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The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described. |
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FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;
FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;
FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;
FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;
FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;
FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;
FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2;
FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2; and,
FIG. 9 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 9--9 of FIG. 2.
Gonzalez, Jose Luis, Jordan, David Bruce, Tudhope, Andrew William
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| Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
| Jan 26 1998 | TUDHOPE, ANDREW WILLIAM | Semiconductor Equipment Technology, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 008919 | /0070 | |
| Jan 26 1998 | JORDAN, DAVID BRUCE | Semiconductor Equipment Technology, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 008919 | /0070 | |
| Jan 26 1998 | GONZALEZ, JOSE LUIS | Semiconductor Equipment Technology, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 008919 | /0070 | |
| Jan 27 1998 | Semiconductor Equipment Technology | (assignment on the face of the patent) | / |
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