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The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown. |
FIG. 1 is a front elevational view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is an elevational view, the remainder of the cylindrical member being the same throughout in appearance;
FIG. 3 is a top plan view;
FIG. 4 is a bottom plan view;
FIG. 5 is an elevational view thereof;
FIG. 6 is a top perspective view; and,
FIG. 7 is a bottom perspective view thereof.
Ohkase, Wataru, Nakao, Ken, Sato, Seishiro
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jan 25 1989 | Tel Sagami Limited | (assignment on the face of the patent) | / | |||
Feb 23 1989 | NAKAO, KEN | Tel Sagami Limited | ASSIGNMENT OF ASSIGNORS INTEREST | 006036 | /0229 | |
Feb 23 1989 | SATO, SEISHIRO | Tel Sagami Limited | ASSIGNMENT OF ASSIGNORS INTEREST | 006036 | /0229 | |
Feb 23 1989 | OHKASE, WATARU | Tel Sagami Limited | ASSIGNMENT OF ASSIGNORS INTEREST | 006036 | /0229 |
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