Patent
   D818960
Priority
Feb 10 2016
Filed
Jul 28 2016
Issued
May 29 2018
Expiry
May 29 2033
Assg.orig
Entity
unknown
4
14
n/a
I claim the ornamental design for an insulation unit of semiconductor manufacturing apparatus, as shown and described.

FIG. 1 is a perspective view of an insulation unit of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view thereof taken in the direction of line 8-8 in FIG. 2.

The dot-dash broken lines FIG. 2 are for reference purposes only; the broken lines form no part of the claimed design.

Yamaguchi, Takatomo

Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 13 2016YAMAGUCHI, TAKATOMOHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0392850154 pdf
Jul 28 2016HITACHI KOKUSAI ELECTRIC INC.(assignment on the face of the patent)
Mar 29 2019Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0491960764 pdf
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