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patent | score | priority | expiry | expired | references | current assignee | title |
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10381260 | 91 | 2014-11-18 | 2035-11-13 | 0 | 1 | GLOBALWAFERS CO , LTD ; | Method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers |
10381261 | 99 | 2014-11-18 | 2035-11-13 | 0 | 0 | GLOBALWAFERS CO , LTD ; | Method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers |