Patent
   D424023
Priority
Jan 31 1997
Filed
Jul 24 1997
Issued
May 02 2000
Expiry
May 02 2014
Assg.orig
Entity
unknown
0
2
n/a
The ornamental design for a quartz combustion chamber, as shown.

FIG. 1 a perspective view of a quartz combustion chamber.

FIG. 2 a left side view thereof.

FIG. 3 a front elevational view thereof, the rear elevational view being a mirror image of the front view.

FIG. 4 a right side view thereof.

FIG. 5 a top plan view thereof.

FIG. 6 a bottom plan view thereof.

FIG. 7 a cross sectional view thereof taken along line 7--7 in FIG. 3; and,

FIG. 8 a cross sectional view thereof taken along line 8--8 in FIG. 5.

Akimoto, Kazuo

Patent Priority Assignee Title
Patent Priority Assignee Title
5303671, Feb 07 1992 Tokyo Electron Limited System for continuously washing and film-forming a semiconductor wafer
5584934, Oct 13 1995 United Microelectronics Corp. Method and apparatus for preventing distortion of horizontal quartz tube caused by high temperature
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Jul 24 1997Tokyo Electron Limited(assignment on the face of the patent)
Nov 04 1997AKIMOTO, KAZUOTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0088310401 pdf
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