escape, and within which the switching fluid may be more easily pumped (i.e., during switch state changes).

The seal belts 612-616 may be each deposited in an indentation on one of the substrates 602, 604. The indentations recede the seal-belts from the surface of the substrate. This may help prevent the switching fluid 618 from lifting the edge of the seal belts during a change of state of the switch.

The switch additionally includes wettable pads (possibly serving as electrical contacts) 606, 608, 610. The wettable pads are also deposited in indentations on one of the substrates 602. It should be appreciated that in alternate embodiments, the wettable pads may be deposited on a flat surface of the substrate 602 and the substrate may not include the indentations for the wettable pads.

While illustrative and presently preferred embodiments of the invention have been described in detail herein, it is to be understood that the inventive concepts may be otherwise variously embodied and employed. The appended claims are intended to be construed to include such variations, except as limited by the prior art.

Wong, Marvin Glenn

Patent Priority Assignee Title
7449649, May 23 2006 WSOU Investments, LLC Liquid switch
7554046, May 23 2006 WSOU Investments, LLC Liquid switch
Patent Priority Assignee Title
2312672,
2564081,
3430020,
3529268,
3600537,
3639165,
3657647,
3955059, Aug 30 1974 Electrostatic switch
4103135, Jul 01 1976 International Business Machines Corporation Gas operated switches
4158118, Aug 30 1974 Electrostatic switch
4200779, Sep 06 1977 Moscovsky Inzhenerno-Fizichesky Institut Device for switching electrical circuits
4238748, May 27 1977 COMPAGNIE DE CONSTRUCTIONS ELECTRIQUES ET ELECTRONIQUES CCEE Magnetically controlled switch with wetted contact
4245886, Sep 10 1979 International Business Machines Corporation Fiber optics light switch
4336570, May 09 1980 FLOWIL INTERNATIONAL HOLDING B V Radiation switch for photoflash unit
4419650, Aug 23 1979 Georgina Chrystall, Hirtle Liquid contact relay incorporating gas-containing finely reticular solid motor element for moving conductive liquid
4434337, Jun 26 1980 W. G/u/ nther GmbH Mercury electrode switch
4475033, Mar 08 1982 Nortel Networks Limited Positioning device for optical system element
4505539, Sep 30 1981 Siemens Aktiengesellschaft Optical device or switch for controlling radiation conducted in an optical waveguide
4582391, Mar 30 1982 AMPHENOL CORPORATION, A CORP OF DE Optical switch, and a matrix of such switches
4628161, May 15 1985 Distorted-pool mercury switch
4652710, Apr 09 1986 The United States of America as represented by the United States Mercury switch with non-wettable electrodes
4657339, Feb 26 1982 U.S. Philips Corporation Fiber optic switch
4742263, Aug 15 1987 PACIFIC BELL, 140 NEW MONTGOMERY STREET, SAN FRANCISCO, CA 94105, A CA CORP Piezoelectric switch
4786130, May 29 1985 GENERAL ELECTRIC COMPANY, P L C , THE, A BRITISH COMPANY Fibre optic coupler
4797519, Apr 17 1987 Mercury tilt switch and method of manufacture
4804932, Aug 22 1986 NEC Corporation Mercury wetted contact switch
4988157, Mar 08 1990 TTI Inventions A LLC Optical switch using bubbles
5278012, Mar 29 1989 Hitachi, Ltd. Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
5415026, Feb 27 1992 Vibration warning device including mercury wetted reed gauge switches
5502781, Jan 25 1995 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress
5644676, Jun 23 1994 Instrumentarium Oy; Vaisala Oy Thermal radiant source with filament encapsulated in protective film
5675310, Dec 05 1994 General Electric Company Thin film resistors on organic surfaces
5677823, May 06 1993 Cavendish Kinetics Ltd. Bi-stable memory element
5751074, Sep 08 1995 Edward B. Prior & Associates Non-metallic liquid tilt switch and circuitry
5751552, May 30 1995 Freescale Semiconductor, Inc Semiconductor device balancing thermal expansion coefficient mismatch
5828799, Oct 31 1995 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD ; AVAGO TECHNOLOGIES GENERAL IP PTE LTD Thermal optical switches for light
5841686, Nov 22 1996 Super Talent Electronics, Inc Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate
5849623, Dec 05 1994 General Electric Company Method of forming thin film resistors on organic surfaces
5874770, Oct 10 1996 General Electric Company Flexible interconnect film including resistor and capacitor layers
5875531, Mar 27 1995 U S PHILIPS CORPORATION Method of manufacturing an electronic multilayer component
5886407, Apr 14 1993 Frank J., Polese; POLESE, FRANK J Heat-dissipating package for microcircuit devices
5889325, Apr 24 1998 NEC Corporation Semiconductor device and method of manufacturing the same
5912606, Aug 18 1998 Northrop Grumman Corporation Mercury wetted switch
5915050, Feb 18 1994 Gooch & Housego PLC Optical device
5972737, Apr 14 1993 Frank J., Polese Heat-dissipating package for microcircuit devices and process for manufacture
5994750, Nov 07 1994 Canon Kabushiki Kaisha Microstructure and method of forming the same
6021048, Feb 17 1998 High speed memory module
6180873, Oct 02 1997 Polaron Engineering Limited Current conducting devices employing mesoscopically conductive liquids
6201682, Dec 19 1997 U.S. Philips Corporation Thin-film component
6207234, Jun 24 1998 Vishay Vitramon Incorporated Via formation for multilayer inductive devices and other devices
6212308, Aug 03 1998 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD ; AVAGO TECHNOLOGIES GENERAL IP PTE LTD Thermal optical switches for light
6225133, Sep 01 1993 NEC Corporation Method of manufacturing thin film capacitor
6278541, Jan 10 1997 Lasor Limited System for modulating a beam of electromagnetic radiation
6304450, Jul 15 1999 Molex, LLC Inter-circuit encapsulated packaging
6320994, Dec 22 1999 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD Total internal reflection optical switch
6323447, Dec 30 1998 Agilent Technologies Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method
6351579, Feb 27 1998 Los Alamos National Security, LLC Optical fiber switch
6356679, Mar 30 2000 Emcore Corporation Optical routing element for use in fiber optic systems
6373356, May 21 1999 InterScience, Inc.; INTERSCIENCE, INC Microelectromechanical liquid metal current carrying system, apparatus and method
6396012, Jun 14 1999 BLOOMFIELD, RODGER E Attitude sensing electrical switch
6396371, Feb 02 2000 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts
6408112, Mar 09 1998 BARTELS MIKROTECHNIK GMBH Optical switch and modular switching system comprising of optical switching elements
6446317, Mar 31 2000 Intel Corporation Hybrid capacitor and method of fabrication therefor
6453086, Mar 06 2000 Corning Incorporated Piezoelectric optical switch device
6470106, Jan 05 2001 HEWLETT-PACKARD DEVELOPMENT COMPANY, L P Thermally induced pressure pulse operated bi-stable optical switch
6487333, Dec 22 1999 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD Total internal reflection optical switch
6501354, May 21 1999 InterScience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
6512322, Oct 31 2001 Agilent Technologies, Inc Longitudinal piezoelectric latching relay
6515404, Feb 14 2002 Agilent Technologies, Inc Bending piezoelectrically actuated liquid metal switch
6516504, Apr 09 1996 The Board of Trustees of the University of Arkansas Method of making capacitor with extremely wide band low impedance
6559420, Jul 10 2002 Agilent Technologies, Inc. Micro-switch heater with varying gas sub-channel cross-section
6633213, Apr 24 2002 Agilent Technologies, Inc Double sided liquid metal micro switch
6646527, Apr 30 2002 Agilent Technologies, Inc High frequency attenuator using liquid metal micro switches
6647165, May 31 2001 AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD Total internal reflection optical switch utilizing a moving droplet
20020037128,
20020146197,
20020150323,
20020168133,
20030035611,
EP593836,
FR2418539,
FR2458138,
FR2667396,
JP3618575,
JP4721645,
JP62276838,
JP63294317,
JP8125487,
JP9161640,
WO9946624,
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