Dome assembly for a deposition chamber

Abstract

Description

FIG. 1 is an isometric bottom view of a dome assembly for a deposition chamber.

FIG. 2 is an isometric top view of the dome assembly for a deposition chamber of FIG. 1.

FIG. 3 is a top plan view of the dome assembly for a deposition chamber of FIG. 2.

FIG. 4 is a front elevation view of the dome assembly for a deposition chamber of FIG. 2.

FIG. 5 is a back elevation view of the dome assembly for a deposition chamber of FIG. 2.

FIG. 6 is a side elevation view of the dome assembly for a deposition chamber of FIG. 2. The opposing side elevation view is a mirror-image.

FIG. 7 is a side elevation view of the dome assembly for a deposition chamber of FIG. 1.

FIG. 8 is a bottom plan view of the dome assembly for a deposition chamber of FIG. 1.

FIG. 9 is a cross-sectional view taken along section 9-9 of FIG. 3.

FIG. 10 is a cross-sectional view taken along section 10-10 of FIG. 3.

FIG. 11 is a cross-sectional view taken along section 11-11 of FIG. 6.

FIG. 12 is a cross-sectional view taken along section 12-12 of FIG. 6; and,

FIG. 13 is a cross-sectional view taken along section 13-13 of FIG. 7.

The broken lines in the Figures indicating tubular elements disposed internal to other tubular elements do not form part of the claimed design. Transparent materials included in certain elements are indicated by surface treatment and/or are apparent from the Figures.

Claims

The ornamental design for a dome assembly for a deposition chamber, as shown and described.