Patent
   D406571
Priority
Jun 26 1997
Filed
Dec 24 1997
Issued
Mar 09 1999
Expiry
Mar 09 2013
Assg.orig
Entity
unknown
0
3
n/a
The ornamental design for liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device, as shown and described .

FIG. 1 is a front dlevational view of liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device, showing my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a right side elevational view thereof; the opposite side being a mirror image thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a cross-sectional view thereof, taken along line 6--6 of FIG. 1; and,

FIG. 7 is a front, top and right side perspective view thereof.

Iwasaki, Tatsuya

Patent Priority Assignee Title
Patent Priority Assignee Title
4022231, Apr 30 1975 Enso-Gutzeit Osakeyhtio Chip washer
4208760, Dec 19 1977 GENERAL SIGNAL CORPORATION, A CORP OF N Y Apparatus and method for cleaning wafers
5651797, Aug 07 1995 Quantum Global Technologies LLC Apparatus and method for the immersion cleaning and transport of semiconductor components
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 24 1997Tokyo Electron Limited(assignment on the face of the patent)
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