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The ornamental design for a hinge unit for vacuum-processing a semiconductor wafer, as shown. |
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FIG. 1 is a front elevational view of hinge unit for vacuum-processing a semiconductor wafer, showing my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a rear elevational view thereof; and,
FIG. 6 is a left side elevational view thereof.
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| Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
| Apr 10 1998 | MIZUKAMI, MASAMI | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009135 | /0533 | |
| Apr 21 1998 | Tokyo Electron Limited | (assignment on the face of the patent) | / |
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