Patent
   D602882
Priority
Mar 30 2006
Filed
Aug 04 2008
Issued
Oct 27 2009
Expiry
Oct 27 2023
Assg.orig
Entity
unknown
0
14
n/a
The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.

FIG. 1 is a front elevational view of a wafer carrying-in/out apparatus showing our design;

FIG. 2 is a left side elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a top, front and right side perspective view thereof; and,

FIG. 8 is a top, front and right side perspective view thereof shown with the doors thereof in an open position.

Akiyama, Shuji, Hosaka, Hiroki, Obikane, Tadashi

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Aug 04 2008Tokyo Electron Limited(assignment on the face of the patent)
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