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Patent
   D611437
Priority
Nov 05 2004
Filed
Mar 18 2008
Issued
Mar 09 2010
Expiry
Mar 09 2024
Inventors
Burns, John
Assg.orig
Entegris, …
Assg.curr
MORGAN STA…
Entity
unknown
Referenced by
0
References
24
Maint.:
n/a
We claim the ornamental design for a wafer carrier door, as shown and described.

FIG. 1 is a perspective view of the wafer carrier door showing our new design; and,

FIG. 2 is a front view thereof.

The top surface, side surface, the latch and the details on the top and the side are shown in broken lines and form no part of the claimed design.
INVENTORS:

Burns, John, Fuller, Matthew A., King, Jeffery J., Forbes, Martin L., Smith, Mark V.

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
5173273, Oct 11 1990 Cassette for dental instruments
5711427, Jul 12 1996 Fluoroware, Inc.; FLUOROWARE, INC Wafer carrier with door
5713711, Jan 17 1995 BYE OASIS Multiple interface door for wafer storage and handling container
5785186, Oct 11 1994 ENTEGRIS, INC DELAWARE CORPORATION Substrate housing and docking system
5915562, Jul 12 1996 ENTERGIS, INC Transport module with latching door
5957292, Aug 01 1997 Entegris, Inc Wafer enclosure with door
6248177, Jan 09 1998 VERSUM MATERIALS US, LLC Method of cleaning a wafer carrier
6267245, Jul 10 1998 MORGAN STANLEY SENIOR FUNDING, INC Cushioned wafer container
6273261, Apr 30 1999 Shin-Etsu Polymer Co., Ltd. Identification structure of a substrate storage container and method of identifying a substrate storage container
6412502, Jul 28 1999 Shellback Semiconductor Technology, LLC Wafer container cleaning system
6430802, Apr 19 1999 TDK Corporation Clean box, clean transfer method and apparatus therefor
6591987, Sep 12 2001 Industrial Technology Research Institute Wafer retainer
6749067, Jan 16 2002 MORGAN STANLEY SENIOR FUNDING, INC Wafer carrier door with form fitting mechanism cover
6808352, Aug 20 2001 Sony Corporation Method for transporting boards, load port apparatus, and board transport system
6880718, Jan 15 2002 MORGAN STANLEY SENIOR FUNDING, INC Wafer carrier door and spring biased latching mechanism
6945405, Jul 08 1999 MORGAN STANLEY SENIOR FUNDING, INC Transport module with latching door
7325698, Apr 18 2004 ENTEGRIS, INC DELAWARE CORPORATION Wafer container door with particulate collecting structure
7344030, Nov 07 2003 MORGAN STANLEY SENIOR FUNDING, INC Wafer carrier with apertured door for cleaning
7344031, Jun 11 2004 SHIN-ETSU POLYMER CO , LTD Substrate storage container
7370764, Jul 11 1997 MORGAN STANLEY SENIOR FUNDING, INC Transport module
20030009904,
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Mar 18 2008Entegris, Inc.(assignment on the face of the patent)
Apr 21 2008KING, JEFFERY J Entegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0208930537 pdf
Apr 21 2008FORBES, MARTIN L Entegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0208930537 pdf
Apr 21 2008SMITH, MARK V Entegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0208930537 pdf
Apr 22 2008FULLER, MATTHEW A Entegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0208930537 pdf
Apr 22 2008BURNS, JOHNEntegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0208930537 pdf
Mar 02 2009Entegris, IncWells Fargo Bank, National Association, As AgentSECURITY AGREEMENT0223540784 pdf
Jun 09 2011WELLS FARGO BANK NATIONAL ASSOCIATIONEntegris, IncRELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0267640880 pdf
Apr 30 2014Advanced Technology Materials, IncGOLDMAN SACHS BANK USA, AS COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0328120192 pdf
Apr 30 2014Entegris, IncGOLDMAN SACHS BANK USA, AS COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0328120192 pdf
Apr 30 2014POCO GRAPHITE, INC GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0328120192 pdf
Apr 30 2014ATMI, INC GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0328120192 pdf
Apr 30 2014ATMI PACKAGING, INC GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0328120192 pdf
Nov 06 2018GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTEntegris, IncRELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0474770032 pdf
Nov 06 2018GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTATMI, INC RELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0474770032 pdf
Nov 06 2018GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTATMI PACKAGING, INC RELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0474770032 pdf
Nov 06 2018GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTPOCO GRAPHITE, INC RELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0474770032 pdf
Nov 06 2018GOLDMAN SACHS BANK USA, AS COLLATERAL AGENTAdvanced Technology Materials, IncRELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0474770032 pdf
Nov 06 2018Entegris, IncGoldman Sachs Bank USASECURITY INTEREST SEE DOCUMENT FOR DETAILS 0488110679 pdf
Nov 06 2018SAES PURE GAS, INC Goldman Sachs Bank USASECURITY INTEREST SEE DOCUMENT FOR DETAILS 0488110679 pdf
Oct 31 2019Goldman Sachs Bank USAMORGAN STANLEY SENIOR FUNDING, INC ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL FRAME 048811 06790509650035 pdf
Jul 06 2022Entegris, IncTRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022ENTEGRIS GP, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022POCO GRAPHITE, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022CMC MATERIALS, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022INTERNATIONAL TEST SOLUTIONS, LLCTRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022QED TECHNOLOGIES INTERNATIONAL, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
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