Patent
   D829778
Priority
Jun 27 2016
Filed
Jun 27 2016
Issued
Oct 02 2018
Expiry
Oct 02 2033
Assg.orig
Entity
unknown
0
16
n/a
The ornamental design for a vacuum chuck, as shown and described.

1. Vacuum chuck

1.1 : Front View

Broken lines represent no part of claimed design.

Dots inside of solid lines represent projected portions which are not colored and are unclaimed.

1.2 : Rear View

Broken lines represent no part of claimed design.

1.3 : Right View

Broken lines represent no part of claimed design.

1.4 : Left View

Broken lines represent no part of claimed design.

1.5 : Top View

Broken lines represent no part of claimed design.

1.6 : Bottom View

Broken lines represent no part of claimed design.

1.7 : Perspective Enlarged View

Broken lines represent no part of claimed design.

Dots inside of solid lines represent projected portions which are not colored and are unclaimed.

1.8 : Partial Enlarged View of X-Y part of Fig. 1.1

Broken lines represent no part of claimed design.

Dot-dash line illustrates the border of enlarged view and forms no part of the claimed design and forms no part thereof.

1.9 : Cross-Sectional View of A-A line of Fig. 1.1

Broken lines represent no part of claimed design and form no part thereof.

The dotted-dashed broken lines in view 1.9 represent an unclaimed boundary line and form no part of the claimed design; view 1.8 is a partial enlarged view to show a part of the claimed portion; view 1.9 is a cross-sectional view to show a part of the claimed portion.

Ishino, Tomohiro

Patent Priority Assignee Title
Patent Priority Assignee Title
2691937,
2852264,
4551192, Jun 30 1983 International Business Machines Corporation Electrostatic or vacuum pinchuck formed with microcircuit lithography
5564682, Aug 13 1993 Kabushiki Kaisha Toshiba Wafer stage apparatus for attaching and holding semiconductor wafer
5857667, Oct 27 1995 Samsung Aerospace Industries, Ltd. Vacuum chuck
6032997, Apr 16 1998 Excimer Laser Systems Vacuum chuck
6176770, Jan 31 2000 United Microelectronics Corp. Grindstone having a vacuum system in a pin chuck stepper
6271676, Mar 02 1999 ACCRETECH USA, INC Spiral chuck
6464790, Jul 11 1997 Applied Materials, Inc Substrate support member
6538733, Aug 22 2000 ADE Corporation Ring chuck to hold 200 and 300 mm wafer
6994386, Mar 21 2002 Alcon Inc Gripper
7357115, Mar 31 2003 Lam Research Corporation Wafer clamping apparatus and method for operating the same
8122795, Jul 10 2006 Mar Don Corporation Method for making an elastomeric sealing device
8336188, Jul 17 2008 FormFactor, Inc Thin wafer chuck
9558985, Mar 28 2012 ACM RESEARCH SHANGHAI INC Vacuum chuck
D307593, Feb 26 1987 Vacuum chuck for a lathe for making optically-smooth surfaces
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jun 27 2016NGK Spark Plug Co. Ltd.(assignment on the face of the patent)
Jul 27 2018ISHINO, TOMOHIRONGK SPARK PLUG CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0467580730 pdf
Jun 30 2023NGK SPARK PLUG CO , LTD NITERRA CO , LTD CHANGE OF NAME SEE DOCUMENT FOR DETAILS 0648420215 pdf
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