Patent
   D589472
Priority
Oct 10 2006
Filed
Apr 10 2007
Issued
Mar 31 2009
Expiry
Mar 31 2023
Assg.orig
Entity
unknown
6
17
n/a
The ornamental design for a processing chamber for manufacturing semiconductors or the like, as shown and described.

FIG. 1 is a top and right front perspective view of a processing chamber for manufacturing semiconductors or the like, showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image of the side view shown;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a cross-sectional view thereof taken in the direction of the arrows on line 77 of FIG. 2; and,

FIG. 8 is a top and right front perspective view thereof in the state of use.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Li, Yicheng

Patent Priority Assignee Title
10208884, Jan 30 2014 DRAINGARDE, INC Watershed protection device and system
D768843, Nov 28 2014 DRAINGARDE INC Catch basin cover
D784937, Nov 13 2014 Tokyo Electron Limited Dummy wafer
D785576, Nov 13 2014 Tokyo Electron Limited Dummy wafer
D786810, Nov 13 2014 Tokyo Electron Limited Dummy wafer
D792962, Nov 28 2014 DRAINGARDE INC. Catch basin cover
Patent Priority Assignee Title
4340462, Feb 13 1981 LAM RESEARCH CORPORATION A CORP OF DELAWARE Adjustable electrode plasma processing chamber
4538301, Dec 31 1981 Dierk, Filmer Protective device
6852168, Jun 24 2000 WONIK IPS CO , LTD Reactor for depositing thin film on wafer
6884297, Mar 31 2003 WONIK IPS CO , LTD Thin film deposition reactor
6924464, Nov 24 2000 IBIDEN CO , LTD Ceramic heater and manufacturing method of ceramic heater
7147719, Jul 03 1998 Applied Materials, Inc. Double slit-valve doors for plasma processing
7207151, Apr 24 2000 CertainTeed Ceilings Corporation Structural panel with compressible dividers
20050133158,
20050229849,
20070205792,
20080121620,
117375,
210925,
228882,
D407405, Apr 16 1998 Yeun Yah Industrial Co., Ltd. Speaker
D496204, Mar 27 2003 Window blind with fabric assembly
D533328, Apr 28 2004 Corrugated plate for pallet
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 10 2007Tokyo Electron Limited(assignment on the face of the patent)
Jun 20 2007LI, YICHENGTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0196130215 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule