Patent
   D412513
Priority
Jan 29 1997
Filed
Jul 28 1997
Issued
Aug 03 1999
Expiry
Aug 03 2013
Assg.orig
Entity
unknown
14
3
n/a
I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described.

FIG. 1 is a front elevational view of an upper electrode for manufacturing semiconductors showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a front elevational view thereof, showing the electrode in an opened state;

FIG. 8 is a rear elevational view thereof, showing the electrode in an opened state;

FIG. 9 is a top plan view thereof, showing the electrode in an opened state;

FIG. 10 is a bottom plan view thereof, showing the electrode in an opened state;

FIG. 11 is a right side elevational view thereof, showing the electrode in an opened state;

FIG. 12 is a left side elevational view thereof, showing the electrode in an opened state; and,

FIG. 13 is a reduced front elevational view thereof, showing the electrode in an opened state, with the broken-line disclosure being for illustrative purposes only and forming no part of the claimed design.

Ooyabu, Jun

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 28 1997Tokyo Electron Limited(assignment on the face of the patent)
Sep 17 1997OOYABU, JUNTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0088330699 pdf
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