Patent
   D323173
Priority
Jul 25 1988
Filed
Jan 25 1989
Issued
Jan 14 1992
Expiry
Jan 14 2006
Assg.orig
Entity
unknown
2
3
n/a
The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown and described.

FIG. 1 is a top, front and right side perspective view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is a left side elevational view;

FIG. 3 is a front elevational view, the rear elevational view being a mirror image;

FIG. 4 is a top plan view;

FIG. 5 is a bottom plan view; and

FIG. 6 is a right side elevational view thereof.

Ishii, Katsumi, Katoh, Mitsuo

Patent Priority Assignee Title
D927579, Apr 01 2019 Fanuc Corporation Scanning machine
ER8863,
Patent Priority Assignee Title
3961877, Sep 11 1974 Fluoroware, Inc. Reinforced wafer basket
4041278, May 19 1975 General Electric Company Heating apparatus for temperature gradient zone melting
210208,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jan 25 1989Tel Sagami Limited(assignment on the face of the patent)
Feb 23 1989ISHII, KATSUMITel Sagami LimitedASSIGNMENT OF ASSIGNORS INTEREST 0058950413 pdf
Feb 23 1989KATOH, MITSUOTel Sagami LimitedASSIGNMENT OF ASSIGNORS INTEREST 0058950413 pdf
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