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7734439262002-06-242022-06-24114MATTSON TECHNOLOGY, I…;  BEIJING E-TOWN SEMICO…;  System and process for calibrating pyrometers in thermal processing chambers
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8296091512002-06-242022-06-2419MATTSON TECHNOLOGY, I…;  BEIJING E-TOWN SEMICO…;  System and process for calibrating pyrometers in thermal processing chambers
7957926532002-06-242022-06-2417MATTSON TECHNOLOGY, I…;  BEIJING E-TOWN SEMICO…;  System and process for calibrating pyrometers in thermal processing chambers
5695925611992-07-172012-07-1715E. I. du Pont de Nemours and Company;  Analyte detection by means of an analyte-responsive polymer
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8918303742002-06-242022-06-2413MATTSON TECHNOLOGY, I…;  BEIJING E-TOWN SEMICO…;  System and process for calibrating pyrometers in thermal processing chambers
8620054762010-09-082032-04-1603SOCPRA - SCIENCES SANTE ET HUMAINES, S E C ;  Image reconstruction based on accelerated method using polar symmetries
10190915802002-06-242023-03-2611MATTSON TECHNOLOGY, I…;  BEIJING E-TOWN SEMICO…;  System and process for calibrating pyrometers in thermal processing chambers
11589169832018-12-042039-12-0300Fraunhofer-Gesellschaft zur Foerderung der An…;  MEMS sound transducer
10103551872014-04-242035-10-2011Fraunhofer-Gesellschaft zur Foerderung der An…;  Device for switching a semiconductor-based switch and sensor for detecting a current change velocity at a semiconductor-based switch
10224722912014-04-242035-12-1011Fraunhofer-Gesellschaft zur Foerderung der An…;  Device for switching a semiconductor-based switch and sensor for detecting a current change velocity at a semiconductor-based switch
10101222922014-09-052035-09-0400Fraunhofer-Gesellschaft zur Foerderung der An…;  Piezoelectric position sensor for piezoelectrically driven resonant micromirrors
11293900952017-03-242038-07-0900Fraunhofer-Gesellschaft zur Foerderung der An…;  Method for detecting an analyte based on the detection of a change of the mechanical properties of a freestanding nanoparticle composite material
9121912962009-11-272032-11-1300HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE F…;  Loading state determiner, load assembly, power supply circuit and method for determining a loading state of an electric power source
10218185972014-04-242036-01-1810Fraunhofer-Gesellschaft zur Foerderung der An…;  Device for switching a semiconductor-based switch and sensor for detecting a current change velocity at a semiconductor-based switch
11460557992018-08-162041-05-2200Fraunhofer-Gesellschaft zur Foerderung der An…;  Apparatus and method for TDC sharing in run time-based distance measurements