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9899258442016-09-302036-09-3006Taiwan Semiconductor Manufacturing Company, L…;  Metal liner overhang reduction and manufacturing method thereof
10369238762012-05-312033-05-2900GLOBAL LIFE SCIENCES SOLUTIONS USA LLC;  Method for sterilizing membrane comprising glucose oxidase and associated bio-sensor
11990319762022-01-052042-12-1500Applied Materials, Inc;  Methods and apparatus for processing a substrate
9968696772012-05-312034-05-0300GLOBAL LIFE SCIENCES SOLUTIONS USA LLC;  Method for sterilizing membrane comprising an oxidoreductase enzyme and associated biosensor
10658234862016-07-292036-07-2900TAIWAN SEMICONDUCTOR MANUFACTURING CO , LTD ;  Formation method of interconnection structure of semiconductor device