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Patent
   D450070
Priority
Jul 13 1998
Filed
Jul 13 1998
Issued
Nov 06 2001
Expiry
Nov 06 2015
Inventors
Forster, J…
Assg.orig
Applied Ma…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
2
References
27
Maint.:
n/a
The design for sputtering chamber coil, as shown and described.

FIG. 1 is a front elevational view;

FIG. 2 is a top view;

FIG. 3 is a right side elevational view;

FIG. 4 is a bottom view; and,

FIG. 5 is a rear elevational view of our sputtering chamber coil.

The left side elevation view (not shown) is the same as the right side elevational view (FIG. 3) because of coil symmetry.
INVENTORS:

Forster, John C., Gopalraja, Praburam, Xu, Zheng, Rosenstein, Michael

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
6660134, Jul 10 1998 Applied Materials, Inc Feedthrough overlap coil
D804981, Jan 26 2015 Maag Automatik GmbH Curved filter screen
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 13 1998Applied Materials, Inc.(assignment on the face of the patent)
Jul 21 1998GOPALRAJA, PRABURAMApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0096160662 pdf
Jul 21 1998ROSENSTEIN, MICHAELApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0096160662 pdf
Jul 22 1998XU, ZHENGApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0096160662 pdf
Jul 23 1998FORSTER, JOHN C Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0096160662 pdf
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