FIG. 1 shows a perspective view of the chemical vapor deposition fixture.
FIG. 2 shows a front view thereof;
FIG. 3 shows a rear view thereof;
FIG. 4 shows a first side view thereof;
FIG. 5 shows a second side view thereof; and,
FIG. 6 shows the bottom view thereof.
The broken line showing of parts of the drawings is included for the purpose of illustrating use and environment and forms no part of the claimed design.
Grove, William David, Deskevich, Nicholas Peter
Patent |
Priority |
Assignee |
Title |
4329938, |
Oct 03 1980 |
The United States of America as represented by the Secretary of the Navy |
Evaporator tool with remote substrate reorientation mechanism |
5534074, |
May 17 1995 |
Heraeus Amersil, Inc. |
Vertical boat for holding semiconductor wafers |
6123804, |
Feb 22 1999 |
Applied Materials, Inc.; Applied Materials, Inc |
Sectional clamp ring |
6133121, |
Oct 15 1997 |
Kabushiki Kaisha Toshiba |
Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus |
7252716, |
Nov 15 2002 |
Samsung Electronics Co., Ltd. |
Gas injection apparatus for semiconductor processing system |
7923069, |
Apr 16 2002 |
Applied Materials, Inc. |
Multi-station deposition apparatus and method |
8308916, |
Jun 05 2006 |
PRAXAIR S. T. TECHNOLOGY, INC. |
Method for simultaneously coating a plurality of workpieces |
8366827, |
Jun 29 2005 |
Samsung Electronics Co., Ltd. |
Chamber inserts and apparatuses for processing a substrate |
8394201, |
Jan 24 2008 |
Samsung Electronics Co., Ltd. |
Atomic layer deposition apparatus |
8491963, |
Feb 17 2005 |
SAFRAN CERAMICS |
Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates |
D428858, |
Jan 31 1997 |
Tokyo Electron Limited |
Quartz fin heat retaining tube |
D645487, |
Mar 20 2009 |
Foseco International Limited |
Holder for molten metal filters |
D689107, |
Nov 19 2012 |
Silcotek Corp. |
Weldment fixture |
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