Liquid-free trap for trace level acidic and basic AMC and components thereof

Abstract

Description

FIG. 1 is a front perspective view of the liquid-free trap for trace level acidic and basic AMC and components thereof, according to our new design;

FIG. 2 is a back perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a back view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a top sectional view taken on line 6-6 of FIG. 5.

FIG. 7 is an exploded view of FIG. 5.

FIG. 8 is a front perspective view of locking nut member of the liquid-free trap;

FIG. 9 is a back perspective view thereof;

FIG. 10 is a front view thereof;

FIG. 11 is a back view thereof;

FIG. 12 is a top view thereof; and,

FIG. 13 is a top sectional view taken on line 13-13 of FIG. 12.

In the drawings, the broken lines are for the purpose of illustrating environment only and form no part of the claimed design.

The liquid-free trap for trace level acidic and basic AMC and components thereof in the present invention relies on a solid material to trap acidic or basic AMC in a gas stream, for example, from a cleanroom or a semiconductor manufacturing facility. The liquid-free trap for trace level acidic and basic AMC and components thereof can be used in any suitable orientation, including horizontal and vertical orientations. The liquid-free trap for trace level acidic and basic AMC and components thereof can comprise a housing comprising a hollow, elongate upstream component with tubular portions; a hollow, elongate downstream component with tubular portions; and a locking nut member to secure the upstream component to the downstream component, the upstream component and the downstream component together creating a chamber space that is sealed from the environment and situated in a flow path between the inlet and the outlet. The space created by the upstream and downstream components together can accommodate a rigid sintered hydrophilic material trap member for trapping trace level acidic or basic AMC.

Claims

The ornamental design for a liquid-free trap for trace level acidic and basic AMC and components thereof, as shown and described.