Provided are azeotrope-like compositions comprising iodine heptafluoride and hydrogen fluoride and uses thereof, including methods for separating iodine heptafluoride or hydrogen fluoride from a mixture comprising iodine heptafluoride and hydrogen fluoride by removing an azeotrope-like composition of the present invention therefrom.

Patent
   7141094
Priority
Nov 05 2003
Filed
Nov 05 2003
Issued
Nov 28 2006
Expiry
May 25 2025
Extension
567 days
Assg.orig
Entity
Large
0
8
EXPIRED
1. An azeotrope-like composition comprising iodine heptafluoride (IF7) and hydrogen fluoride (hf).
8. A method for producing an azeotrope-like composition comprising combining IF7 and hf in amounts effective to produce an azeotrope-like composition.
10. A method of producing a product enriched in IF7 or hf from a mixture comprising IF7 and hf comprising:
providing a mixture comprising IF7 and hf wherein one of the IF7 or hf components is present in an amount less than the azeotropic amount; and
removing an azeotrope-like composition from the mixture to produce a product enriched in the other of the IF7 or hf components.
17. A method for removing a compound selected from the group consisting of hf, IF7, and combinations thereof from a mixture, said method comprising:
providing a mixture comprising a compound selected from the group consisting of hf, IF7, and combinations thereof;
adding an amount of hf or IF7 to said provided mixture effective to form an azeotrope-like composition of the present invention; and
distilling said mixture to remove said azeotrope-like composition.
2. An azeotrope-like composition according to claim 1 comprising from about 1 to about 28 weight percent hf and from about 72 to about 99 weight percent IF7, based on the total weight of hf and IF7.
3. An azeotrope-like composition according to claim 2 comprising from about 2 to about 24 weight percent hf and from about 76 to about 98 weight percent IF7.
4. An azeotrope-like composition according to claim 3 comprising from about 4 to about 20 weight percent hf and from about 80 to about 96 weight percent IF7.
5. An azeotrope-like composition according to claim 1 comprising about 10 weight percent hf and about 90 weight percent IF7.
6. An azeotrope-like composition of claim 5 having a boiling point of about 28° C. at about 53 psia.
7. An azeotrope-like composition of claim 1 having a boiling point of from about 5° C. to about 50° C. at a pressure of from about 18 psia to about 125 psia.
9. The method of claim 8 comprising mixing from about 1 to about 28 weight percent hf and from about 72 to about 99 weight percent IF7, the weight percents being based on the total weight of hf and IF7.
11. The method of claim 10 wherein the provided mixture comprises hf in an amount less than the azeotropic amount and an azeotrope-like composition is removed to produce a product enriched in IF7.
12. The method of claim 11 wherein said provided mixture comprises hf in an amount of less than about 10 weight percent, based on the total amount of hf and IF7 in the provided mixture.
13. The method of claim 11 wherein said azeotrope-like composition is distilled from said provided mixture.
14. The method of claim 10 wherein the provided mixture comprises IF7 in an amount less than the azeotropic amount and an azeotrope-like composition is removed to produce a product enriched in hf.
15. The method of claim 14 wherein said provided mixture comprises IF7 in an amount of less than about 90 weight percent, based on the total amount of hf and IF7 in the provided mixture.
16. The method of claim 14 wherein said azeotrope-like composition is distilled from said provided mixture.

The present invention provides azeotrope-like compositions of iodine heptafluoride and hydrogen fluoride, fluorinating agents comprising such azeotrope-like compositions, and methods of producing relatively pure iodine heptafluoride and/or relatively pure hydrogen fluoride by removing the present azeotrope-like compositions from a mixture of iodine heptafluoride and hydrogen fluoride.

Iodine fluorides, compounds consisting of iodine and fluorine, have found widespread use in a variety of applications. For example, iodine heptafluoride (“IF7”) and iodine pentafluoride (“IF5”) have been used as fluorinating agents, compositions capable of providing reactive fluoride ions to compounds to be fluorinated, in numerous applications. The difference in fluorinating activity between IF7 and IF5 (IF7 tends to be a more active fluorinating agent than IF5) offers some versatility in the ability to select one of such fluorinating agents over the other for a given use, depending on the strength of fluorinating activity required. Nevertheless, applicants have recognized that other compositions, including compound mixtures comprising iodine fluorides, are desirable as alternatives for IF7 or IF5, for example, in applications requiring fluorinating agents of varying strengths.

FIG. 1 is a graphical depiction of a boiling point curve for compositions comprising IF7 and hydrogen fluoride.

The present inventors have developed several compositions that help to satisfy the continuing need for alternatives to iodine heptafluoride (“IF7”) and iodine pentafluoride (“IF5”) in a variety of applications, including use as alternative fluorinating agents. In one embodiment, the present invention provides azeotrope-like compositions comprising IF7 and hydrogen fluoride (“HF”) suitable for use in a variety of applications, including as fluorinating agents.

Applicants have recognized surprisingly that IF7 and HF can be mixed to form the azeotrope-like compositions of the present invention. Accordingly, in another embodiment, the present invention provides methods for producing an azeotrope-like composition comprising combining IF7 and HF in amounts effective to produce an azeotrope-like composition.

Applicants have further discovered that the azeotrope-like compositions of the present invention are useful in the production of relatively pure IF7 or HF from mixtures comprising IF7 and HF. Both IF7 and HF find use individually in a variety of applications, many of which require the use of IF7 and/or HF having a relatively high purity. For example, the use of high purity IF7 in the manufacture of semiconductors is disclosed in U.S. Pat. No. 5,362,350, which patent is incorporated herein by reference. While commercial methods of preparing IF7 tend to produce product mixtures further comprising HF, which tends to be difficult to remove from the IF7 product mixtures, applicants have recognized that the azeotrope-like compositions of the present invention can be used advantageously in methods for removing HF from a mixture comprising IF7 and HF to produce a product enriched in IF7.

Accordingly, in another embodiment, the present invention provides methods of producing a product enriched in IF7 from a mixture comprising IF7 and HF, the method comprising: providing a mixture comprising IF7 and HF in an amount less than the azeotropic amount and removing an azeotrope-like composition of the present invention from the mixture to produce a product enriched in IF7. As used herein, the term “enriched” refers to a composition produced according to the present methods in which the concentration of either the IF7 or HF component is higher relative to its concentration in the provided mixture. A product enriched in IF7 will have a higher concentration of IF7 relative to the IF7 concentration in the provided mixture from which it is produced according to the present methods, while a product enriched in HF will have a concentration of HF higher than the provided mixture. The term “azeotropic amount” refers to the amount of IF7 or HF component in a provided mixture of IF7 and HF necessary to make an azeotropic mixture with substantially all of the other HF or IF7 component in the mixture.

In yet another embodiment, the present invention provides methods of producing a product enriched in HF from a mixture comprising IF7 and HF, the method comprising: providing a mixture comprising HF and IF7 in an amount less than the amount necessary to form an azeotrope with all of the HF present in the mixture; and removing an azeotrope-like composition of the present invention from the mixture to produce a product enriched in HF.

Azeotrope-Like Compositions

As used herein, the term “azeotrope-like” is intended in its broad sense to include both compositions that are strictly azeotropic and compositions that behave like azeotropic mixtures. From fundamental principles, the thermodynamic state of a fluid is defined by pressure, temperature, liquid composition, and vapor composition. An azeotropic mixture is a system of two or more components in which the liquid composition and vapor composition are equal at the stated pressure and temperature. In practice, this means that the components of an azeotropic mixture are constant-boiling and cannot be separated during a phase change.

The azeotrope-like compositions of the invention may include additional components that do not form new azeotrope-like systems, or additional components that are not in the first distillation cut. The first distillation cut is the first cut taken after the distillation column displays steady state operation under total reflux conditions. One way to determine whether the addition of a component forms a new azeotrope-like system so as to be outside of this invention is to distill a sample of the composition with the component under conditions that would be expected to separate a non-azeotropic mixture into its separate components. If the mixture containing the additional component is non-azeotrope-like, the additional component will fractionate from the azeotrope-like components. If the mixture is azeotrope-like, some finite amount of a first distillation cut will be obtained that contains all of the mixture components that is constant boiling or behaves as a single substance.

It follows from this that another characteristic of azeotrope-like compositions is that there is a range of compositions containing the same components in varying proportions that are azeotrope-like or constant boiling. All such compositions are intended to be covered by the terms “azeotrope-like” and “constant boiling”. As an example, it is well known that at differing pressures, the composition of a given azeotrope will vary at least slightly, as does the boiling point of the composition. Thus, an azeotrope of A and B represents a unique type of relationship, but with a variable composition depending on temperature and/or pressure. It follows that, for azeotrope-like compositions, there is a range of compositions containing the same components in varying proportions that are azeotrope-like. All such compositions are intended to be covered by the term azeotrope-like as used herein.

It is well-recognized in the art that it is not possible to predict the formation of azeotropes. (See, for example, U.S. Pat. No. 5,648,017 (column 3, lines 64–65) and U.S. Pat. No. 5,182,040 (column 3, lines 62–63), both of which are incorporated herein by reference). In addition, it has been specifically reported that iodine pentafluoride (“IF5”) does not form an azeotrope with HF (M. Rogers, J. Speirs, M. Panish, and H. Thompson, Journal of the American Chemical Society, 78, 936 [1956]). Nevertheless, applicants have discovered unexpectedly that IF7 and HF from azeotrope-like compositions.

According to certain preferred embodiments, the azeotrope-like compositions of the present invention comprise, and preferably consist essentially of, from about 1 to about 28 weight percent HF and from about 72 to about 99 weight percent IF7, (unless otherwise specified, weight percents disclosed herein are based on the total weight of HF and IF7). More preferably, the azeotrope-like compositions according to the present invention comprise from about 2 to about 24 weight percent HF and from about 76 to about 98 weight percent IF7, and even more preferably from about 4 to about 20 weight percent HF and from about 80 to about 96 weight percent IF7. A particularly preferred composition, the azeotropic composition, comprises about 10 weight percent HF and about 90 weight percent IF7.

The azeotrope-like compositions described herein preferably have a boiling point of from about 5° C. to about 50° C. at a pressure of from about 18 psia to about 125 psia. In certain particularly preferred embodiments, the composition has a boiling point of about 28° C. at 53 psia.

The azeotrope-like compositions of the present invention can be produced in-situ in a variety of reactions and/or by combining effective amounts of IF7 and HF to form azeotrope-like compositions. The term “effective amounts” as used herein refers to the amount of each component which upon combination with the other component, results in the formation of an azeotrope-like composition of the present invention.

Any of a wide variety of methods known in the art for combining two or more components to form a composition can be adapted for use in the present methods to produce an azeotrope-like composition. For example, IF7 and HF can be mixed, blended, or otherwise contacted by hand and/or by machine, as part of a batch or continuous reaction and/or process, or via combinations of two or more such steps. In light of the disclosure herein, those of skill in the art will be readily able to prepare azeotrope-like compositions according to the present invention without undue experimentation.

Uses of the Compositions

The compositions of the present invention may be used in a wide variety of applications, including as alternative fluorinating agents to IF7 and/or IF5. In addition, the compositions of the present invention are particularly suited for use in producing products enriched in either IF7 or HF from mixtures of IF7 and HF via methods comprising: providing a mixture comprising IF7 and HF wherein one of the IF7 or HF components is present in an amount less than the azeotropic amount; and removing an azeotrope-like composition of the present invention from the mixture to produce a product enriched in the other of the IF7 or HF components.

The mixtures comprising IF7 and HF may be provided from any of a number of sources according to the present invention. For example, mixtures comprising IF7 and HF may be prepared manually or supplied from or in a reactor as a reaction product. In certain preferred embodiments, the provided mixture is a reaction product produced from an IF7-forming reaction. Examples of suitable reaction products to be provided according to the present methods include those produced by the liquid or vapor phase reaction of IF7-precursor compounds with elemental fluorine. The reaction products for use herein may be crude or treated IF7-forming reaction products. As used herein, the term “crude IF7-forming reaction product” refers to a product from an IF7-forming reaction that contains IF7, HF, as well as other unreacted starting materials, reaction intermediates, and/or reaction by-products. The term “treated IF7-forming reaction product”, as used herein, refers to the product of an IF7-forming reaction that has been treated to remove at least a portion of the unreacted starting materials, reaction intermediates, and/or by-products. Those of skill in the art will recognize that any of a wide range of methods for removing such compounds from the reaction product including, for example, distillation, water or caustic scrubbing, drying, combinations thereof, and the like, may be used.

As noted above, the provided mixture comprises IF7 and HF wherein either the IF7 or HF is present in less than the azeotropic amount. In embodiments wherein a product enriched in IF7 is desired, the provided mixture comprises an amount of HF less than the azeotropic amount. In embodiments wherein a product enriched in HF is desired, the provided mixture comprises an amount of IF7 less than the azeotropic amount. In certain preferred embodiments wherein a product enriched in IF7 is desired, the amount of HF present in the provided mixture is less than about 10 weight percent HF, preferably less than about 7 weight percent, and even more preferably less than about 4 weight percent, the weight percent being based on the total weight of IF7 and HF in the mixture. In certain preferred embodiments wherein a product enriched in HF is desired, the amount of IF7 present in the provided mixture is less than about 90 weight percent, preferably less than about 70 weight percent, and even more preferably less than about 50 weight percent, the weight percent being based on the total weight of IF7 and HF in the mixture.

Any of a wide range of methods for removing an azeotrope-like composition of the present invention from the provided mixture are suitable for use herein. Examples of suitable methods for removing an azeotrope-like composition include distillation, extraction, phase separation, combinations of two or more thereof, and the like. In certain preferred embodiments, the azeotrope-like composition is removed via distillation.

Any of a wide range of conventional distillation methods and distillation apparatus may be used in the methods of the present invention. Examples of suitable distillation methods include single or multi-stage distillations performed as either continuous or batch operations. Examples of suitable apparatus include, columns with trays, packed columns, combinations of two or more thereof, and the like.

The conditions under which distillation is carried out is readily determinable by one of skill in the art, based on the disclosure herein. In preferred embodiments, the distillation may be carried out at pressures of up to about 200 psi. In certain more preferred embodiments, distillation is carried out at a pressure of from about 5 to about 150 psi.

In light of the disclosure herein, those of skill in the art will be readily able to produce a product enriched in either IF7 or HF from a mixture comprising IF7 and HF without undue experimentation.

According to other preferred embodiments, the present invention provides methods for removing HF and/or IF7 from a mixture comprising a desired compound in addition to HF, IF7, or a combination of the two. The preferred methods comprise providing a mixture comprising a compound selected from the group consisting of HF, IF7, and combinations thereof; adding an amount of HF or IF7 to said provided mixture effective to form an azeotrope-like composition of the present invention, and distilling said mixture to remove said azeotrope-like composition.

The mixtures of the present methods may be provided in any manner disclosed herein above. In certain preferred embodiments, the provided mixture is a reaction product containing a reaction target compound, as well as, HF and/or IF7. For example, in certain preferred embodiments, the provided mixture is a reaction product of an IF5-forming reaction. By using the methods of the present invention, HF and/or IF7 impurities can be effectively removed from a desired IF5 (or other) reaction product.

The step of adding HF or IF7 to the provided mixture and the removal step may be conducted according to the disclosure hereinabove and according to methods known in the art. In light of the disclosure herein, those of skill in the art will be readily able to remove HF and/or IF7 from a provided mixture according to the present methods without undue experimentation.

Crude iodine heptafluoride (714 g) and HF (50 g) are mixed at about 19° C. to give a pressure of about 35 psia. This pressure is higher than either of the two components, thus demonstrating existence of an azeotrope.

Crude iodine heptafluoride (711 g) and HF (48 g) are mixed at about 20.3° C. to give a pressure of about 35.7 psia. This pressure is higher than either of the two components, thus demonstrating existence of an azeotrope.

A mixture comprising iodine heptafluoride (278 g), a small amount of HF, and 851 grams of a mixture (approximately 25% iodine heptafluoride and 75% iodine pentafluoride) was distilled. The temperature and vapor pressure during distillation were measured and the composition of the distilled vapor phase was determined by Fourier transform infrared spectroscopy. The constant azeotropic or azeotrope-like composition of the overhead stream was about 10 wt % HF and about 90 wt % iodine heptafluoride. The boiling point of this azeotropic composition is plotted, along with the boiling points of HF (about 60° C.) and iodine heptafluoride (about 34° C.) at about 53 psia in FIG. 1. From this figure it is observed that the boiling point of the distilled HF-IF7 mixture is lower than the boiling point of each individual component.

Singh, Rajiv R., Luly, Matthew H., Cook, George R.

Patent Priority Assignee Title
Patent Priority Assignee Title
3928821,
5182040, Mar 28 1991 E. I. du Pont de Nemours and Company; E I DU PONT DE NEMOURS AND COMPANY Azeotropic and azeotrope-like compositions of 1,1,2,2-tetrafluoroethane
5362350, Nov 24 1992 Sony Corporation Method for etching in dry process
5648017, Mar 28 1991 E. I. du Pont de Nemours and Company Azeotropic and azeotrope-like compositions of 1,1,2,2-tetrafluoroethane and (iso) butane
6147006, Jan 12 1999 Central Glass Company, Limited Cleaning gas
6749717, Feb 04 1997 Micron Technology, Inc. Device for in-situ cleaning of an inductively-coupled plasma chambers
WO2098529,
WO2005044726,
////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 10 2003LULY, MATTHEW H Honeywell International IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0146820566 pdf
Oct 10 2003COOK, GEORGE R Honeywell International IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0146820566 pdf
Oct 10 2003SINGH, RAJIV R Honeywell International IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0146820566 pdf
Nov 05 2003Honeywell International Inc.(assignment on the face of the patent)
Date Maintenance Fee Events
Jul 05 2010REM: Maintenance Fee Reminder Mailed.
Nov 28 2010EXP: Patent Expired for Failure to Pay Maintenance Fees.


Date Maintenance Schedule
Nov 28 20094 years fee payment window open
May 28 20106 months grace period start (w surcharge)
Nov 28 2010patent expiry (for year 4)
Nov 28 20122 years to revive unintentionally abandoned end. (for year 4)
Nov 28 20138 years fee payment window open
May 28 20146 months grace period start (w surcharge)
Nov 28 2014patent expiry (for year 8)
Nov 28 20162 years to revive unintentionally abandoned end. (for year 8)
Nov 28 201712 years fee payment window open
May 28 20186 months grace period start (w surcharge)
Nov 28 2018patent expiry (for year 12)
Nov 28 20202 years to revive unintentionally abandoned end. (for year 12)