Patent
   D473354
Priority
Aug 29 1990
Filed
Jan 12 1999
Issued
Apr 15 2003
Expiry
Apr 15 2017
Assg.orig
Entity
unknown
10
66
n/a
The ornamental design for a vacuum processing equipment configuration, as shown and described.

FIG. 1 is front, top and right side perspective view of cassettes storage eguipment in relation to a conveyor equipped robot and load and unload chambers showing our new design;

FIG. 2 is a top plan view;

FIG. 3 is a front side elevational view;

FIG. 4 is a right side elevational view;

FIG. 5 is a rear side elevational view;

FIG. 6 is a left side elevational view;

FIG. 7 is a bottom plan view; and,

FIG. 8 is a right side elevational view along line 8--8 of FIG. 2.

The details shown in broken lines in all views is for illustrative purposes only and form no part of the claimed design.

Kato, Shigekazu, Nishihata, Kouji, Tsubone, Tsunehiko, Itou, Atsushi

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jan 12 1999Hitachi, Ltd.(assignment on the face of the patent)
Oct 29 2001KATO, SHIGEKAZUHitachi, LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0123010444 pdf
Oct 29 2001NISHIHATA, KOUJIHitachi, LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0123010444 pdf
Oct 29 2001TSUBONE, TSUNEHIKOHitachi, LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0123010444 pdf
Oct 29 2001ITOU, ATSUSHIHitachi, LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0123010444 pdf
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