In an imaging apparatus having a head unit mounting thereon liquid droplet ejection heads with a plurality of ejection nozzles, a confirmation is made before starting an imaging operation as to whether or not liquid droplets are normally ejected from the respective ejection nozzles. This confirmation is made by using optical liquid droplet detectors having a light emitting element and a light receiving element. When ejection of liquid droplets from any of the ejection nozzles of liquid droplet ejection heads is determined to be abnormal in an ejection confirming operation, the ejection confirming operation is performed again. When the ejection of the liquid droplets from the same ejection nozzle is determined to be abnormal also in this ejection confirming operation, this ejection nozzle is judged to be abnormal.
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1. A method of determining abnormality of nozzles in an imaging apparatus having a plurality of ejection nozzles, comprising:
a first step of performing a function liquid droplet ejection confirming operation to determine whether or not function liquid droplets are normally ejected from the respective ejection nozzles by using liquid droplet detection means before performing the imaging operation;
a second step of performing the function liquid droplet ejection confirming operation once again, prior to performing a maintenance work, when the ejection of the function liquid droplets from any of said ejection nozzles is determined to be abnormal in the first step;
a third step of judging said ejection nozzle to be abnormal when the ejection of the function liquid droplets from an identical ejection nozzle is determined to be abnormal also in the second step;
a fourth step of performing the maintenance work when any of the ejection nozzles is judged to be abnormal, thereby restoring said ejection nozzles to a state in which the function liquid droplets are ejected normally;
a fifth step of performing the function liquid droplet ejection confirming operation once again after the fourth step; and
a sixth step of transferring to the imaging work when the function liquid droplets are determined to be ejected normally from all of said ejection nozzles in the fifth step.
2. The method according to
3. The method according to
a seventh step of performing the function liquid droplet ejection confirming operation once again after a second maintenance work to remove the function liquid droplets from said ejection nozzles when the function liquid droplet ejection is determined to be abnormal also in the fifth step; and
an eighth step of issuing an instruction of replacing the head unit when the ejection of the function liquid droplets is determined to be abnormal even after the seventh step.
4. An imaging apparatus in which the method of determining abnormality of nozzles according to
5. An electrooptic device having formed a film formation part by ejecting the function liquid droplets onto the workpiece from liquid droplet ejection heads with the imaging apparatus according to
6. An electronic equipment having mounted thereon the electrooptic device according to
7. A method of manufacturing an electrooptic device, comprising the step of forming a film formation part by ejecting the function liquid droplets onto the workpiece from liquid droplet ejection heads with the imaging apparatus according to
8. An electronic equipment having mounted thereon the electrooptic device manufactured by the method of manufacturing an electrooptic device according to
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1. Field of the Invention
This invention relates to a method of determining abnormality of nozzles in an imaging (drawing) device using a liquid droplet ejection (or discharge) head having a plurality of ejection (or discharge) nozzles as represented by an ink jet head; an imaging apparatus; an electrooptic device; a method of manufacturing the electrooptic device; and an electronic equipment.
2. Description of the Related Art
An ink jet head (a liquid droplet ejection head) of an ink jet printer can accurately eject dot-shaped minute ink droplets (liquid droplets). Thus, by using a function liquid (hereinafter referred to as function liquid) such as a particular ink or photosensitive resin, for example, as an ejected liquid, the ink jet head is expected to be applied to a field of manufacturing of various devices.
For example, it is considered to manufacture a color filter of a liquid crystal display, an organic electroluminescence (EL) display and the like by using a head unit including a plurality of liquid droplet ejection heads. Specifically, the color filter is manufactured by ejecting function liquid toward a workpiece, such as a substrate of the color filter, from respective ejection nozzles of the respective liquid droplet ejection heads while moving the head unit relatively to the workpiece in two scanning directions orthogonal to each other.
Here, if an imaging operation is halted for a certain amount of time to perform loading/unloading of the workpiece and the like, clogging of the ejection nozzles may be caused by increased viscosity of the function liquid of the liquid droplet ejection heads. Thus, it is desired to dispose maintenance means for the liquid droplet ejection heads in an imaging apparatus and to perform maintenance operations, such as a preliminary ejection for ejecting the function liquid from the ejection nozzles and removal of the function liquid from the ejection nozzles by suction, by moving the head unit to a position where the maintenance means is disposed during the pause.
Moreover, in order to prevent defective products, it is also desired to confirm whether or not the function liquid is normally ejected from the respective ejection nozzles before starting the imaging operation after the maintenance operation.
Regarding a regular ink jet printer including no maintenance means, liquid droplet detection means is conventionally known, which includes an emitting element and a light receiving element and detects ejection of a function liquid based on a change in an amount of light received when the function liquid crosses an optical path between the two elements.
Also in the foregoing imaging apparatus, it is considered that, by using the liquid droplet detection means as described above, an ejection confirming operation for the function liquid is performed to determine whether or not the function liquid is normally ejected from the respective ejection nozzles.
Moreover, regarding the regular ink jet printer, there is conventionally known a technology of performing a printing operation by using only a part of a nozzle array including continuously arranged normal ejection nozzles when any of the ejection nozzles are determined to be abnormal.
When the ejection confirming operation for the function liquid is performed by using such optical liquid droplet detection means as that of the foregoing conventional example, which includes the emitting element and the light receiving element, an erroneous determination is sometimes made. Specifically, even if the function liquid is normally ejected from the ejection nozzles, a determination of abnormal ejection is made, that is, the ejection nozzles may be determined to be abnormal due to satellite (floating misty particles resulting from an ejected liquid), electrical noise and the like.
Moreover, if an imaging operation is performed by using only a part of the nozzle array including the continuously arranged normal ejection nozzles, as described in the foregoing conventional example, when any of the ejection nozzles are abnormal, the operation takes long and efficiency is lowered. Here, even if the function liquid is not normally ejected, execution of the maintenance operation, such as the preliminary ejection of ejecting the function liquid from the ejection nozzles, may sometimes restore a state where the function liquid is normally ejected.
In consideration of the foregoing circumstances, it is an advantage of this invention to provide a method of determining abnormality of nozzles in an imaging apparatus, the imaging apparatus, an electrooptic device, a method of manufacturing the electrooptic device and electronic equipment. Specifically, the method of determining abnormality of nozzles in an imaging apparatus is capable of preventing an erroneous determination as much as possible and performing an imaging operation efficiently by restoring ejection nozzles when the ejection nozzles are determined to be abnormal.
In order to achieve the foregoing advantage, there is provided a method of determining abnormality of nozzles in an imaging apparatus having a plurality of ejection nozzles, comprising: a first step of performing a function liquid droplet ejection confirming operation to determine whether or not function liquid droplets are normally ejected from the respective ejection nozzles by using liquid droplet detection means before performing the imaging operation; a second step of performing the function liquid droplet ejection confirming operation once again when the ejection of the function liquid droplets from any of the ejection nozzles is determined to be abnormal in the first step; and a third step of judging the ejection nozzle to be abnormal when the ejection of the function liquid droplets from an identical ejection nozzle is determined to be abnormal also in the second step.
According to the above-described arrangement, only when the ejection of the function liquid droplets from the identical (the same) ejection nozzle is determined to be abnormal twice in succession, the ejection nozzle is determined to be abnormal. Even if the liquid droplet detection means is affected by satellite, electrical noises and the like, as long as the ejection nozzles are normal, it is less likely that the ejection of the function liquid droplets is determined to be abnormal twice in succession. Therefore, an erroneous determination in which the normal ejection nozzles are determined to be abnormal is prevented to the best extent possible.
Preferably, the method further comprises: a fourth step of performing a maintenance work when any of the ejection nozzles is judged to be abnormal, thereby restoring the ejection nozzles to a state in which the function liquid droplets are ejected normally; a fifth step of performing the function liquid droplet ejection confirming operation once again after the fourth step; and a sixth step of transferring to the imaging work when the function liquid droplets are determined to be ejected normally from all of the ejection nozzles in the fifth step.
Here, the abnormal ejection of the function liquid droplets is likely to be caused by minor clogging in the vicinity of the ejection nozzles. A preliminary ejection in which the function liquid droplets are ejected from the ejection nozzles is likely to restore a state in which the function liquid droplets are normally ejected. Since the preliminary ejection requires a short amount of time, the foregoing maintenance operation is preferably the preliminary ejection.
Moreover, even if there occurs severe clogging that cannot be repaired by the preliminary ejection, removal of the function liquid droplets from the ejection nozzles by suction may restore the state where the function liquid droplets are normally ejected.
Therefore, the method preferably further comprises: a seventh step of performing the function liquid droplet ejection confirming operation once again after a second maintenance work to remove the function liquid droplets from the ejection nozzles when the function liquid droplet ejection is determined to be abnormal also in the fifth step; and an eighth step of issuing an instruction of replacing the head unit when the ejection of the function liquid droplets is determined to be abnormal even after the seventh step.
The imaging apparatus according to this invention is a device in which the above-described method of determining abnormality of nozzles is executed.
According to the above-described arrangement, the ejection of the function liquid droplets can be confirmed efficiently after the maintenance work.
The electrooptic device according to this invention is a device having formed a film formation part by ejecting the function liquid droplets onto the workpiece from the liquid droplet ejection heads with the above-described imaging apparatus.
The method of manufacturing the electrooptic device according to this invention comprises the step of forming a film formation part by ejecting the function liquid droplets onto the workpiece from the liquid droplet ejection heads with the above-described imaging apparatus.
According to the above-described arrangements, the electrooptic device is manufactured by using the reliable imaging apparatus without abnormal ejection of the function liquid droplets and thus the electrooptic device itself can be manufactured efficiently. As the electrooptic device, a liquid crystal display, an organic electroluminescence (EL) device, an electron-emitting device, a plasma display panel (PDP) device, an electrophoretic display and the like are conceivable. The electron-emitting device conceptually includes so-called field emission display (FED) and surface-conduction electron-emitter display (SED) devices. Furthermore, as the electrooptic device, conceivable are devices for forming a metallic wiring, a lens, a resist, a light diffusion body and the like.
The electronic equipment according to this invention is characterized in that the foregoing electrooptic device or an electrooptic device manufactured by the method of manufacturing an electrooptic device is mounted thereon.
In this case, as the electronic equipment, a portable telephone equipped with a so-called flat panel display, a personal computer and various other electrical appliances are applicable.
The above and other features of this invention will become readily apparent by reference to the following detailed description when considered in conjunction with the accompanying drawings wherein:
With reference to the accompanying drawings, an embodiment of this invention will be described below.
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This imaging apparatus 1 is arranged to supply the liquid droplet ejection head 31 with the function liquid from the liquid supply tank 241 of the function liquid supply/recovery means 4 and to eject the function liquid onto the workpiece W from the liquid droplet ejection head 31, while maintaining the liquid droplet ejection head 31 of the imaging means 2 by the maintenance means 3. The respective means will be described below.
The imaging means 2 includes: a head unit 21 having a plurality of the liquid droplet ejection heads 31 which eject the function liquid; a main carriage 22 which supports the head unit 21; and an X/Y moving mechanism 23 which moves the head unit 21 relative to the workpiece W in two scanning directions including a main-scanning direction (the X-axis direction) and a sub-scanning direction orthogonal thereto (a Y-axis direction).
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The X-axis table 71 includes: a suction table 72 which sets the workpiece W thereon by air suction; a θ table 73 which supports the suction table 72; an X-axis air slider 74 which supports the θ table 73 to be freely slidable in the X-axis direction; an X-axis linear motor (not illustrated) which moves the workpiece W on the suction table 72 in the X-axis direction through the θ table 73; and an X-axis linear scale 75 placed side by side with the X-axis air slider 74. The main scanning of the liquid droplet ejection heads 31 is performed in such a manner that drive of the X-axis linear motor moves the suction table 72 having the workpiece W sucked thereon and the θ table 73 back and forth in the X-axis direction by using the X-axis air slider 74 as a guide.
The Y-axis table 81 includes: a bridge plate 82 which hangs the main carriage 22; a pair of Y-axis sliders 83 which support the bridge plate 82 at two points so as to be slidable in the Y-axis direction; a Y-axis linear scale 84 placed side by side with the Y-axis sliders 83; a Y-axis ball screw 85 which moves the bridge plate 82 in the Y-axis direction by using the pair of Y-axis sliders 83 as a guide; and a Y-axis motor (not illustrated) which rotates the Y-axis ball screw 85 in forward and backward directions. The Y-axis motor includes a servo motor and, when the Y-axis motor is rotated in the forward and backward directions, the bridge plate 82 screwed thereto through the Y-axis ball screw 85 is moved in the Y-axis direction while being guided by the pair of Y-axis sliders 83. Specifically, along with the movement of the bridge plate 82, the main carriage 22 (the head unit 21) moves back and forth in the Y-axis direction and thus the sub-scanning of the liquid droplet ejection heads 31 is performed. Note that the Y-axis table 81 and the θ table 73 are omitted in
Here, a series of operations of the imaging means 2 will be briefly described. First, as a preparation prior to an imaging operation of ejecting the function liquid toward the workpiece W, a position of the head unit 21 is corrected by the head recognition camera and, thereafter, a position of the workpiece W set on the suction table 72 is corrected by the workpiece recognition camera. Next, an operation of selectively ejecting liquid droplets onto the workpiece W is performed by moving the workpiece W back and forth in the main scanning (the X-axis) direction by the X-axis table 71 and driving the plurality of liquid droplet ejection heads 31. Subsequently, after moving the workpiece W back and forth, the head unit 21 is moved in the sub-scanning (the Y-axis) direction by the Y-axis table 81. Accordingly, the back-and-forth movement of the workpiece W in the main scanning direction and the drive of the liquid droplet ejection heads 31 are performed again. Note that, in this embodiment, the workpiece W is moved in the main scanning direction with respect to the head unit 21. However, the head unit 21 may be moved in the main scanning direction. Moreover, the head unit 21 may be moved in the main-scanning and sub-scanning directions while fixing the workpiece W.
Next, the maintenance means 3 will be described. The maintenance means 3 maintains the liquid droplet ejection heads 31 so that the liquid droplet ejection heads 31 can properly eject the function liquid and includes the suction unit 91 and the wiping unit 92.
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Moreover, a relief valve 131 is provided in each of the caps 102 so as to open to atmosphere at the bottom side of the concave part 121 (see
The function liquid suction pump 141 applies a sucking force to the liquid droplet ejection head 31 through each cap 102 and is arranged by using a piston pump in consideration of maintenance.
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As described later in detail, each cap 102 of the cap unit 101 also serves as a liquid droplet tray which catches the function liquid ejected by flushing (preliminary ejection) of the liquid droplet ejection head 31 in no ejection of the function liquid. In the case of sucking the liquid droplet ejection head 31 through the cap 102, such as filling the inner passage of the liquid droplet ejection head 31 with the function liquid and cleaning the liquid droplet ejection head 31, the lift mechanism 181 moves the cap unit 101 to the first position so as to adhere the cap 102 on the liquid droplet ejection head 31. In the case where the liquid droplet ejection head 31 performs the flushing, the lift mechanism 181 moves the cap unit 101 to the second position.
The wiping unit 92 wipes the nozzle forming surface 44 of the liquid droplet ejection head 31 contaminated by the function liquid adhered thereon by performing suction (cleaning) of the liquid droplet ejection head 31 and the like. The wiping unit 92 includes a winding unit 191 and a wipe-away unit 192, which are disposed face to face on the common base 16 (see
The flushing operation (preliminary ejection) of the liquid droplet ejection head 31 is also performed during the imaging operation. Thus, a flushing unit 93 having a pair of flushing boxes 93a fixed so as to sandwich the suction table 71 therebetween is provided on the θ table 73 of the X-axis table 71 (see
In the flushing operation, the function liquid is ejected from all the ejection nozzles 42 of all the liquid droplet ejection heads 31. The flushing operation is periodically performed to prevent occurrence of clogging in the ejection nozzles 42 of the liquid droplet ejection heads 31. Specifically, the clogging occurs when the function liquid introduced to the liquid droplet ejection heads 31 is thickened by drying along with the passage of time. It is necessary to perform the flushing operation not only in the imaging operation but also in replacing the workpiece W and in temporarily halting the imaging operation (standby). In this case, the head unit 21 is moved to a cleaning position, that is, a portion immediately above the cap unit 101 of the suction unit 91 and, thereafter, the respective liquid droplet ejection heads 31 perform the flushing toward the respective caps 102 corresponding thereto.
In the case of performing the flushing toward the caps 102, the cap unit 101 is lifted up by the lift mechanism 181 to the second position where a narrow gap (a liquid droplet ejection space) occurs between the liquid droplet ejection head 31 and the cap 102. Thus, a large part of the function liquid ejected by the flushing can be received by the respective caps 102.
Next, the function liquid supply/recovery means 4 will be described. The function liquid supply/recovery means 4 includes: a function liquid supply system 221 which supplies the function liquid to the respective liquid droplet ejection heads 31 of the head unit 21; a function liquid recovery system 222 which recovers the function liquid sucked by the suction unit 91 of the maintenance means 3; the cleaning fluid supply system 223 which supplies a solution made of functional materials to the wiping unit 92 for cleaning; and a waste liquid recovery system 224 which recovers the function liquid received by the flushing unit 93 or the backup flushing unit 94. As shown in
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As described later in detail, in the air supply tube 292 connected to the pressurization connector 248, a three-way valve 254 (line opening and closing means) having a relief port (a port to open to atmosphere) is provided. Thus, a pressure from the pressurization tank 231 is cut off by relieving or venting to atmosphere. Consequently, a water head pressure of the supply tube 251 extending toward the head unit 21 is maintained to be slightly negative (for example, 25 mm±0.5 mm) by the above-described liquid level control and thus dripping of the function liquid from the ejection nozzles 42 of the liquid droplet ejection heads 31 is prevented. At the same time, the liquid droplets are accurately ejected by a pumping action of the liquid droplet ejection heads 31, that is, a pump drive of a piezoelectric element in the pump part 41.
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The function liquid recovery system 222 is for storing the function liquid sucked by the suction unit 91 and includes: a recycling tank 261 which stores the sucked function liquid; and a recovery tube 262 which is connected to the function liquid suction pump 141 and introduces the sucked function liquid to the recycling tank 261.
The cleaning fluid supply system 223 is for supplying the cleaning fluid to the wiping sheet of the wiping unit 92 and includes: a cleaning fluid tank 271 which stores the cleaning fluid; and a cleaning fluid supply tube (not illustrated) for supplying the cleaning fluid of the cleaning fluid tank 271. The supply of the cleaning fluid is performed by introducing compressed air to the cleaning fluid tank 271 from the air supply means 5. Moreover, a function liquid solution is used as the cleaning fluid.
The waste liquid recovery system 224 is for recovering the function liquid ejected to the flushing unit 93 and the backup flushing unit 94 and includes: the waste liquid tank 282 which stores the recovered function liquid; and a waste liquid tube (not illustrated) which is connected to the flushing units 93 and 94 and guides the function liquid ejected to the flushing unit 93 to the waste liquid tank 282.
Next, the air supply means 5 will be described. As shown in
As described later in detail, the imaging apparatus 1 according to the embodiment is arranged to pressurize the liquid supply tank 241 based on the foregoing head side pressure sensor 255. In the air supply tube 292 connected to the liquid supply tank 241, the pressure controller 294 connected to the head side pressure sensor 255 and the three-way valve 254 having the relief port are disposed. The pressure controller 294 sends the compressed air sent from the regulator 293 to the liquid supply tank 241 by appropriately decompressing the compressed air and controls the opening and closing of the three-way valve 254. Thus, the pressure applied to the liquid supply tank 241 can be controlled.
Moreover, in the embodiment, the compressed air is directly introduced into the pressurization tank 231 and the liquid supply tank 241. However, the pressurization tank 231 and the liquid supply tank 241 may be separately housed in pressurized boxes (not illustrated), made of aluminum or the like and the pressurization tank 231 and the liquid supply tank 241 may be pressurized separately from each other through the pressurized boxes. To be more specific, vent holes or the like are provided in the pressurization tank 231 and the liquid supply tank 241 to allow the pressurization tank 231 and the liquid supply tank 241 to communicate with the insides of the pressurized boxes. Thus, pressures inside the pressurized boxes, the pressurization tank 231 and the liquid supply tank 241 are maintained the same. Subsequently, by supplying the compressed air from the air pump 291 to the pressurized boxes, the insides of the pressurization tank 231 and the liquid supply tank 241 are pressurized.
Next, the control means 7 will be described. The control means 7 includes a control unit for controlling operations of the respective means. The control unit stores control programs and control data therein and has a work area for performing various control processing. The control means 7 is connected to the respective means described above and controls the entire device.
Here, with reference to
Next, the liquid droplet detection means 6L and 6R will be described. As shown in
Here, one liquid droplet detection means 6L corresponds to one of the two arrays of the liquid droplet ejection heads 31 mounted on the head unit 21 and the other liquid droplet detection means 6R corresponds to the other array of the liquid droplet ejection heads 31 on the head unit 21. After completion of the maintenance operation such as flushing performed when the imaging operation is halted, before starting the next imaging operation, it is confirmed by using the liquid droplet detection means 6L and 6R whether or not the function liquid is normally ejected from the ejection nozzles 42 of the respective arrays of the liquid droplet ejection heads 31.
In manufacturing the liquid crystal display and the organic EL device, which will be described later, no defective products are produced even if the function liquid is ejected somewhat obliquely from the ejection nozzles 42. Thus, a diameter of a beam emitted from the light emitting element 201 is set to a value larger (for example, 90 μm) than a diameter of the function liquid droplet (for example, 27 μm) and a distance between the ejection nozzle 42 and the optical path 203 is set to about 1 mm. Consequently, the liquid droplets can be detected even if the function liquid is ejected somewhat obliquely from the ejection nozzles 42.
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A space between the places where the X-axis table 81 and the suction unit 91 are disposed is originally a dead space and a width thereof in the Y-axis direction is relatively narrow. In order to dispose the liquid droplet detection means 6L and 6R in this space without trouble, the light emitting element 201 and the light receiving element 202 of each of the liquid droplet detection means 6L and 6R are located to be opposite to each other in the X-axis direction and thus a size of the liquid droplet detection means 6L and 6R in the Y-axis direction is reduced.
Moreover, when both the liquid droplet detection means 6L and 6R are horizontally disposed on the same line along the X-axis direction, for the purpose of avoiding interference between the elements positioned in both the liquid droplet detection means 6L and 6R in the X-axis direction, a width in the X-axis direction of an undetectable region between a detection effective region of the one liquid droplet detection means 6L (a region where the optical path 203 exists between the light emitting element 201 and the light receiving element 202) and a detection effective region of the other liquid droplet detection means 6R is increased. Consequently, a gap in the X-axis direction between the two arrays of the liquid droplet ejection heads 31 is inevitably increased and thus the head unit 21 grows in size.
Accordingly, in the embodiment, both the liquid droplet detection means 6L and 6R are disposed at positions in the X-axis direction in accordance with the corresponding arrays of liquid droplet ejection heads 31, the positions being shifted from each other in the Y-axis direction. Thus, the element (the light receiving element 202) positioned inside of the one liquid droplet detection means 6L in the X-axis direction and the element (the light receiving element 202) positioned inside of the other liquid droplet detection means 6R in the X-axis direction can be overlapped with each other in the X-axis direction and thus the width in the X-axis direction of the undetectable region between both the liquid droplet detection means 6L and 6R can be narrowed. Consequently, the gap in the X-axis direction between the two arrays of the liquid droplet ejection heads 31 does not have to be wide and thus the head unit 21 does not have to be increased in size.
It is also possible to perform the operation of confirming the liquid droplet ejection to the two arrays of the liquid droplet ejection heads 31 by using single liquid droplet detection means in such a manner that the common base 16 is moved by the movable table 18 and the liquid droplet detection means is shifted in the X-axis direction. However, if the two liquid droplet ejection means 6L and 6R corresponding to the two arrays of liquid droplet ejection heads 31 are provided as described in the embodiment, it is possible to simultaneously perform the operation of confirming the liquid droplet ejection to the two arrays of the liquid droplet ejection heads 31. Thus, the above arrangement is advantageous for the purpose of improving operation efficiency.
Moreover, in each of the liquid droplet detection means 6L and 6R, a liquid droplet tray 205 is provided under the optical path 203 between the light emitting element 201 and the light receiving element 202. An absorber 206 disposed in this liquid droplet tray 205 enables absorption of the function liquid ejected from the ejection nozzles 42. Furthermore, a piping joint 208 communicating with a bottom of the liquid droplet tray 205 is provided and a suction pump 209 continuing into the above-described recycling tank 261 is connected to this piping joint 208. Accordingly, function liquid recovery means 207 for the liquid droplet detection means is constituted, which recovers the function liquid ejected from the ejection nozzles 42 by suction through the absorber 206. Consequently, it is possible to recycle the function liquid ejected in the function liquid ejection confirming operation. Thus, a running cost can be reduced.
In the function liquid ejection confirming operation, by using the control means 7, the head unit 21 is continuously moved in the Y-axis direction in such a manner that the respective ejection nozzles 42 of each array of the liquid droplet ejection heads 31 are sequentially positioned immediately above the optical path 203 between the light emitting element 201 and the light receiving element 202 of each of the liquid droplet detection means 6L and 6R. Thereafter, detection timing is obtained by using a signal from the linear scale in the Y-axis direction (the Y-axis linear scale 84) and, at the same time, the function liquid is ejected from the ejection nozzles 42 positioned immediately above the optical path 203. Subsequently, depending on whether or not the function liquid is detected by the liquid droplet detection means 6L and 6R, it is determined whether or not the function liquid is normally ejected from the ejection nozzles 42. The light emitting element 201 may emit light in synchronization with the ejection of the function liquid from the ejection nozzles 42 or may continue to emit light during the confirming operation.
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Here, when the ejection confirmation operation of the function liquid is performed by using such optical liquid droplet detection means 6L and 6R having the light emitting element 201 and the light receiving element 202 as used in the embodiment, even if the function liquid is normally ejected from the ejection nozzles 42, the ejection may be determined to be abnormal due to satellite (floating misty particles resulting from an ejected liquid), electrical noise and the like. Accordingly, in the embodiment, as described above, when the ejection of the function liquid from the same ejection nozzle 42 is determined to be abnormal twice in succession, this ejection nozzle 42 is judged to be abnormal. Thus, an erroneous judgment can be prevented as much as possible.
When the ejection nozzle 42 is judged to be abnormal, flushing (preliminary ejection) is performed (S6), in which the function liquid is ejected toward the cap unit 101 at least from the ejection nozzle 42 judged to be abnormal. After the flushing, the function liquid ejection confirmation is performed again for all the ejection nozzles 42. Thereafter, when the ejection nozzle 42 is still judged to be abnormal in determination processing similar to that described above, since the flushing has been already performed (S7), suction and wiping are performed this time for the liquid droplet ejection head 31 having at least the ejection nozzle 42 judged to be abnormal by using the suction unit 91 and the wiping unit 92 (S8). Thereafter, the function liquid ejection confirmation is performed again for all the ejection nozzles 42.
Here, the abnormal ejection of the function liquid is mostly caused by minor clogging in the vicinity of the ejection nozzles 42. Thus, when the flushing of the ejection nozzles 42 is performed, it is likely to recover a state in which the function liquid is normally ejected. Consequently, even if the ejection nozzle 42 is once judged to be abnormal, the recovery of the ejection nozzle 42 by the flushing makes it possible to perform an efficient imaging operation using all the ejection nozzles 42, which is advantageous in terms of improving productivity.
Moreover, even if there occurs severe clogging that cannot be repaired by the preliminary ejection, suction of the ejection nozzles 42 may restore the state in which the function liquid is normally ejected. However, when the state cannot be restored even by the suction and the ejection nozzle 42 is judged to be abnormal again, since the suction has been already performed (S9), an instruction of replacing the head unit 21 is sent or issued this time regarding the head unit 21 as unusable (S10). Accordingly, an annunciator and the like is operated by this replacement instruction and the head unit 21 is replaced with a new one. In the embodiment, individual suction for each of the ejection nozzles 42 is impossible in terms of the structure of the cap unit 101. However, if the individual suction is possible, the suction of only the ejection nozzle 42 determined to be abnormal may be performed.
Moreover, by using the liquid droplet detection means 6L and 6R, the ejection of the function liquid can be detected but excess and deficiency of an ejection amount cannot be directly detected. Consequently, in the embodiment, as shown in
Next, as the electrooptic device (flat panel display) manufactured by using the liquid droplet ejection device 1 according to the embodiment, by using the color filter, the liquid crystal display, the organic EL device, the plasma display (PDP device), the electron-emitting device (FED device and SED device) and the like as examples, structures and manufacturing methods thereof will be described.
First, a method of manufacturing a color filter installed in the liquid crystal display, the organic EL device or the like will be described.
First, in a black matrix formation step (S11), as shown in
Subsequently, in a bank formation step (S12), a bank 503 is formed in a state of being superposed on the black matrix 502. Specifically, as shown in
Furthermore, as shown in
This bank 503 and the black matrix 502 therebelow become partition wall parts 507b which separate respective pixel regions 507a from each other. The partition wall parts 507b define shot areas of the function liquid in forming colored layers (film formation parts) 508R, 508G and 508B by using the liquid droplet ejection heads 31 in a following colored layer formation step.
Through the black matrix formation step and the bank formation step described above, the foregoing filter substrate 500A is obtained.
In the embodiment, as a material of the bank 503, used is a resin material that makes a coated film surface lyophobic (hydrophobic). Since a surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), positional accuracy of shots of liquid droplets into the respective pixel regions 507a surrounded by the bank 503 (the partition wall parts 507b) is improved in the colored layer formation step to be described later.
Next, in the colored layer formation step (S13), as shown in
Thereafter, the function liquids are fixed through drying treatment (processing such as heating) and the colored layers 508R, 508G and 508B of the three colors are formed. When the colored layers 508R, 508G and 508B are formed, the processing moves to a protection film formation step (S14) and, as shown in
Specifically, after a coating agent for the protection film is ejected to the entire surface of the substrate 501 in which the colored layers 508R, 508G and 508B are formed, the protection film 509 is formed through the drying treatment.
Subsequently, after forming the protection film 509, the substrate 501 is cut into individual effective pixel regions and thus the color filter 500 is obtained.
This liquid crystal device 520 is schematically constituted by using the color filter 500, a counter substrate 521 made of a glass substrate or the like and a liquid crystal layer 522 made of a super twisted nematic (STN) liquid crystal composition, the liquid crystal layer 522 being sandwiched between the color filter 500 and the counter substrate 521. The color filter 500 is disposed at the upper side in the imaging (an observer side).
Polarizers (not illustrated) are disposed on outer surfaces (surfaces opposite to the liquid crystal layer 522 side) of the counter substrate 521 and the color filter 500, respectively. Moreover, outside of the polarizer positioned at the counter substrate 521 side, a backlight is provided.
On the protection film 509 of the color filter 500 (the liquid crystal layer side), a plurality of strip-shaped first electrodes 523, which are long in the right-and-left direction in
Meanwhile, on a surface of the counter substrate 521, which faces the color filter 500, a plurality of strip-shaped second electrodes 526, which are long in a direction orthogonal to the first electrodes 523 of the color filter 500, are formed at predetermined intervals. A second alignment layer 527 is formed so as to cover surfaces of these second electrodes 526 at the liquid crystal layer 522 side. These first and second electrodes 523 and 526 are formed by using a transparent conductive material such as ITO (indium tin oxide).
Spacers 528 provided in the liquid crystal layer 522 are members for maintaining a constant thickness (cell gap) of the liquid crystal layer 522. Moreover, a seal 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that, as a laying wiring 523a, one end of each of the first electrodes 523 is extended to the outside of the seal 529.
Portions where the first and second electrodes 523 and 526 intersect with each other are pixels and the colored layers 508R, 508G and 508B of the color filter 500 are positioned in the portions to be the pixels.
In usual manufacturing steps, the parts at the color filter 500 side are prepared by subjecting the color filter 500 to the patterning of the first electrodes 523 and the coating of the first alignment layer 524. At the same time, the parts at the counter substrate 521 side are prepared by subjecting the counter substrate 521 to the patterning of the second electrodes 526 and the coating of the second alignment layer 527. Thereafter, the spacers 528 and the seal 529 are formed at the counter substrate 521 side and the parts at the color filter 500 side are attached thereto in this state. Subsequently, liquid crystal included in the liquid crystal layer 522 is injected from an inlet of the seal 529 and the inlet is sealed. Thereafter, both the polarizers and the backlight are laminated.
In the imaging apparatus 1 according to the embodiment, application of a spacer material (a function liquid) included in the above-described cell gap and, before attachment of the parts at the color filter 500 side to the parts at the counter substrate 521 side, for example, liquid crystal (a function liquid) can be evenly applied in a region surrounded by the seal 529. Moreover, printing of the above-described seal 529 can be performed by using the liquid droplet ejection heads 31. Furthermore, the coating of the first and second orientation films 524 and 527 can be also performed by using the liquid droplet ejection heads 31.
This liquid crystal device 530 is significantly different from the foregoing liquid crystal device 520 in a point that the color filter 500 is disposed at the lower side in the drawing (opposite to the observer side).
This liquid crystal device 530 is schematically constituted by sandwiching a liquid crystal layer 532 made of STN liquid crystal between the color filter 500 and a counter substrate 531 made of a glass substrate or the like. Polarizers (not illustrated) and the like are disposed on outer surfaces of the counter substrate 531 and the color filter 500, respectively.
On the protection film 509 of the color filter 500 (at the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 are formed at predetermined intervals, which are long in a depth direction in the drawing. A first alignment layer 534 is formed so as to cover surfaces of these first electrodes 533 at the liquid crystal layer 532 side.
On a surface of the counter substrate 531, which faces the color filter 500, a plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrodes 533 at the color filter 500 side are formed at predetermined intervals. A second alignment layer 537 is formed so as to cover surfaces of these second electrodes 536 at the liquid crystal layer 532 side.
In the liquid crystal layer 532, provided are: spacers 538 for maintaining a constant thickness of this liquid crystal layer 532; and a seal 539 for preventing a liquid crystal composition in the liquid crystal layer 532 from leaking to the outside.
Similarly to the foregoing liquid crystal device 520, portions where the first and second electrodes 533 and 536 intersect with each other are pixels and the colored layers 508R, 508G and 508B of the color filter 500 are positioned in the portions to be the pixels.
In this liquid crystal device 550, the color filter 500 is disposed at the upper side in the drawing (the observer side).
This liquid crystal device 550 has a schematic constitution including: the color filter 500; a counter substrate 551 disposed so as to face the color filter 500; an unillustrated liquid crystal layer sandwiched by the color filter 500 and the counter substrate 551; a polarizer 555 disposed on an upper surface (the observer side) of the color filter 500; and a polarizer (not illustrated) disposed on a lower surface of the counter substrate 551.
On a surface of the protection film 509 of the color filter 500 (a surface at the counter substrate 551 side), an electrode 556 for driving liquid crystal is formed. This electrode 556 is made of a transparent conductive material such as ITO and becomes an overall electrode covering the entire region where a pixel electrode 560 to be described later is formed. Moreover, an alignment film 557 is provided in a state of covering a surface opposite to the pixel electrode 560 of the electrode 556.
On a surface of the counter substrate 551, the surface facing the color filter 500, an insulation layer 558 is formed. On this insulation layer 558, a scan line 561 and a signal line 562 are formed to be orthogonal to each other. In a region surrounded by these scan line 561 and signal line 562, the pixel electrode 560 is formed. Note that, in an actual liquid crystal device, an alignment layer is provided on the pixel electrode 560. However, description thereof is omitted in the drawing.
Moreover, in a notched part of the pixel electrode 560 and the portion surrounded by the scan line 561 and the signal line 562, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor and a gate electrode is installed. The thin film transistor 563 is turned on and off by application of a signal to the scan line 561 and the signal line 562. Thus, conduction to the pixel electrode 560 can be controlled.
The above-described liquid crystal devices 520, 530 and 550 of the respective examples shown above are the transparent liquid crystal device. However, a reflective liquid crystal device or a translucent reflective liquid crystal device can be obtained by providing a reflective layer or a translucent reflective layer.
Next,
This display device 600 is schematically constituted in a state where a circuit element part 602, an emitting element part 603 and a cathode 604 are laminated on a substrate (W) 601.
In this display device 600, light emitted from the emitting element part 603 to the substrate 601 side is transmitted through the circuit element part 602 and the substrate 601 and is outputted to the observer side. Meanwhile, light emitted from the emitting element part 603 to the opposite side of the substrate 601 is reflected by the cathode 604 before being transmitted through the circuit element part 602 and the substrate 601 and outputted to the observer side.
An underlayer protection film 606 made of a silicon oxide film is formed between the circuit element part 602 and the substrate 601. On this underlayer protection film 606 (the emitting element part 603 side), an island-shaped semiconductor film 607 made of polysilicon is formed. In regions on the right and left sides of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high-concentration positive ion implantation, respectively. A center portion of the semiconductor film 607, in which no positive ion is implanted, becomes a channel region 607c.
Moreover, in the circuit element part 602, a transparent gate insulation film 608 covering the underlayer protection film 606 and the semiconductor film 607 is formed. In a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulation film 608, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like, for example, is formed. On the gate electrode 609 and the gate insulation film 608, transparent first and second interlayer insulation films 611a and 611b are formed. Moreover, by penetrating the first and second interlayer insulation films 611a and 611b, contact holes 612a and 612b communicating with the source and drain regions 607a and 607b of the semiconductor film 607, respectively, are formed.
On the second interlayer insulation film 611b, a transparent pixel electrode 613 made of ITO or the like is formed by being patterned in a predetermined shape. This pixel electrode 613 is connected to the source region 607a through the contact hole 612a.
Moreover, a power source line 614 is disposed on the first interlayer insulation film 611a and this power source line 614 is connected to the drain region 607b through the contact hole 612b.
As described above, in the circuit element part 602, thin film transistors 615 for drive are formed, which are connected to the respective pixel electrodes 613.
The above-described emitting element part 603 has a schematic constitution including: functional layers 617 laminated on the plurality of pixel electrodes 613, respectively; and bank parts 618 which are provided between the respective pixel electrodes 613 and functional layers 617 and separate the respective functional layers 617 from each other.
The emitting element includes these pixel electrodes 613, the functional layers 617 and the cathode 604 disposed on the functional layers 617. Note that the pixel electrode 613 is formed by being patterned in an approximately rectangular shape when viewed from the front and the bank parts 618 are formed between the respective pixel electrodes 613.
Each of the bank parts 618 includes: an inorganic bank layer 618a (a first bank layer) formed by using an inorganic material such as SiO, SiO2 and TiO2, for example; and an organic bank layer 618b (a second bank layer) with a trapezoidal cross-section, which is laminated on the inorganic bank layer 618a and is formed by using resist excellent in resistances to heat and solvents such as acrylic resin and polyimide resin. A part of this bank part 618 is formed in a state of running on a peripheral portion of the pixel electrode 613.
Between the respective bank parts 618, opening portions 619 gradually opened upward to the pixel electrodes 613 are formed.
The above-described functional layer 617 includes: a hole injection/transport layer 617a formed in a state of being laminated on the pixel electrode 613 in the opening portion 619; and an emitting layer 617b formed on the hole injection/transport layer 617a. Note that another functional layer which has another function may be further formed adjacent to this emitting layer 617b. For example, it is also possible to form an electron transport layer.
The hole injection/transport layer 617a has a function of transporting positive holes from the pixel electrode 613 side and injecting the positive holes into the emitting layer 617b. This hole injection/transport layer 617a is formed by ejecting a first composition (a function liquid) including a hole injection/transport layer forming material. As the hole injection/transport layer forming material, for example, a polythiophene derivative such as polyethylenedioxythiophene and a mixture such as polystyrene sulfonate are used.
The emitting layer 617b emits light in red (R), green (G) or blue (B) and is formed by ejecting a second composition (a function liquid) including an emitting layer forming material (an emitting material). As a solvent (a nonpolar solvent) of the second composition, one which is does not melt the hole injection/transport layer 617a is preferable and cyclohexylbenzene, dihydrobenzofuran, trimethylbenzene, tetramethylbenzene or the like can be used, for example. By using such a nonpolar solvent as the second composition of the emitting layer 617b, the emitting layer 617b can be formed without remelting the hole injection/transport layer 617a again.
In the emitting layer 617b, the positive holes injected from the hole injection/transport layer 617a are recombined with electrons injected from the cathode 604 at the emitting layer and thus light is emitted.
The cathode 604 is formed in a state of covering the entire surface of the emitting element part 603 and plays a role of applying a current to the functional layer 617 by being paired up with the pixel electrode 613. Note that an unillustrated sealing member is disposed on this cathode 604.
Next, with reference to
As shown in
First, in the bank part formation step (S21), as shown in
Once the inorganic bank layer 618a is formed, as shown in
In such a manner, the bank part 618 is formed. Moreover, along with the formation of the bank parts 618, the opening portions 619 made open upward to the pixel electrodes 613 are formed between the respective bank parts 618. These opening portions 619 define pixel regions.
In the surface treatment step (S22), a lyophilic treatment and a liquid repellency treatment are performed. Regions subjected to the lyophilice treatment include a first lamination part 618aa of the inorganic bank layer 618a and an electrode surface 613a of the pixel electrode 613. These regions are subjected to the surface treatment and are made lyophilic by performing plasma processing using oxygen as processing gas, for example. This plasma processing also serves as cleaning of ITO that is the pixel electrode 613, and the like.
Moreover, the liquid repellency treatment is performed on a wall surface 618s of the organic bank layer 618b and an upper surface 618t thereof. Surfaces of the wall surface 618s and the upper surface 618t are fluorinated (are made liquid repellent) by performing plasma processing using methane tetrafluoride as processing gas, for example.
By performing the above-described surface treatment step, the function liquid can be more surely ejected into the pixel regions in forming the functional layer 617 by using the liquid droplet ejection heads 31. Moreover, it is made possible to prevent the function liquid ejected into the pixel regions from overflowing from the opening portions 619.
Through the above-described steps, the display device substrate 600A is obtained. This display device substrate 600A is mounted on the suction table 71 of the imaging apparatus 1 shown in
As shown in
Next, the emitting layer formation step (S24) will be described. In this emitting layer formation step, as described above, in order to prevent the remelting of the hole injection/transport layer 617a, a nonpolar solvent insoluble in the hole injection/transport layer 617a is used as a solvent of the second composition used in forming the emitting layer.
However, since the hole injection/transport layer 617a has a low affinity to the nonpolar solvent, even if the second composition containing the nonpolar solvent is ejected on the hole injection/transport layer 617a, there is a risk that the hole injection/transport layer 617a and the emitting layer 617b cannot be adhered together or that the emitting layer 617b cannot be evenly applied.
Consequently, in order to improve the affinity of the surface of the hole injection/transport layer 617a for the nonpolar solvent and the emitting layer forming material, it is preferable to perform a surface treatment (a surface modification treatment) before forming the emitting layer. This surface treatment is performed in such a manner that a surface modifying material, which is the same as the nonpolar solvent of the second composition used in the formation of the emitting layer or a solvent similar to the nonpolar solvent, is applied onto the hole injection/transport layer 617a and this surface modifying material is dried.
By performing the treatment as described above, the surface of the hole injection/transport layer 617a is likely to adapt to the nonpolar solvent and, in the following step, the second composition containing the emitting layer forming material can be evenly applied to the hole injection/transport layer 617a.
Next, as shown in
Thereafter, by performing a drying step and the like, the second composition after being ejected is dried to evaporate the nonpolar solvent contained in the second composition. Thus, as shown in
Similarly, by using the liquid droplet ejection heads 31, steps similar to that of the emitting layer 617b corresponding to blue (B) described above are sequentially performed as shown in
As described above, the functional layer 617, that is, the hole injection/transport layer 617a and the emitting layer 617b, are formed on the pixel electrode 613. Thereafter, the processing moves to the counter electrode formation step (S25).
In the counter electrode formation step (S25), as shown in
In an upper portion of this cathode 604, an Al film or an Ag film as an electrode and a protection layer such as SiO2 and SiN for preventing oxidization thereof are accordingly provided.
After the cathode 604 is formed as described above, the upper portion of the cathode 604 is subjected to other processing such as sealing processing of sealing by using a sealing member and wiring processing. Thus, the display device 600 is obtained.
Next,
This display device 700 has a schematic constitution including: first and second substrates 701 and 702, which are disposed while facing each other; and a discharge display unit 703 formed between the substrates. The discharge display unit 703 includes a plurality of discharge chambers 705. Three discharge chambers 705 including a red discharge chamber 705R, a green discharge chamber 705G and a blue discharge chamber 705B among the plurality of discharge chambers 705 are disposed as a set to form one pixel.
On an upper surface of the first substrate 701, address electrodes 706 are formed in a striped manner with predetermined intervals therebetween. A dielectric layer 707 is formed so as to cover these address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partitions 708 are provided upright so as to be positioned between and along the respective address electrodes 706. These partitions 708 include the ones extending on the both sides in the width direction of the address electrodes 706 as shown in
Consequently, regions separated by these partitions 708 are the discharge chambers 705.
In the discharge chambers 705, phosphors 709 are disposed. The phosphors 709 emit fluorescent light of red (R), green (G) and blue (B). A red phosphor 709R, a green phosphor 709G and a blue phosphor 709B are disposed at bottoms of the red, green and blue discharge chambers 705R, 705G and 705B, respectively.
On a lower surface of the second substrate 702 in
The first and second substrates 701 and 702 are attached to each other while facing each other in a state where the address electrodes 706 and the display electrodes 711 are orthogonal to each other. Note that the foregoing address electrodes 706 and the display electrodes 711 are connected to an alternator (not illustrated).
By conducting electricity through the respective electrodes 706 and 711, phosphors 709 are excited to emit light in the discharge display unit 703. Thus, color display is realized.
In the embodiment, the above-described address electrodes 706, display electrodes 711 and phosphors 709 can be formed by using the imaging apparatus 1 shown in
In this case, in a state where the first substrate 701 is placed on the suction table 71 of the imaging apparatus 1, the following steps are performed.
First, by using the liquid droplet ejection heads 31, a liquid material (a function liquid) containing a conductive film wiring forming material is ejected as a function liquid to an address electrode formation region. This liquid material is one obtained by dispersing conductive particles such as metal in a dispersion medium as the conductive film wiring forming material. As the conductive particles, metal particles containing gold, silver, copper, palladium, nickel or the like, conductive polymer and the like are used.
When the filling of the liquid material is finished for all the address electrode formation regions to be the target of the filling, the liquid material after being ejected is dried to evaporate the dispersion medium contained in the liquid material. Thus, the address electrodes 706 are formed.
Incidentally, the formation of the address electrodes 706 is described above as an example. The foregoing display electrodes 711 and phosphors 709 can be also formed through the steps described above.
In the case of forming the display electrodes 711, similarly to the case of the address electrodes 706, a liquid material (a function liquid) containing a conductive film wiring forming material is ejected as a function liquid to display electrode formation regions.
Moreover, in the case of forming the phosphors 709, a liquid material (a function liquid) containing fluorescent materials corresponding to the respective colors (R, G and B) is ejected as liquid droplets from the liquid droplet ejection heads 31 into the discharge chambers 705 of the corresponding colors.
Next,
This display device 800 has a schematic constitution including: first and second substrates 801 and 802, which are disposed while facing each other; and a field-emission display unit 803 formed between the substrates. The field-emission display unit 803 includes a plurality of electron-emitting parts 805 disposed in a matrix manner.
On an upper surface of the first substrate 801, first and second element electrodes 806a and 806b included in cathode electrodes 806 are formed so as to be orthogonal to each other. Moreover, in portions separated by the first and second element electrodes 806a and 806b, conductive films 807 having gaps 808 formed therein are formed. Specifically, by using the first and second element electrodes 806a and 806b and the conductive films 807, the plurality of electron-emitting parts 805 are formed. The conductive film 807 is formed by using, for example, palladium oxide (PdO) or the like and the gap 808 is formed by forming or the like after the conductive film 807 has been deposited.
On a lower surface of the second substrate 802, an anode electrode 809 opposite to the cathode electrodes 806 is formed. On a lower surface of the anode electrode 809, grid-like bank parts 811 are formed. In respective downward opening portions 812 surrounded by the bank parts 811, phosphors 813 are disposed so as to correspond to the electron-emitting parts 805. The phosphors 813 emit fluorescent light of red (R), green (G) and blue (B). In the respective opening portions 812, a red phosphor 813R, a green phosphor 813G and a blue phosphor 813B are disposed in the predetermined pattern described above.
Accordingly, the first and second substrates 801 and 802 thus formed are attached to each other with a minute gap therebetween. In this display device 800, electrons jumping out of the first or second element electrode 806a or 806b, which are cathodes, through the conductive film 807 (the gap 808) are hit against the phosphors 813 formed on the anode electrode 809 that is an anode and are excited to emit light. Thus, color display is enabled.
In this case, similar to the other embodiment, the first and second element electrodes 806a and 806b, the conductive film 807 and the anode electrode 809 can be formed by using the imaging apparatus 1. In addition, the phosphors 813R, 813G and 813B of the respective colors can be formed by using the imaging apparatus 1.
The first and second element electrodes 806a and 806b and the conductive film 807 have planar shapes shown in
Moreover, as other electrooptic devices, devices for forming a metallic wiring, a lens, a resist, a light diffusion body and the like are conceivable. As described above, various function liquids may be introduced into the imaging apparatus 1. By using the foregoing imaging apparatus 1 for manufacturing various electrooptic devices, the function liquid supply pressure in the liquid droplet ejection heads can be maintained constant and the function liquid can be supplied surely to the liquid droplet ejection heads. In addition, it is possible to confirm in advance that all the ejection nozzles are normal. Thus, various devices can be manufactured efficiently without producing defectives.
As is apparent from the above description, according to this invention, only when the ejection of liquid droplets from the same ejection nozzle is determined to be abnormal twice in succession, the ejection nozzle is determined to be abnormal. Thus, the erroneous determination, in which the normal ejection nozzles are determined to be abnormal, can be prevented as much as possible. Furthermore, the ejection nozzle determined to be abnormal is restored by the maintenance operation. Thus, the imaging operation can be efficiently performed by using all the ejection nozzles and the productivity is improved.
By using the imaging apparatus, the electrooptic device, the method of manufacturing the electrooptic device and the electronic equipment according to this invention, reliability of the devices can be enhanced.
The entire disclosure of Japanese Patent Application Nos. 2002-328795 filed Nov. 12, 2002 and 2003-204393 filed Jul. 31, 2003 are incorporated by reference.
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