Patent |
Priority |
Assignee |
Title |
3679893, |
|
|
|
3951587, |
Dec 06 1974 |
Norton Company |
Silicon carbide diffusion furnace components |
4218214, |
Feb 05 1979 |
RCA Corporation |
Guide wing for a furnace paddle |
4355974, |
Nov 24 1980 |
ASQ Boats, Inc. |
Wafer boat |
4440538, |
Dec 30 1981 |
GASONICS, INC |
Apparatus for loading and unloading a furnace |
4459104, |
Jun 01 1983 |
AMTECH SYSTEMS, INC , 131 SOUTH CLARK DRIVE, TEMPE, ARIZONA 85281, A ARIZONA CORP |
Cantilever diffusion tube apparatus and method |
4471716, |
Jan 15 1981 |
Fluoroware, Inc. |
Wafer carrier |
4516897, |
May 23 1983 |
Berkeley Glasslab |
Cantilever paddle for use with wafer boats |
4523885, |
Apr 29 1982 |
Heraeus Quarzschmelze GmbH |
Apparatus for loading magazines into furnaces |
4542059, |
Aug 23 1982 |
Canon Kabushiki Kaisha |
Recording medium |
4566839, |
May 18 1983 |
MICROGLASS INC |
Semiconductor wafer diffusion boat and method |
4624638, |
Nov 29 1984 |
BTU Engineering Corporation |
CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
4671726, |
Nov 07 1984 |
Breed Corporation |
Cantilevered soft landing boat loader for semiconductor processing furnaces |
4676008, |
May 16 1986 |
Microglass, Inc.; MICROGLASS, INC |
Cage-type wafer carrier and method |
4687097, |
Dec 11 1984 |
MARQUETTE BANK MINNEAPOLIS, N A AS AGENT |
Wafer processing cassette |
4721424, |
Apr 03 1985 |
TETREON TECHNOLOGIES LIMITED |
Semiconductor wafer boat loader releaseable mounting |
4744712, |
May 06 1986 |
|
Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes |
4761134, |
Mar 30 1987 |
Norton Company |
Silicon carbide diffusion furnace components with an impervious coating thereon |
4767251, |
May 06 1986 |
AMTECH SYSTEMS, INC , 131 SOUTH CLARK DRIVE, TEMPE, ARIZONA 85281, A ARIZONA CORP |
Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
4888994, |
Nov 18 1987 |
Tokyo Electron Limited |
Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace |
4911638, |
May 18 1989 |
DIRECTION INCORPORATED, A CORP OF CA |
Controlled diffusion environment capsule and system |
4943234, |
Feb 23 1989 |
|
Procedure and equipment for the thermal treatment of semiconductor materials |
4954079, |
Feb 05 1988 |
Tokyo Electron Limited |
Heat-treating apparatus and a method for the same |
4976610, |
Dec 05 1988 |
IMTECH, INC |
Purge cantilevered wafer loading system for LP CVD processes |
4979897, |
Dec 05 1988 |
IMTECH, INC |
Atmospheric door closure |
4998879, |
Apr 29 1988 |
NORTON COMPANY, A CORP OF MA |
High purity diffusion furnace components |
5033406, |
Jun 24 1987 |
ASQ Boats, Inc. |
Side lifting tool wafer-boat assembly |
5050534, |
Aug 03 1989 |
IMTECH, INC |
Mobile injector system |
5208961, |
Feb 28 1992 |
National Semiconductor Corporation |
Semiconductor processing furnace door alignment apparatus and method |
5225375, |
May 20 1991 |
Process Technology (1988) Limited |
Plasma enhanced chemical vapor processing of semiconductor substrates |
5283089, |
Nov 13 1989 |
Norton Company |
Non-porous diffusion furnace components |
5354198, |
Dec 05 1988 |
IMTECH, INC |
Movable cantilevered purge system |
5443649, |
Nov 22 1994 |
COORSTEK, INC , A DELAWARE CORPORATION |
Silicon carbide carrier for wafer processing in vertical furnaces |
5476176, |
May 23 1994 |
Empak, Inc. |
Reinforced semiconductor wafer holder |
5505577, |
Nov 17 1990 |
Tokyo Electron Limited |
Transfer apparatus |
5520205, |
Jul 01 1994 |
Texas Instruments Incorporated |
Apparatus for wafer cleaning with rotation |
5538230, |
Aug 08 1994 |
COORSTEK, INC , A DELAWARE CORPORATION |
Silicon carbide carrier for wafer processing |
5765982, |
Jul 10 1995 |
Amtech Systems, Inc. |
Automatic wafer boat loading system and method |
5776391, |
Aug 08 1994 |
COORSTEK, INC , A DELAWARE CORPORATION |
Silicon carbide carrier for wafer processing and method for making same |
5820367, |
Sep 20 1995 |
Tokyo Electron Limited |
Boat for heat treatment |
5857576, |
Nov 27 1995 |
Samsung Electronics Co., Ltd. |
Wafer carrier with an anti-slip surface |
5878889, |
Jan 23 1996 |
Renesas Electronics Corporation |
Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers |
5882807, |
Dec 26 1995 |
Asahi Glass Company, Ltd; Tokai Carbon Company, Ltd. |
Jig for heat treatment and process for fabricating the jig |
6095806, |
Jun 24 1998 |
Tokyo Electron Limited; Kabushiki Kaisha Toshiba |
Semiconductor wafer boat and vertical heat treating system |
6199564, |
Nov 03 1998 |
Tokyo Electron Limited |
Substrate processing method and apparatus |
6318389, |
Oct 29 1999 |
MEMC Electronic Materials, Inc |
Apparatus for cleaning semiconductor wafers |
6601592, |
Sep 01 2000 |
|
Method of semiconductor substrate batch demounting |
6631934, |
Jun 02 2000 |
COORSTEK, INC |
Silicon carbide cantilever paddle |
6716027, |
Jan 18 2001 |
Samsung Electronics Co., Ltd. |
Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
6811040, |
Jul 16 2001 |
TOKAI CARBON CO , LTD |
Wafer holding apparatus |
7501370, |
Jan 06 2004 |
COORSTEK, INC |
High purity silicon carbide wafer boats |
7762208, |
Jul 19 2002 |
Aixtron AG |
Loading and unloading apparatus for a coating device |
20050148455, |
|
|
|
20070238062, |
|
|
|
20090159897, |
|
|
|
20090214999, |
|
|
|
RE33341, |
Jul 31 1987 |
ASQ TECHNOLOGY, INC |
Wafer transfer apparatus |