Patent |
Priority |
Assignee |
Title |
11164955, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
11168395, |
Jun 29 2018 |
ASM IP Holding B.V. |
Temperature-controlled flange and reactor system including same |
11171025, |
Jan 22 2019 |
ASM IP Holding B.V. |
Substrate processing device |
11217444, |
Nov 30 2018 |
ASM IP HOLDING B V |
Method for forming an ultraviolet radiation responsive metal oxide-containing film |
11222772, |
Dec 14 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11227782, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11227789, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
11230766, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
11232963, |
Oct 03 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
11233133, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
11242598, |
Jun 26 2015 |
ASM IP Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same |
11251035, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
11251040, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method including treatment step and apparatus for same |
11251068, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
11270899, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
11274369, |
Sep 11 2018 |
ASM IP Holding B.V. |
Thin film deposition method |
11282698, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
11286558, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
11286562, |
Jun 08 2018 |
ASM IP Holding B.V. |
Gas-phase chemical reactor and method of using same |
11289326, |
May 07 2019 |
ASM IP Holding B.V. |
Method for reforming amorphous carbon polymer film |
11295980, |
Aug 30 2017 |
ASM IP HOLDING B V |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
11296189, |
Jun 21 2018 |
ASM IP Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
11306395, |
Jun 28 2017 |
ASM IP HOLDING B V |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
11315794, |
Oct 21 2019 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching films |
11339476, |
Oct 08 2019 |
ASM IP Holding B.V. |
Substrate processing device having connection plates, substrate processing method |
11342216, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
11345999, |
Jun 06 2019 |
ASM IP Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas |
11355338, |
May 10 2019 |
ASM IP Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method |
11361990, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
11374112, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
11378337, |
Mar 28 2019 |
ASM IP Holding B.V. |
Door opener and substrate processing apparatus provided therewith |
11387106, |
Feb 14 2018 |
ASM IP Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
11387120, |
Sep 28 2017 |
ASM IP Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
11390945, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
11390946, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
11390950, |
Jan 10 2017 |
ASM IP HOLDING B V |
Reactor system and method to reduce residue buildup during a film deposition process |
11393690, |
Jan 19 2018 |
ASM IP HOLDING B V |
Deposition method |
11396702, |
Nov 15 2016 |
ASM IP Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit |
11398382, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
11401605, |
Nov 26 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11410851, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
11411088, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
11414760, |
Oct 08 2018 |
ASM IP Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
11417545, |
Aug 08 2017 |
ASM IP Holding B.V. |
Radiation shield |
11424119, |
Mar 08 2019 |
ASM IP HOLDING B V |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11430640, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11430674, |
Aug 22 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
11437241, |
Apr 08 2020 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films |
11443926, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11447861, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
11447864, |
Apr 19 2019 |
ASM IP Holding B.V. |
Layer forming method and apparatus |
11450529, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
11453943, |
May 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
11453946, |
Jun 06 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system including a gas detector |
11469098, |
May 08 2018 |
ASM IP Holding B.V. |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
11473195, |
Mar 01 2018 |
ASM IP Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate |
11476109, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
11482412, |
Jan 19 2018 |
ASM IP HOLDING B V |
Method for depositing a gap-fill layer by plasma-assisted deposition |
11482418, |
Feb 20 2018 |
ASM IP Holding B.V. |
Substrate processing method and apparatus |
11482533, |
Feb 20 2019 |
ASM IP Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications |
11488819, |
Dec 04 2018 |
ASM IP Holding B.V. |
Method of cleaning substrate processing apparatus |
11488854, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
11492703, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11495459, |
Sep 04 2019 |
ASM IP Holding B.V. |
Methods for selective deposition using a sacrificial capping layer |
11499222, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11499226, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
11501956, |
Oct 12 2012 |
ASM IP Holding B.V. |
Semiconductor reaction chamber showerhead |
11501968, |
Nov 15 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for providing a semiconductor device with silicon filled gaps |
11501973, |
Jan 16 2018 |
ASM IP Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
11515187, |
May 01 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Fast FOUP swapping with a FOUP handler |
11515188, |
May 16 2019 |
ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
11521851, |
Feb 03 2020 |
ASM IP HOLDING B V |
Method of forming structures including a vanadium or indium layer |
11527400, |
Aug 23 2019 |
ASM IP Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
11527403, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
11530483, |
Jun 21 2018 |
ASM IP Holding B.V. |
Substrate processing system |
11530876, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
11532757, |
Oct 27 2016 |
ASM IP Holding B.V. |
Deposition of charge trapping layers |
11551912, |
Jan 20 2020 |
ASM IP Holding B.V. |
Method of forming thin film and method of modifying surface of thin film |
11551925, |
Apr 01 2019 |
ASM IP Holding B.V. |
Method for manufacturing a semiconductor device |
11557474, |
Jul 29 2019 |
ASM IP Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
11562901, |
Sep 25 2019 |
ASM IP Holding B.V. |
Substrate processing method |
11572620, |
Nov 06 2018 |
ASM IP Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate |
11581186, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus |
11581220, |
Aug 30 2017 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
11587814, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11587815, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11587821, |
Aug 08 2017 |
ASM IP Holding B.V. |
Substrate lift mechanism and reactor including same |
11594450, |
Aug 22 2019 |
ASM IP HOLDING B V |
Method for forming a structure with a hole |
11594600, |
Nov 05 2019 |
ASM IP Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same |
11605528, |
Jul 09 2019 |
ASM IP Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method |
11610774, |
Oct 02 2019 |
ASM IP Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
11610775, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
11615970, |
Jul 17 2019 |
ASM IP HOLDING B V |
Radical assist ignition plasma system and method |
11615980, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
11626308, |
May 13 2020 |
ASM IP Holding B.V. |
Laser alignment fixture for a reactor system |
11626316, |
Nov 20 2019 |
ASM IP Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
11629406, |
Mar 09 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
11629407, |
Feb 22 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus and method for processing substrates |
11637011, |
Oct 16 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
11637014, |
Oct 17 2019 |
ASM IP Holding B.V. |
Methods for selective deposition of doped semiconductor material |
11639548, |
Aug 21 2019 |
ASM IP Holding B.V. |
Film-forming material mixed-gas forming device and film forming device |
11639811, |
Nov 27 2017 |
ASM IP HOLDING B V |
Apparatus including a clean mini environment |
11643724, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
11644758, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
11646184, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11646197, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
11646204, |
Jun 24 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming a layer provided with silicon |
11646205, |
Oct 29 2019 |
ASM IP Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
11649546, |
Jul 08 2016 |
ASM IP Holding B.V. |
Organic reactants for atomic layer deposition |
11658029, |
Dec 14 2018 |
ASM IP HOLDING B V |
Method of forming a device structure using selective deposition of gallium nitride and system for same |
11658035, |
Jun 30 2020 |
ASM IP HOLDING B V |
Substrate processing method |
11664199, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
11664245, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
11664267, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
11674220, |
Jul 20 2020 |
ASM IP Holding B.V. |
Method for depositing molybdenum layers using an underlayer |
11676812, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions |
11680839, |
Aug 05 2019 |
ASM IP Holding B.V. |
Liquid level sensor for a chemical source vessel |
11682572, |
Nov 27 2017 |
ASM IP Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace |
11685991, |
Feb 14 2018 |
ASM IP HOLDING B V ; Universiteit Gent |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
11688603, |
Jul 17 2019 |
ASM IP Holding B.V. |
Methods of forming silicon germanium structures |
11694892, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
11695054, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
11705333, |
May 21 2020 |
ASM IP Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same |
11718913, |
Jun 04 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas distribution system and reactor system including same |
11725277, |
Jul 20 2011 |
ASM IP HOLDING B V |
Pressure transmitter for a semiconductor processing environment |
11725280, |
Aug 26 2020 |
ASM IP Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers |
11735414, |
Feb 06 2018 |
ASM IP Holding B.V. |
Method of post-deposition treatment for silicon oxide film |
11735422, |
Oct 10 2019 |
ASM IP HOLDING B V |
Method of forming a photoresist underlayer and structure including same |
11735445, |
Oct 31 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus for processing substrates |
11742189, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
11742198, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOCN layer and method of forming same |
11746414, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
11749562, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
11767589, |
May 29 2020 |
ASM IP Holding B.V. |
Substrate processing device |
11769670, |
Dec 13 2018 |
ASM IP Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
11769682, |
Aug 09 2017 |
ASM IP Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
11776846, |
Feb 07 2020 |
ASM IP Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices |
11781221, |
May 07 2019 |
ASM IP Holding B.V. |
Chemical source vessel with dip tube |
11781243, |
Feb 17 2020 |
ASM IP Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon |
11795545, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
11798830, |
May 01 2020 |
ASM IP Holding B.V. |
Fast FOUP swapping with a FOUP handler |
11798834, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
11798999, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
11802338, |
Jul 26 2017 |
ASM IP Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
11804364, |
May 19 2020 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11804388, |
Sep 11 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
11810788, |
Nov 01 2016 |
ASM IP Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
11814715, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11814747, |
Apr 24 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
11821078, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method for forming precoat film and method for forming silicon-containing film |
11823866, |
Apr 02 2020 |
ASM IP Holding B.V. |
Thin film forming method |
11823876, |
Sep 05 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus |
11827978, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
11827981, |
Oct 14 2020 |
ASM IP HOLDING B V |
Method of depositing material on stepped structure |
11828707, |
Feb 04 2020 |
ASM IP Holding B.V. |
Method and apparatus for transmittance measurements of large articles |
11830730, |
Aug 29 2017 |
ASM IP HOLDING B V |
Layer forming method and apparatus |
11830738, |
Apr 03 2020 |
ASM IP Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device |
11837483, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
11837494, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
11840761, |
Dec 04 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11848200, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
11851755, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
11866823, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
11873557, |
Oct 22 2020 |
ASM IP HOLDING B V |
Method of depositing vanadium metal |
11876008, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11876356, |
Mar 11 2020 |
ASM IP Holding B.V. |
Lockout tagout assembly and system and method of using same |
11885013, |
Dec 17 2019 |
ASM IP Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
11885020, |
Dec 22 2020 |
ASM IP Holding B.V. |
Transition metal deposition method |
11885023, |
Oct 01 2018 |
ASM IP Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same |
11887857, |
Apr 24 2020 |
ASM IP Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
11891696, |
Nov 30 2020 |
ASM IP Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
11898242, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film |
11898243, |
Apr 24 2020 |
ASM IP Holding B.V. |
Method of forming vanadium nitride-containing layer |
11901175, |
Mar 08 2019 |
ASM IP Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11901179, |
Oct 28 2020 |
ASM IP HOLDING B V |
Method and device for depositing silicon onto substrates |
11908684, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
11908733, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
11915929, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
D891474, |
Jan 25 2018 |
H. S. MACHINERY CO., LTD. |
Motor housing |
D906598, |
Jan 15 2020 |
|
Mask breather valve |
D930782, |
Aug 22 2019 |
ASM IP Holding B.V. |
Gas distributor |
D931978, |
Jun 27 2019 |
ASM IP Holding B.V. |
Showerhead vacuum transport |
D940837, |
Aug 22 2019 |
ASM IP Holding B.V. |
Electrode |
D944946, |
Jun 14 2019 |
ASM IP Holding B.V. |
Shower plate |
D947913, |
May 17 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D948658, |
Aug 03 2020 |
Lam Research Corporation |
High density hole pattern dual plenum hole showerhead assembly |
D949319, |
Aug 22 2019 |
ASM IP Holding B.V. |
Exhaust duct |
D965044, |
Aug 19 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D965524, |
Aug 19 2019 |
ASM IP Holding B.V. |
Susceptor support |
D975665, |
May 17 2019 |
ASM IP Holding B.V. |
Susceptor shaft |
D979506, |
Aug 22 2019 |
ASM IP Holding B.V. |
Insulator |
D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
ER2274, |
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ER3967, |
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ER4489, |
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ER6015, |
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ER6328, |
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ER8750, |
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ER9473, |
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