Patent
   D651291
Priority
Jan 24 2010
Filed
Jan 24 2010
Issued
Dec 27 2011
Expiry
Dec 27 2025
Assg.orig
Entity
unknown
360
14
n/a
The ornamental design for a duct connector ring, as shown and described.

FIG. 1 is a top perspective view of a duct connector ring showing our new design;

FIG. 2 is a bottom perspective view of the design of FIG. 1;

FIG. 3 is a bottom view of the design of FIG. 1;

FIG. 4 is a side view of the design of FIG. 1; and,

FIG. 5 is a top view of the design of FIG. 1.

Liebson, Steven Allan, Cohen, Robert, Liebson, Graeme Anthony

Patent Priority Assignee Title
10229833, Nov 01 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
10249524, Aug 09 2017 ASM IP Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
10249577, May 17 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
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10312055, Jul 26 2017 ASM IP Holding B.V. Method of depositing film by PEALD using negative bias
10312129, Sep 29 2015 ASM IP Holding B.V. Variable adjustment for precise matching of multiple chamber cavity housings
10319588, Oct 10 2017 ASM IP HOLDING B V Method for depositing a metal chalcogenide on a substrate by cyclical deposition
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10340135, Nov 28 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
10343920, Mar 18 2016 ASM IP HOLDING B V Aligned carbon nanotubes
10361201, Sep 27 2013 ASM IP Holding B.V. Semiconductor structure and device formed using selective epitaxial process
10364493, Aug 25 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line
10364496, Jun 27 2011 ASM IP Holding B.V. Dual section module having shared and unshared mass flow controllers
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10367080, May 02 2016 ASM IP HOLDING B V Method of forming a germanium oxynitride film
10378106, Nov 14 2008 ASM IP Holding B.V. Method of forming insulation film by modified PEALD
10381219, Oct 25 2018 ASM IP Holding B.V. Methods for forming a silicon nitride film
10381226, Jul 27 2016 ASM IP Holding B.V. Method of processing substrate
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10388513, Jul 03 2018 ASM IP Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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10435790, Nov 01 2016 ASM IP Holding B.V. Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
10438965, Dec 22 2014 ASM IP Holding B.V. Semiconductor device and manufacturing method thereof
10446393, May 08 2017 ASM IP Holding B.V. Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
10458018, Jun 26 2015 ASM IP Holding B.V.; ASM IP HOLDING B V Structures including metal carbide material, devices including the structures, and methods of forming same
10468251, Feb 19 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
10468261, Feb 15 2017 ASM IP HOLDING B V Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
10468262, Feb 15 2017 ASM IP Holding B.V. Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures
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10501866, Mar 09 2016 ASM IP Holding B.V. Gas distribution apparatus for improved film uniformity in an epitaxial system
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10510536, Mar 29 2018 ASM IP Holding B.V. Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
10529542, Mar 11 2015 ASM IP Holdings B.V. Cross-flow reactor and method
10529554, Feb 19 2016 ASM IP Holding B.V. Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
10529563, Mar 29 2017 ASM IP Holdings B.V. Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
10535516, Feb 01 2018 ASM IP Holdings B.V. Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
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10566223, Aug 28 2012 ASM IP Holdings B.V.; ASM IP HOLDING B V Systems and methods for dynamic semiconductor process scheduling
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10622375, Nov 07 2016 ASM IP Holding B.V. Method of processing a substrate and a device manufactured by using the method
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10770286, May 08 2017 ASM IP Holdings B.V.; ASM IP HOLDING B V Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
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10818758, Nov 16 2018 ASM IP Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
10829852, Aug 16 2018 ASM IP Holding B.V. Gas distribution device for a wafer processing apparatus
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10844484, Sep 22 2017 ASM IP Holding B.V.; ASM IP HOLDING B V Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
10844486, Apr 06 2009 ASM IP HOLDING B V Semiconductor processing reactor and components thereof
10847365, Oct 11 2018 ASM IP Holding B.V.; ASM IP HOLDING B V Method of forming conformal silicon carbide film by cyclic CVD
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10847371, Mar 27 2018 ASM IP Holding B.V. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
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10865475, Apr 21 2016 ASM IP HOLDING B V Deposition of metal borides and silicides
10867786, Mar 30 2018 ASM IP Holding B.V. Substrate processing method
10867788, Dec 28 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Method of forming a structure on a substrate
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10950432, Apr 25 2017 ASM IP Holding B.V. Method of depositing thin film and method of manufacturing semiconductor device
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ER3967,
ER4489,
ER6015,
ER6328,
ER6606,
ER8750,
ER9070,
Patent Priority Assignee Title
2716563,
4867490, Jun 10 1988 INTEGRA BANK Circular duct connector
5015018, Jun 10 1988 INTEGRA BANK Duct connector
7623940, Jun 02 2006 The Boeing Company Direct-manufactured duct interconnects
7950195, Sep 02 2003 WESTLAKE ROYAL BUILDING PRODUCTS INC Adjustable housing assembly
20030160452,
20050051220,
20060175836,
D275984, Nov 05 1981 Shaw Aero Devices, Inc. Fuel tank cap adaptor ring
D327120, Aug 23 1988 Max Widenmann Armaturenfabrik Hose coupling
D346433, Apr 29 1991 Fire hydrant adapter ring
D360019, Mar 01 1993 Lindab AB Circular sleeve coupling
D360020, Mar 01 1993 Lindab AB Circular sleeve coupling
D383195, Mar 01 1993 Lindab AB Circular sleeve coupling
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Jan 24 2010GLV International (1995) Ltd.(assignment on the face of the patent)
Nov 15 2011LIEBSON, STEVEN ALLAN, MR GLV INTERNATIONAL 1995 LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0272250683 pdf
Nov 15 2011LIEBSON, GRAEME ANTHONY, MR GLV INTERNATIONAL 1995 LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0272250683 pdf
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