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I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described. |
FIG. 1 is a front elevational view of an upper electrode for manufacturing semiconductors showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a front elevational view thereof, showing the electrode in an opened state;
FIG. 8 is a rear elevational view thereof, showing the electrode in an opened state;
FIG. 9 is a top plan view thereof, showing the electrode in an opened state;
FIG. 10 is a bottom plan view thereof, showing the electrode in an opened state;
FIG. 11 is a right side elevational view thereof, showing the electrode in an opened state;
FIG. 12 is a left side elevational view thereof, showing the electrode in an opened state; and,
FIG. 13 is a reduced front elevational view thereof, showing the electrode in an opened state, with the broken-line disclosure being for illustrative purposes only and forming no part of the claimed design.
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Jul 28 1997 | Tokyo Electron Limited | (assignment on the face of the patent) | / | |||
Sep 17 1997 | OOYABU, JUN | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 008833 | /0699 |
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