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The ornamental design for a vacuum processing equipment configuration, as shown and described.
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FIG. 1 is front, top and left side perspective view of cassettes storage eguipment in relation to a conveyor equipped robot and load and unload chambers showing our new design;
FIG. 2 is a top plan view;
FIG. 3 is a front side elevational view;
FIG. 4 is a right side elevational view;
FIG. 5 is a rear side elevational view;
FIG. 6 is a left side elevational view;
FIG. 7 is a bottom plan view; and,
FIG. 8 is a right side elevational view along line 8--8 of FIG. 2.
The details shown in broken lines in all views is for illustrative purposes only and form no part of the claimed design.
Kato, Shigekazu, Nishihata, Kouji, Tsubone, Tsunehiko, Itou, Atsushi
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| Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
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| Oct 29 2001 | KATO, SHIGEKAZU | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 012301 | /0459 | |
| Oct 29 2001 | NISHIHATA, KOUJI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 012301 | /0459 | |
| Oct 29 2001 | TSUBONE, TSUNEHIKO | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 012301 | /0459 | |
| Oct 29 2001 | ITOU, ATSUSHI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 012301 | /0459 |
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