A solid-state imaging device is provided with a plurality of photoelectric converting portions each having a photosensitive region and an electric potential gradient forming region, and which are juxtaposed so as to be along a direction intersecting with a predetermined direction, a plurality of buffer gate portions each arranged corresponding to a photoelectric converting portion and on the side of the other short side forming a planar shape of the photosensitive region, and accumulates a charge generated in the photosensitive region of the corresponding photoelectric converting portion, and a shift register which acquires charges respectively transferred from the plurality of buffer gate portions, and transfers the charges in the direction intersecting with the predetermined direction, to output the charges. The buffer gate portion has at least two gate electrodes to which predetermined electric potentials are respectively applied so as to increase potential toward the predetermined direction.
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2. A solid-state imaging device comprising:
a plurality of photoelectric converting portions, each having a photosensitive region which generates a charge according to incidence of light, and which has a planar shape of a nearly rectangular shape formed by two long sides and two short sides, and an electric potential gradient forming region which forms an electric potential gradient increasing along a predetermined direction parallel to the long sides forming the planar shape of the photosensitive region with respect to the photosensitive region, the plurality of photoelectric converting portions being juxtaposed along a direction intersecting with the predetermined direction;
a plurality of charge accumulating portions, each being arranged corresponding to the photoelectric converting portion and on the side of the other short side forming the planar shape of the photosensitive region, and each accumulating a charge generated in the photosensitive region of the corresponding photoelectric converting portion; and
a charge output portion which acquires charges respectively transferred from the plurality of charge accumulating portions, and transfers the charges in the direction intersecting with the predetermined direction, to output the charges, wherein
the charge accumulating portion has a first gate electrode and a second gate electrode that are arranged along the predetermined direction, and
a first predetermined electric potential is applied to the first gate electrode and a second predetermined electric potential different from the first predetermined electric potential is applied to the second gate electrode such that the potential is increasing in the predetermined direction.
1. A solid-state imaging device comprising:
a plurality of photoelectric converting portions, each having a photosensitive region which generates a charge according to incidence of light, and which has a planar shape of a nearly rectangular shape formed by two long sides and two short sides, and an electric potential gradient forming region which forms an electric potential gradient increasing along a predetermined direction parallel to the long sides forming the planar shape of the photosensitive region with respect to the photosensitive region, the plurality of photoelectric converting portions being juxtaposed along a direction intersecting with the predetermined direction;
a plurality of charge accumulating portions, each being arranged corresponding to the photoelectric converting portion and on the side of the other short side forming the planar shape of the photosensitive region, and each accumulating a charge generated in the photosensitive region of the corresponding photoelectric converting portion; and
a charge output portion which acquires charges respectively transferred from the plurality of charge accumulating portions, and transfers the charges in the direction intersecting with the predetermined direction, to output the charges,
wherein the charge accumulating portion has a first gate electrode and a second gate electrode that are arranged along the predetermined direction, and
wherein a first predetermined electric potential is applied to the first gate electrode and a second predetermined electric potential different from the first predetermined electric potential is applied to the second gate electrode so as to increase potential toward the predetermined direction.
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The present invention relates to a solid-state imaging device.
There is disclosed a solid-state imaging device which includes a plurality of photoelectric converting portions, each having a photosensitive region which generates a charge according to incidence of light, and which has a planar shape of a nearly rectangular shape formed by two long sides and two short sides, and an electric potential gradient forming region which forms an electric potential gradient increasing along a predetermined direction parallel to the long sides forming the planar shape of the photosensitive region with respect to the photosensitive region, the plurality of photoelectric converting portions being juxtaposed along a direction intersecting with the predetermined direction, and a plurality of charge accumulating portions, each being arranged corresponding to the photoelectric converting portion and on the side of the other short side forming the planar shape of the photosensitive region, and each accumulating a charge generated in the photosensitive region of the corresponding photoelectric converting portion (for example, refer to Patent Literature 1). The solid-state imaging device of this type has been used heretofore in various uses, and has been commonly used, particularly, as a light detecting means of a spectroscope.
Meanwhile, in recent years, the improvement of dynamic range and a reduction in diagnostic time are required to be both satisfied for solid-state imaging devices particularly intended for medical purposes such as an SD-OCT (Spectral Domain Optical Coherence Tomography). It is possible to expand a dynamic range by increasing a saturated charge quantity in each charge accumulating portion. It is possible to reduce a diagnostic time by speeding up a line rate.
However, an increase in saturated charge quantity and speeding-up of a line rate are in a so-called “trade-off” relationship. That is, for attempting to expand a photosensitive region to increase a charge to be generated in order to increase a saturated charge quantity, it is necessary to expand an area of a charge accumulating portion in which a charge discharged from the photosensitive region is accumulated. In the case where the area of the charge accumulating portion is expanded, because the length in a direction intersecting with the predetermined direction is restricted by a pixel pitch, it is necessary to elongate the length in the predetermined direction. When the charge accumulating portion is elongated in the predetermined direction, it takes time for charge transfer in the charge accumulating portion, which results in a reduction in the line rate.
The present invention has been achieved in consideration of the above-described point, and an object of the present invention is to provide a solid-state imaging device capable of increasing a saturated charge quantity without sacrificing a line rate.
A solid-state imaging device according to the present invention includes a plurality of photoelectric converting portions, each having a photosensitive region which generates a charge according to incidence of light, and which has a planar shape of a nearly rectangular shape formed by two long sides and two short sides, and an electric potential gradient forming region which forms an electric potential gradient increasing along a predetermined direction parallel to the long sides forming the planar shape of the photosensitive region with respect to the photosensitive region, the plurality of photoelectric converting portions being juxtaposed along a direction intersecting with the predetermined direction, a plurality of charge accumulating portions, each being arranged corresponding to the photoelectric converting portion and on the side of the other short side forming the planar shape of the photosensitive region, and each accumulating a charge generated in the photosensitive region of the corresponding photoelectric converting portion, and a charge output portion which acquires charges respectively transferred from the plurality of charge accumulating portions, and transfers the charges in the direction intersecting with the predetermined direction, to output the charges, the solid-state imaging device in which the charge accumulating portion has at least two gate electrodes which are arranged along the predetermined direction, and to which predetermined electric potentials are respectively applied so as to increase potential toward the predetermined direction.
In the solid-state imaging device according to the present invention, a potential difference increasing toward the predetermined direction is generated in each charge accumulating portion. Thus the charge is dominated by the potential difference to migrate, so as to speed up a charge transfer speed in the charge accumulating portion. Therefore, even if the length in the predetermined direction of the charge accumulating portion is set to be longer in order to increase a saturated charge quantity, a charge transfer time in the charge accumulating portion is inhibited from elongating. As a result, it is possible to prevent a reduction in line rate.
A solid-state imaging device according to the present invention includes a plurality of photoelectric converting portions, each having a photosensitive region which generates a charge according to incidence of light, and which has a planar shape of a nearly rectangular shape formed by two long sides and two short sides, and an electric potential gradient forming region which forms an electric potential gradient increasing along a predetermined direction parallel to the long sides forming the planar shape of the photosensitive region with respect to the photosensitive region, the plurality of photoelectric converting portions being juxtaposed along a direction intersecting with the predetermined direction, a plurality of charge accumulating portions, each being arranged corresponding to the photoelectric converting portion and on the side of the other short side forming the planar shape of the photosensitive region, and each accumulating a charge generated in the photosensitive region of the corresponding photoelectric converting portion, and a charge output portion which acquires charges respectively transferred from the plurality of charge accumulating portions, and transfers the charges in the direction intersecting with the predetermined direction, to output the charges, the solid-state imaging device in which the charge accumulating portion has at least two gate electrodes which are arranged along the predetermined direction, and to which predetermined electric potentials increasing in the predetermined direction are respectively applied.
In the solid-state imaging device according to the present invention, because the predetermined electric potentials increasing toward the predetermined direction are respectively applied to at least the two gate electrodes of the charge accumulating portion, a potential difference increasing toward the predetermined direction is generated in each charge accumulating portion. Thus the charge is dominated by the potential difference to migrate, so as to speed up a charge transfer speed in the charge accumulating portion. Therefore, even if the length in the predetermined direction of the charge accumulating portion is set to be longer in order to increase a saturated charge quantity, a charge transfer time in the charge accumulating portion is inhibited from elongating. As a result, it is possible to prevent a reduction in line rate.
In accordance with the present invention, it is possible to provide the solid-state imaging device capable of increasing a saturated charge quantity without sacrificing a line rate.
The preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In the description, the same elements or elements with the same function will be denoted by the same reference signs, omitting overlapping description.
The solid-state imaging device 1 according to the present embodiment is, as shown in
Each photoelectric converting portion 3 has a photosensitive region 15 and an electric potential gradient forming region 17. The photosensitive region 15 senses incidence of light to generate a charge according to an intensity of incident light. The electric potential gradient forming region 17 forms an electric potential gradient increasing along a first direction (direction along the long side direction of the photosensitive region 15) directed from one short side to the other short side forming a planar shape of the photosensitive region 15, with respect to the photosensitive region 15. The electric potential gradient forming region 17 discharges a charge generated in the photosensitive region 15, from the other short side of the photosensitive region 15.
The planar shape of the photosensitive region 15 is a nearly rectangular shape formed by two long sides and two short sides. The plurality of photoelectric converting portions 3 are juxtaposed along a direction intersecting with the first direction (e.g., perpendicular thereto) and are arranged in an array form in a one-dimensional direction. The plurality of photoelectric converting portions 3 are juxtaposed in a direction along the short side direction of the photosensitive region 15. In the present embodiment, the length in the long side direction of the photosensitive region 15 is set, for example, to about 1 mm, and the length in the short side direction of the photosensitive region 15 is set, for example, to about 24 μm.
Each buffer gate portion 5 is arranged corresponding to a photoelectric converting portion 3 and on the side of the other short side forming the planar shape of the photosensitive region 15. That is, the plurality of buffer gate portions 5 are juxtaposed in the direction intersecting with the first direction (or in a direction along the short side direction of the photosensitive region 15), on the side of the other short side forming the planar shape of the photosensitive region 15. The buffer gate portion 5 is interposed between the photoelectric converting portion 3 (photosensitive region 15) and the transfer portion 7. In the present embodiment, a charge discharged from the photosensitive region 15 by the electric potential gradient forming region 17 is accumulated in the buffer gate portion 5. An isolation region 18 is arranged between adjacent buffer gate portions 5, to realize electrical isolation between the buffer gate portions 5.
Each buffer gate portion 5 in the present embodiment is composed of a first buffer gate portion 5a and a second buffer gate portion 5b. In the buffer gate portion 5, the first buffer gate portion 5a is arranged adjacent in the first direction to the photosensitive region 15, and further, the second buffer gate portion 5b is arranged adjacent in the first direction to the first buffer gate portion 5a. The length in the first direction of the buffer gate portion 5 in which the first buffer gate portion 5a and the second buffer gate portion 5b are put together is set, for example, to about 32 μm.
The first buffer gate portion 5a and the second buffer gate portion 5b are respectively composed of gate electrodes (an electrode 53 and an electrode 54 which will be described later) to which different voltages are applied, and semiconductor regions (an n-type semiconductor layer 33 and an n-type semiconductor layer 34 which will be described later) which are formed below the gate electrodes. During a charge transfer, the voltages are applied to the first buffer gate portion 5a and the second buffer gate portion 5b such that the voltage applied to the gate electrode of the first buffer gate portion 5a is lower than the voltages applied to the gate electrode of the second buffer gate portion 5b. In the present embodiment, the impurity concentrations of the semiconductor regions of the first buffer gate portion 5a and the second buffer gate portion 5b are the same. The voltage applied to the gate electrode of the first buffer gate portion 5a is applied so as to be lower by, for example, about 1V than the voltage applied to the gate electrode of the second buffer gate portion 5b. As a result, an electric potential (potential) formed below the gate electrode increases in a step-like manner at the boundary phase at which the first buffer gate portion 5a is switched to the second buffer gate portion 5b.
Each transfer portion 7 is arranged corresponding to a buffer gate portion 5 and between the buffer gate portion 5 and the shift register 9. That is, the plurality of transfer portions 7 are juxtaposed in the direction intersecting with the first direction, on the side of the other short side forming the planar shape of the photosensitive region 15. The transfer portion 7 acquires a charge accumulated in the buffer gate portion 5, and transfers the acquired charge toward the shift register 9. The isolation region 18 is arranged between adjacent transfer portions 7 to realize electrical isolation between the transfer portions 7.
The shift register 9 is arranged on the side of the other short side forming the planar shape of the photosensitive region 15. The shift register 9 receives charges respectively transferred from the transfer portions 7, and transfers the charges in the direction intersecting with the first direction, to sequentially output them to an amplifier portion 23. The charges output from the shift register 9 are converted into voltages by the amplifier portion 23, and the amplifier portion 23 outputs the voltages of the respective photoelectric converting portions 3 (photosensitive regions 15) juxtaposed in the direction intersecting with the first direction, to the outside of the solid-state imaging device 1.
The plurality of photoelectric converting portions 3, the plurality of first buffer gate portions 5a, the plurality of second buffer gate portions 5b, the plurality of transfer portions 7, and the shift register 9 are, as shown in
The p-type semiconductor layer 31 and the n-type semiconductor layer 32 form a pn junction, and the n-type semiconductor layer 32 constitutes the photosensitive region 15 which generates a charge with incidence of light. The n-type semiconductor layer 32 has, on a plan view, a nearly rectangular shape formed by two long sides and two short sides. The n-type semiconductor layers 32 are juxtaposed along the direction intersecting with the above-described first direction (i.e., the direction along the long side direction of the n-type semiconductor layer 32 as directed from one short side to the other short side forming the planar shape of the n-type semiconductor layer 32), and are arranged in an array form in a one-dimensional direction. The n-type semiconductor layers 32 are juxtaposed in a direction along the short side direction of the n-type semiconductor layer 32. The aforementioned isolation region may be composed of a p+-type semiconductor layer.
An electrode 51 is arranged for the n-type semiconductor layer 32. The electrode 51 is made of an optically transparent material, e.g., a polysilicon film, and is formed through an insulating layer (not shown) on the n-type semiconductor layer 32. The electrode 51 constitutes the electric potential gradient forming region 17. The electrodes 51 may be formed as continuously extending in the direction intersecting with the first direction so as to stretch across the plurality of n-type semiconductor layers 32 juxtaposed along the direction intersecting with the first direction. The electrode 51 may be formed for each of the n-type semiconductor layers 32.
The electrode 51 constitutes a so-called resistive gate, and is formed so as to extend in the direction (the aforementioned first direction) directed from one short side to the other short side forming the planar shape of the n-type semiconductor layer 32. The electrode 51 is given a constant electric potential difference at its two ends, to form an electric potential gradient according to an electric resistance component in the first direction of the electrode 51, i.e., an electric potential gradient increasing along the first direction. A signal MGL is supplied to one end of the electrode 51 from a control circuit (not shown), and a signal MGH is supplied to the other end of the electrode 51 from the control circuit (not shown). When the signal MGL is L level and MGH is H level, the electric potential gradient increasing along the above-described first direction is formed in the n-type semiconductor layer 32.
An electrode 53 is arranged adjacent in the first direction to the electrode 51, and further, an electrode 54 is arranged adjacent in the first direction to the electrode 53. The electrode 53 and the electrode 54 are respectively formed through an insulating layer (not shown) on the n-type semiconductor layers 33 and 34. The n-type semiconductor layer 33 is arranged on the side of the other short side forming the planar shape of the n-type semiconductor layer 32, and the n-type semiconductor layer 34 is arranged on the side of the other short side forming the planar shape of the n-type semiconductor layer 33. The electrodes 53 and 54 are comprised of, for example, a polysilicon film. The electrodes 53 and 54 are respectively given signals BG1 and BG2 from the control circuit (not shown). The electrode 53 and the n-type semiconductor layer 33 below the electrode 53 constitute the first buffer gate portion 5a, and the electrode 54 and the n-type semiconductor layer 34 below the electrode 54 constitute the second buffer gate portion 5b.
Transfer electrodes 55 and 56 are arranged adjacent in the first direction to the electrode 54. The transfer electrodes 55 and 56 are respectively formed through an insulating layer (not shown) on the n−-type semiconductor layer 35 and on the n-type semiconductor layer 36. The n−-type semiconductor layer 35 and the n-type semiconductor layer 36 are arranged adjacent in the first direction to the n-type semiconductor layer 34. The transfer electrodes 55 and 56 are comprised of, for example, a polysilicon film. The transfer electrodes 55 and 56 are given a signal TG from the control circuit (not shown). The transfer electrodes 55 and 56 and the n−-type semiconductor layer 35 and the n-type semiconductor layer 36 below the transfer electrodes 55 and 56 constitute the transfer portion 7.
A transfer electrode 57 is arranged adjacent in the first direction to the transfer electrode 56. The transfer electrode 57 is formed through an insulating layer (not shown) on the n−-type semiconductor layer 37 and on the n-type semiconductor layer 38 respectively. The n−-type semiconductor layer 37 and the n-type semiconductor layer 38 are arranged adjacent in the first direction to the n-type semiconductor layer 36. The transfer electrode 57 is comprised of, for example, a polysilicon film. The transfer electrode 57 is given a signal P1H from the control circuit (not shown). The transfer electrode 57 and the n−-type semiconductor layer 37 and n-type semiconductor layer 38 below the transfer electrode 57 constitute the shift register 9.
The p+-type semiconductor layer 40 electrically isolates the n-type semiconductor layers 32, 33, 34, 36 and 38 and the n−-type semiconductor layers 35 and 37 from the other portions of the semiconductor substrate 30. Each of the aforementioned insulating layers is made of an optically transparent material, e.g., a silicon oxide film. The n-type semiconductor layers 33, 34, 36 and 38 and the n−-type semiconductor layers 35 and 37 (the first buffer gate portion 5a, the second buffer gate portion 5b, the transfer portion 7, and the shift register 9) except for the n-type semiconductor layer 32 are preferably shielded from light, for example, by arranging a light shield member. Thereby, it is possible to prevent occurrence of unnecessary charge.
An overflow gate (OFG) 19 is arranged adjacent in the direction intersecting with the first direction to the buffer gate portion 5. An overflow drain (OFD) 20 composed of a gate transistor is arranged adjacent in the direction intersecting with the first direction of the overflow gate 19. With such a configuration, when a charge is generated over a storage capacitance of the buffer gate portion 5 in the buffer gate portion 5, it is possible to discharge an excess charge over the storage capacitance in the direction of B in
Next, the operations in the solid-state imaging device 1 will be described below on the basis of
Incidentally, positively ionized donors exist in an n-type semiconductor and negatively ionized acceptors exist in a p-type semiconductor. The potential in the n-type semiconductor becomes higher than that in the p-type semiconductor. In other words, the potential in an energy band diagram is positive in the downward direction, and therefore, the potential in the n-type semiconductor becomes deeper (or higher) than the potential in the p-type semiconductor in the energy band diagram, and has a lower energy level. When a positive electric potential is applied to each electrode, a potential of a semiconductor region immediately below the electrode becomes deeper (or increases in the positive direction). When the magnitude of the positive electric potential applied to each electrode is reduced, the potential of the semiconductor region immediately below the corresponding electrode becomes shallower (or decreases in the positive direction).
As shown in
At time t2, when the signal TG is H level, the respective potentials Φ35 and Φ36 of the n−-type semiconductor layer 35 and the n-type semiconductor layer 36 deepen to form a well of the potential Φ36. The charges accumulated in the wells of the potentials Φ33 and Φ34 are transferred into the well of the potential Φ36. The charge quantity QL is accumulated in the potential Φ36.
At time t3, when the signal TG is L level, the potentials Φ35 and Φ36 become shallow, thereby forming wells of the potentials Φ33 and Φ34. At time t3, when the signal P1H is H level, the respective potentials Φ37 and Φ38 of the n−-type semiconductor layer 37 and the n-type semiconductor layer 38 deepen to form wells of the potentials Φ37 and Φ38. The charge accumulated in the well of the potential Φ36 is transferred into the well of the potential Φ38. The charge quantity QL is accumulated in the potential Φ38.
After this, the charge in the charge quantity QL is sequentially transferred in the direction intersecting with the first direction during a charge transfer period TP, to be output to the amplifier portion 23. Although omitted from the illustration in
In the present embodiment, as described above, since the predetermined electric potentials increasing toward the charge transfer direction (the above-described first direction) are respectively applied to the electrode 53 and the electrode 54 of the buffer gate portion 5, the potential formed below the electrode 53 and the electrode 54 form a difference increasing in a step-like manner toward the charge transfer direction (the above-described first direction). Thus the charge is dominated by the potential difference to migrate, so as to speed up a charge transfer speed in the buffer gate portion 5. Therefore, even if the length in the above-described first direction of the buffer gate portion 5 is set to be longer in order to increase a saturated charge quantity, a charge transfer time in the buffer gate portion 5 is inhibited from elongating. As a result, it is possible to prevent a reduction in line rate.
Next, the verification result of speeding up the charge readout speed in the buffer gate portion 5 will be described on the basis of
As shown in
On the other hand,
As shown in
In the present embodiment, the charge accumulated in the buffer gate portion 5 is acquired by the transfer portion 7, to be transferred in the first direction. Then the charges transferred from the respective transfer portions 7 are transferred in the direction intersecting with the first direction by the shift register 9, to be output. The charges transferred from the plurality of photoelectric converting portions 3 are acquired by the shift register 9, to be transferred in the direction intersecting with the first direction. Accordingly, the solid-state imaging device 1 does not have to execute further signal processing for obtaining a one-dimensional image. As a result, image processing can be prevented from becoming complicated.
The preferred embodiments of the present invention has been described, but it should be noted that the present invention is by no means intended to be limited to the above-described embodiments, but can be modified in various ways without departing from the scope and spirit of the invention.
For example, in the present embodiment, additionally, an all-reset gate (ARG) 21 and an all-reset drain (ARD) 22 may be juxtaposed. In this case, the all-reset gate 21 and the all-reset drain 22 are, as shown in
In accordance with such a configuration, in the case where the charge in the photosensitive region 15 is reset, the charge generated in the photosensitive region 15 migrates in the direction of G in
In the present embodiment, the buffer gate portion 5 is composed of the first buffer gate portion 5a and the second buffer gate portion 5b in two stages. However, the buffer gate portion 5 may be composed of three or more stages having different electric potentials. In the case where the buffer gate portion 5 is composed of three or more stages as well, it is recommended that the electric potentials increase in a step-like manner along the first direction. In this case as well, a potential difference increasing in a step-like manner toward the charge transfer direction (the above-described first direction) is generated in each buffer gate portion 5. Thus the charge is dominated by the potential difference (electric potential difference) to migrate, so as to speed up a charge transfer speed in the buffer gate portion 5.
The buffer gate portion 5 may be composed of a so-called resistive gate as the electric potential gradient forming region 17 of the photoelectric converting portion 3. In this configuration, the electrodes are given a constant electric potential difference at its two ends, to form an electric potential gradient according to an electric resistance component in the first direction of the electrode, i.e., an electric potential gradient increasing along the first direction. In this case, a potential difference increasing gradually toward the charge transfer direction (the above-described first direction) is generated in each buffer gate portion 5. Thus the charge is dominated by the potential difference (electric potential difference) to migrate, so as to speed up a charge transfer speed in the buffer gate portion 5.
The present invention is applicable to a light detecting means of a spectroscope.
Yoneta, Yasuhito, Suzuki, Hisanori, Muramatsu, Masaharu, Takagi, Shin-ichiro
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