Constant speed drive of a reticle and a wafer in a relative scanning direction and positioning of the reticle and the wafer are simultaneously performed with high precision by a slit scanning exposure scheme. A reticle side scanning stage for scanning a reticle relative to a slit-like illumination area in the relative scanning direction is placed on a reticle side base. A reticle side fine adjustment stage for moving and rotating the reticle within a two-dimensional plane is placed on the reticle side scanning stage. The reticle is placed on the reticle side fine adjustment stage. Constant speed drive and positioning of the reticle and a wafer are performed by independently controlling the reticle side scanning stage and the reticle side fine adjustment stage.
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0. 36. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
effecting an exposure onto one of the plurality of the defined regions on said second object while moving said second object in a predetermined direction, and
after finishing the exposure, accelerating said second object in a direction intersecting with said predetermined direction while decelerating said second object in said predetermined direction.
0. 35. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
effecting an exposure onto one of the plurality of the defined regions on said second object while moving said second object in a predetermined direction, and
after finishing the exposure, moving said second object in a direction perpendicular to said predetermined direction while moving said second object in a direction parallel to said predetermined direction.
0. 38. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
effecting an exposure onto one of the plurality of defined regions on said second object while moving said first object in a first direction and moving said second object in a second direction corresponding to said first direction, and
after finishing the exposure, moving said second object in a direction parallel and perpendicular to said second direction simultaneously while decelerating said first object in said first direction.
0. 40. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
effecting an exposure onto one of the plurality of defined regions on said second object while moving said second object in a predetermined direction, and
after finishing the exposure, starting accelerating said second object in a reverse direction to said predetermined direction for preparing a scanning exposure onto a next defined region while moving said second object in a direction intersecting with said predetermined direction.
0. 37. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
a first step of effecting an exposure onto one of the plurality of defined regions on said second object while moving said second object in a predetermined direction,
a second step of decelerating said second object in said predetermined direction after finishing the exposure,
a third step of accelerating said second object in a reverse direction to said predetermined direction after said second step, and
a fourth step of accelerating and decelerating said second object in a direction intersecting with said predetermined direction during said second step and said third step.
0. 39. A scanning exposure method in which in synchronism with movement of a first object formed with a predetermined pattern a second object is moved, thereby exposing sequentially a plurality of defined regions on said second object, comprising:
a first step of effecting an exposure onto one of the plurality of defined regions on said second object while moving said first object in a first direction and moving said second object in a second direction corresponding to said first direction, and
a second step of decelerating said second object in said second direction after finishing the first step,
a third step of accelerating said second object in a reverse direction to said second direction after said second step, and
a fourth step of decelerating said first object and setting said first object to a reference position during said second step and said third step.
0. 41. A scanning type exposure apparatus in which in synchronism with moving a first object in a first direction, a second object is moved in a second direction, thereby exposing sequentially each of a plurality of defined regions on said second object, comprising:
a projection optical system which is disposed in an optical path of an exposure beam, said first object being provided on one side of the projection optical system, said second object being provided on the other side of the projection optical system, and an image of a pattern formed on said first object being projected onto said second object by the projection optical system;
a first movable stage which holds said first object, at least a part of the first movable stage being disposed on the one side of the projection optical system;
a second movable stage which holds said second object, at least a part of the second movable stage being disposed on the other side of the projection optical system;
a first interferometer system which outputs positional information of said first movable stage, the first interferometer system being optically connected to said first movable stage;
a second interferometer system which outputs positional information of said second movable stage, the second interferometer system being optically connected to said second movable stage;
a first drive mechanism, functionally connected to the first movable stage, which moves said first movable stage in said first direction;
a second drive mechanism, functionally connected to the second stage, which moves said second movable stage in said second direction; and
a controller functionally connected to said first interferometer system, said second interferometer system, said first drive mechanism and said second drive mechanism, which converts positional information in said second direction of said second movable stage outputted from said second interferometer system to first speed information and speed controls said second drive mechanism so that said first speed information may correspond to a constant speed v, and which converts positional information in said first direction of said first movable stage outputted from said first interferometer system to second speed information and speed controls said first drive mechanism so that said second speed information may correspond to a constant speed v/β, where β is a projection magnification of the image of the pattern on said first object projected by said projection optical system.
0. 1. An exposure apparatus for radiating exposure light on a predetermined illumination area on a mask on which a pattern to be transferred is formed, and exposing the pattern on a photosensitive substrate, comprising:
a scanning system for synchronously scanning the mask and the photosensitive substrate in a predetermined first direction of the illumination area while maintaining a predetermined speed ratio; and
an illumination condition setting portion for setting the illumination area to be rectangular, and letting a light intensity distribution of the illumination area in a second direction substantially perpendicular to the first direction have a trapezoidal shape so that a middle portion of the distribution exhibits a substantially constant light intensity, and two side portions of the distribution exhibit a gradually decreasing light intensity.
0. 2. An apparatus according to
0. 3. An apparatus according to
0. 4. An apparatus according to
storage portion for storing a relative positional difference between the mask and the photosensitive substrate when the mask and the photosensitive substrate are to be synchronously scanned in the first direction; and
a controller for controlling a position of at least of one of the mask and the photosensitive substrate such that the relative positional difference in the first scanning operation with respect to the mask and the photosensitive substrate coincides with that in the second scanning operation.
0. 5. An apparatus according to
M=(n·LP−LT)/(n+1) where n is an integer of not less than one, LP is a length of an illumination area on the mask in the second direction, and LT is a width of a pattern area, formed on the mask, in the second direction.
0. 6. An apparatus according to
n·(LP−M)/β 0. 7. A projection exposure apparatus comprising:
a pulse light source for pulse-emitting exposure light;
an illumination optical system for illuminating a predetermined illumination area on a mask, on which a pattern to be transferred is formed, with the exposure light;
a projection optical system for projecting an image of the pattern, irradiated with the exposure light, onto a photosensitive substrate;
a scanning system for synchronously scanning the mask and the photosensitive substrate at least twice in a predetermined first direction of the illumination area while maintaining a predetermined speed ratio;
a substrate moving system for moving the photosensitive substrate in a second direction substantially perpendicular to the first direction while first and second scanning operations with respect to the mask and the photosensitive substrate are performed by said scanning system; and
a controller for controlling at least one of said pulse light source and said scanning system such that a position of the photosensitive substrate in the first direction at the time when said pulse light source performs pulse emission, in the first scanning operation with respect to the photosensitive substrate and the mask coincides with that in the second scanning operation.
0. 8. An apparatus according to
0. 9. A scanning exposure apparatus comprising:
a scanning system for synchronously scanning a mask and a photosensitive substrate for scanning exposure; and
an adjusting system for moving the mask to decrease a positional deviation between the mask and the substrate, independently of scanning of the mask which is performed by said scanning system, during the scanning exposure.
0. 10. An apparatus according to
a projection optical system for projecting a pattern image of the mask onto the substrate; and wherein
said scanning system includes a mask stage for scanning the mask in a direction perpendicular to an optical axis of said projection optical system and a substrate stage for scanning the substrate in the direction perpendicular to the optical axis, and causes the mask stage and the substrate stage to scan at a speed ratio corresponding to a projecting magnification of said projection optical system.
0. 11. An apparatus according to
said adjusting system includes a finely movable stage for relatively moving the mask on said mask stage and a driving member for finely driving said finely movable stage in the direction perpendicular to said optical axis.
0. 12. An apparatus according to
a first measuring system for measuring a position of the mask within a plane perpendicular to said optical axis; and
a second measuring system for measuring a position of the substrate within a plane perpendicular to said optical axis, and wherein
said adjusting system includes a controller for controlling the driving member in accordance with signals from said first and second measuring systems.
0. 13. An apparatus according to
said first measuring system includes a rotational angle detecting device for detecting a rotational angle of the mask within the plane perpendicular to said optical axis.
0. 14. An apparatus according to
said finely movable stage includes a mirror having a reflecting surface substantially perpendicular to said plane, and
said first measuring system includes an interferometer for radiating a light beam onto said reflecting surface and receiving the light beam reflected by said reflecting surface.
0. 15. A scanning exposure apparatus for projecting a pattern image of a mask onto a sensitive plate through a projection optical system in a scanning manner, the exposure apparatus comprising:
(a) a plate stage for scanning the plate in at least one-dimensional direction under said projection optical system for the scanning exposure;
(b) a first mask stage for scanning the mask in at least said one-dimensional direction above said projection optical system for the scanning exposure;
(c) a second mask stage for finely moving the mask on said first mask stage in each of translational and rotational directions;
(d) a first driving system for synchronously driving said plate stage and said first mask stage with a predetermined velocity ratio for the scanning exposure;
(e) a detecting system for detecting a positional deviation amount between the mask and the plate in a real time manner during the scanning exposure; and
(f) a second driving system for driving said second mask stage to decrease the detected deviation amount during the scanning exposure.
0. 16. The scanning exposure apparatus according to
0. 17. The scanning exposure apparatus according to
0. 18. The scanning exposure apparatus according to
0. 19. The scanning exposure apparatus according to
0. 20. The scanning exposure apparatus according to
0. 21. The scanning exposure apparatus according to
0. 22. The scanning exposure apparatus according to
0. 23. A scanning exposure apparatus for projecting a pattern image of a mask onto a sensitive plate through a projection optical system in a scanning manner, the exposure apparatus comprising:
(a) a plate stage for moving the plate in at least one-dimensional direction under said projection optical system which has an imaging reduction ratio 1/β;
(b) a first mask stage for moving the mask in at least said one-dimensional direction above said projection optical system;
(c) a second mask stage for finely moving the mask on said first mask stage in each of translational and rotational direction;
(d) an illuminating system for irradiating the mask with a radiation having a slit shaped distribution elongated perpendicular to said one-dimensional direction on the mask in order to project a slit shaped partial pattern image of the mask onto the plate through said projection optical system;
(e) a first driving system for synchronously, relatively driving said plate stage and first mask stage with a velocity ratio B for the scanning exposure of the plate by said slit shaped partial pattern image of the mask;
(f) a detecting system for detecting a deviation amount from an ideal positional relation of the mask and the plate occurring at a term of the scanning exposure; and
(g) a second driving system for driving said second mask stage to correct the deviation during the scanning exposure when said detected deviation amount is out of a predetermined tolerance.
0. 24. The scanning exposure apparatus according to
0. 25. The scanning exposure apparatus according to
0. 26. The scanning exposure apparatus according to
0. 27. The scanning exposure apparatus according to
0. 28. The scanning exposure apparatus according to
0. 29. A scanning exposure apparatus for projecting a pattern image of a mask onto a sensitive plate through a projection system having a predetermined magnification ratio in a scanning manner, the apparatus comprising:
(a) a scanning system for synchronously, relatively scanning the mask and the plate with respect to a projection field of said projection system at a velocity ratio corresponding to said magnification ratio during the scanning exposure;
(b) a finely movable stage provided on said scanning system for finely moving the mask relative to said scanning system in each of translational and rotational directions;
(c) a detecting system for detecting a positional deviation amount between an ideal positional relation and an actual positional relation of the mask and the plate during the scanning exposure; and
(d) a control system for driving said finely movable stage based on said detected deviation amount in order to decrease the positional deviation of the mask and the plate.
0. 30. A scanning exposure method in which a pattern area of a mask is transferred onto a sensitive plate through a projection optical system in a scanning manner, the method comprising the steps of:
(a) irradiating the mask with a radiation having a slit shaped intensity distribution in order to project a slit image portion of said pattern area of the mask toward the plate through said projection optical system;
(b) synchrouously scanning each of the mask and the plate relative to said projection optical system in a scanning direction perpendicular to a longitudinal direction of said slit image portion at a predetermined velocity ratio by using a scanning mechanism for the scanning exposure;
(c) detecting a deviation value between an ideal positional relation and an actual positional relation of the mask and the plate at a term of the scanning exposure; and
(d) correcting a position of the mask determined by said scanning mechanism so as to decrease said detected deviation value by using a fine moving mechanism provided on said scanning mechanism at the term of the scanning exposure.
0. 31. The scanning exposure method according to
0. 32. The scanning exposure method according to
0. 33. A scanning exposure method in which a pattern area of a mask is transferred onto a sensitive plate through a projection system in a scanning manner, the method comprising the steps of:
(a) irradiating the mask with a radiation in order to project an image portion of said pattern area of the mask onto the plate through said projection system;
(b) synchronously scanning each of the mask and the plate relative to said projection system in a scanning direction at a predetermined velocity ratio by using a scanning mechanism for the scanning exposure;
(c) detecting a deviation between an ideal positional relation and an actual positional relation of the mask and the plate at a term of the scanning exposure; and
(d) correcting a position of the mask determined by said scanning mechanism for decreasing said detected deviation by using a fine moving mechanism provided on said scanning mechanism at the term of the scanning exposure.
0. 34. A scanning exposure apparatus for projecting a pattern image of a mask onto a sensitive plate through a projection system in a scanning manner, the exposure apparatus comprising:
(a) a plate stage for moving the plate under said projection system in an X direction for the scanning exposure and in a Y direction perpendicular to the X direction;
(b) a first mask stage for moving the mask in the X direction for the scanning exposure above said projection system;
(c) a second mask stage for finely moving the mask on said first mask stage in each of translational and rotational directions;
(d) first driving means for synchronously driving each of said plate stage and said first mask stage with a predetermined velocity ratio in the X direction during the scanning exposure; and
(e) second driving means for driving said plate stage and said second mask stage to maintain a translational relation of the mask and plate in the Y direction and for driving said second mask stage to maintain a relative rotational relation of the mask and the plate, during the scanning exposure.
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Therefore, the acceleration b is lower than the acceleration a, and positional control of the reticle side fine adjustment stage 21 hardly affects the constant speed scanning operation of the reticle side scanning stage 20, thus realizing stable speed control.
A projection exposure apparatus according to the second embodiment of the present invention will be described next with reference to
Referring to
The reticle 7 is held on a reticle stage 61. Movable mirrors 62 are attached to the reticle stage 61 in the X direction (a lateral direction parallel to the drawing surface of
In this case, a left side portion of the area 75a and a right side portion of the area 75b are superposed on each other at a connection area 75c having the width M in the Y direction, and the connection portion 75c is scanned by the area 43a or 43b in which the light intensity (illuminance) of the illumination area 43 gradually decreases. With this operation, the illuminance distribution of the connection portion 75c is made uniform, and the position deviation of a transferred pattern can be prevented. In addition, in order to make the illuminance in the pattern area 75 constant, no area at an end portion of the pattern area 75 in the Y direction is scanned by the area 43a or 43b in which the illuminance of the illumination area 43 gradually decreases. Since the Y-direction width of the area, in the illumination area 43, in which the illuminance is constant is represented by L, and the Y direction width of the pattern area 75 is represented by LT, the Y-direction width M of the area 43a or 43b in which the illuminance gradually decreases to 0 is given by:
M=LT−2·L (2)
In general, the pattern area 75 is scanned n times in the X direction by the illumination area 43 to transfer a pattern of the pattern area 75 onto a wafer 14. In order to prevent the formation of an area which is illuminated only with the area 43a or 43b in which the illuminance gradually decreases, the width M of the area 43a or 43b in which the illuminance gradually decreases may be set as follows:
M=(n·LP−LT)/(n+1) (3)
The condition for the width β·D of the exposure area 43 P in the X direction as the relative scanning direction will be described next. In this case, provided that the pulse emission period (i.e., the reciprocal of an emission frequency f) of the pulse laser source 52 in
β·D=m·ΔL=m·T·V (4)
Although energy corresponding to m pulses is radiated on exposure points which are scanned once by the two side areas 43 aP and 43 bP of the exposure area 43 P, the radiated energy is lower than that radiated on the other exposure points. However, as described above, in the second embodiment, since a connection portion is scanned twice by the areas 43 aP and 43 bP in a stitching operation, energy represented by m·ΔE is also radiated on each exposure point of the connection portion. Therefore, the same amount of energy is radiated on all the exposure points on the wafer, preventing illuminance irregularity.
An example of stitching and slit scanning exposure in the second embodiment will be described next. Referring to
With this operation, as shown in
When the first slit scanning exposure operation is completed, the reticle 7 is moved in the Y direction by stitching so as to move the illumination area 43 to an upper left position in the pattern area 75 along a trace 78, as shown in FIG. 8. Referring to
As shown in
With this control, as shown in
As has been described above, all the exposure points which are scanned by the exposure area 43 P once are irradiated with a pulse laser corresponding to m pulses. The exposure point Q3 inside the connection portion 80c is irradiated with the same amount of energy as that radiated on an exposure point which is scanned once by two scanning operations of the exposure area 43 P (i.e., an exposure point outside the connection portion). Therefore, the illuminances at all the exposure points on the wafer 14 are made uniform. In addition, at an exposure point inside the connection portion 80c, the number of pulses radiated in two scanning operations is 2 m, which is twice that radiated at an exposure point outside the connection portion. Therefore, at the connection portion 80c, especially variations in the energy of a pulse laser beam for each pulse and the influences of speckles are reduced. More specifically, at the connection portion 80c, the variations in illuminance due to variations in the energy of a pulse laser beam for each pulse are reduced to ½1/2 the variations at a non-connection portion.
In the second embodiment, when slit scanning exposure is to be performed with respect to the area 80a on the wafer 14 shown in
In general, if the positioning precisions of the reticle stage 61 and wafer stages (27 and 28) in the X and Y directions are respectively represented by Δx and Δy, overlapping errors at the connection portion 80c are respectively represented by 21/2Δx and 21/2Δy. In contrast to this, according to the method of the second embodiment, the overlapping errors are only Δx and Δy because the positions of the reticle 7 and the wafer 14 in exposing the area 80b by the second scanning operation are controlled in accordance with shot distortion caused in exposing the area 80a by the first scanning operation.
A method of exposing the entire exposure surface of the wafer 14 will be described next. Consider a case where the stitching and slit scanning exposure operation described in the second embodiment is applied to this exposure method. As shown in
According to another exposure method, as shown in
In the first and second embodiments, since a refracting optical system is used as the projection optical system 13, a rectangular illumination area is set on the reticle 7, as shown in
Assume that a width D of the illumination area 81 in the relative scanning direction is constant, and that the longitudinal direction, of the illumination area 81, which is perpendicular to the relative scanning direction is defined as the Y direction. In this case, the Y-direction illuminance distribution of the illumination area 81 is set to be trapezoidal, as shown in FIG. 13B. That is, in two sides areas 81a and 81b of the illumination area 81 in the Y direction, the illuminances linearly decrease to 0. By setting such as illuminance distribution, the illuminance irregularity at the connection portion in a stitching operation can be reduced, similar to the second embodiment described above.
Consider a case where a regular hexagonal illumination area is set, as a modification of the second embodiment described above. The arrangement of this modification is the same as that of the second embodiment except for the shape of an illumination area.
In the modification, in the first and second wafer scanning operations, the wafer is set at the same X-direction position when a pulse laser source performs pulse emission. More specifically, as shown in
Furthermore, in the modification, the pulse emission timing is controlled such that a wafer is set at the same X direction position when the pulse laser source performs pulse emission in the first and second scanning operations. However, a wafer side, X stage 27 may be controlled.
In the second embodiment and its modification, a stitching operation using one reticle has been described. However, a plurality of reticles may be placed on the same reticle stage, and scanning exposure may be repeatedly performed while the reticles are interchanged with each other in a stitching operation. In addition, the reticle stage in the second embodiment and its modification may be constituted by a reticle side scanning stage and a reticle side fine adjustment stage, as in the case of the reticle stage system in the first embodiment.
The present invention is not limited to the first and second embodiments described above, and various changes and modifications can be made without departing from the scope and spirit of the invention.
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