FIG. 1 is a perspective view of an air heater showing the claimed design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
This is a new design for an air heater for heating and directing air to a target workpiece as applied to fields including semiconductor manufacturing. The air heater includes an inlet at the bottom of FIG. 1 and an outlet at the top of FIG. 1, and the inlet may be connected to an air pump (not claimed). When fast moving air from the air pump enters the air heater through the inlet, the air heater instantly heats up the fast moving air in the cylinder, which exits the outlet as hot, fast moving air. The hot air heats up a target workpiece such as a semiconductor, ultimately melting at least a portion of the target workpiece.
Kang, Hong Ku
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