Electric furnace for substrate processing apparatus

Abstract

Description

FIG. 1 is a front, bottom and left side perspective view of an electric furnace for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2 thereof; and,

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2.

The dashed-dot-dashed lines represent the boundary lines of the claimed design.

The broken lines shown in the drawings represent portions of the electric furnace for substrate processing apparatus that form no part of the claimed design.

Claims

The ornamental design for an electric furnace for substrate processing apparatus, as shown and described.