|
The ornamental design for a vacuum chuck, as shown and described.
|
1. Vacuum chuck
Broken lines represent no part of claimed design.
Dots inside of solid lines represent projected portions which are not colored and are unclaimed.
Broken lines represent no part of claimed design.
Broken lines represent no part of claimed design.
Broken lines represent no part of claimed design.
Broken lines represent no part of claimed design.
Broken lines represent no part of claimed design.
Broken lines represent no part of claimed design.
Dots inside of solid lines represent projected portions which are not colored and are unclaimed.
Broken lines represent no part of claimed design.
Dot-dash line illustrates the border of enlarged view and forms no part of the claimed design and forms no part thereof.
Broken lines represent no part of claimed design and form no part thereof.
The dotted-dashed broken lines in view
Patent | Priority | Assignee | Title |
Patent | Priority | Assignee | Title |
2691937, | |||
2852264, | |||
4551192, | Jun 30 1983 | International Business Machines Corporation | Electrostatic or vacuum pinchuck formed with microcircuit lithography |
5564682, | Aug 13 1993 | Kabushiki Kaisha Toshiba | Wafer stage apparatus for attaching and holding semiconductor wafer |
5857667, | Oct 27 1995 | Samsung Aerospace Industries, Ltd. | Vacuum chuck |
6032997, | Apr 16 1998 | Excimer Laser Systems | Vacuum chuck |
6176770, | Jan 31 2000 | United Microelectronics Corp. | Grindstone having a vacuum system in a pin chuck stepper |
6271676, | Mar 02 1999 | ACCRETECH USA, INC | Spiral chuck |
6464790, | Jul 11 1997 | Applied Materials, Inc | Substrate support member |
6538733, | Aug 22 2000 | ADE Corporation | Ring chuck to hold 200 and 300 mm wafer |
6994386, | Mar 21 2002 | Alcon Inc | Gripper |
7357115, | Mar 31 2003 | Lam Research Corporation | Wafer clamping apparatus and method for operating the same |
8122795, | Jul 10 2006 | Mar Don Corporation | Method for making an elastomeric sealing device |
8336188, | Jul 17 2008 | FormFactor, Inc | Thin wafer chuck |
9558985, | Mar 28 2012 | ACM RESEARCH SHANGHAI INC | Vacuum chuck |
D307593, | Feb 26 1987 | Vacuum chuck for a lathe for making optically-smooth surfaces |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jun 27 2016 | NGK Spark Plug Co. Ltd. | (assignment on the face of the patent) | / | |||
Jul 27 2018 | ISHINO, TOMOHIRO | NGK SPARK PLUG CO , LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 046758 | /0730 | |
Jun 30 2023 | NGK SPARK PLUG CO , LTD | NITERRA CO , LTD | CHANGE OF NAME SEE DOCUMENT FOR DETAILS | 064842 | /0215 |
Date | Maintenance Fee Events |
Date | Maintenance Schedule |