FIG. 1 is a front corner perspective view of a substrate container according to an embodiment of the invention. The view from the adjacent front corner being a mirror image thereto.
FIG. 2 is back corner perspective view of a substrate container according to an embodiment of the invention. The view from the adjacent back corner being a mirror image thereto; and,
FIG. 3 is right side view of a substrate container according to an embodiment of the invention. The view from the opposite side being a mirror image thereto.
The broken lines shown in the drawings illustrate the environment of the claim and form no part of the claimed design.
Patent |
Priority |
Assignee |
Title |
5788082, |
Jul 12 1996 |
Fluoroware, Inc.; FLUOROWARE, INC |
Wafer carrier |
5992638, |
Nov 11 1998 |
MORGAN STANLEY SENIOR FUNDING, INC |
Advanced wafer shipper |
6105782, |
Aug 17 1998 |
Shin-Etsu Polymers Co., Ltd. |
Storage container for precision substrates |
6382419, |
Apr 20 1999 |
Shin-Etsu Polymer Co. Ltd. |
Wafer container box |
7048127, |
Jul 23 2001 |
MIRAIAL CO , LTD |
Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism |
7316315, |
Dec 02 2002 |
MIRAIAL CO , LTD |
Thin plate storage container and lid having at least one thin plate supporting member |
7344031, |
Jun 11 2004 |
SHIN-ETSU POLYMER CO , LTD |
Substrate storage container |
7347329, |
Oct 24 2003 |
MORGAN STANLEY SENIOR FUNDING, INC |
Substrate carrier |
7669717, |
May 17 2004 |
SHIN-ETSU POLYMER CO , LTD |
Substrate storage container and positioning method of the same |
7703609, |
Jun 28 2006 |
VANTEC CO , LTD |
Wafer carrier positioning structure |
7722095, |
Jul 23 2001 |
MIRAIAL CO , LTD |
Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism |
7828341, |
Apr 18 2005 |
SHIN-ETSU POLYMER CO , LTD |
Storage container |
7971723, |
Apr 29 2010 |
GUDENG PRECISION INDUSTRIAL CO., LTD |
Wafer container with oval latch |
20030159971, |
|
|
|
20070175792, |
|
|
|
20110005967, |
|
|
|
D378873, |
Oct 13 1995 |
EMPAK, INC |
300 mm microenvironment pod with door on side |
D387903, |
Oct 13 1995 |
EMPAK, INC |
Shipping container |
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