The invention relates to a system (1) for moving a support plate (2), the support plate (2) being, in a so-called neutral position, substantially parallel to an xy plane defined by a so-called x direction and a so-called y direction, said the system comprising at least two control stages (E1, E2) which are superimposed in a direction z orthogonal to said the x and y directions, the two control stages (E1, E2) being secured to each other, at least one of said the control stages (E1, E2) comprising a control module (M1, M2), the control module (M1, M2) comprising only movement units designed so as to each generate a translational movement in an xy plane, respectively in different directions.
|
0. 9. A system for generating xi and Yi movements of a first upper plate relative to an xy plane, the xi and Yi movements parallel to the xy plane, the system comprising:
a first control module configured to generate a translational movement in the xy plane, wherein the first control module comprises:
a first lower plate having an upper face;
the first upper plate having a lower face spaced apart from and opposing the upper face of the lower plate;
two movement units fixed to the upper face of the first lower plate, each movement unit configured to generate translational movement along a direction of movement;
a straight guide rail coupled to each of the movement units, such that the straight guide rail moves with the movement of the movement unit, each straight guide rail having a sliding direction arranged orthogonally to the direction of movement; and
a mobile carriage slidably coupled to each of the straight guide rails and configured to be freely mobile along the associated straight guide rail in the sliding direction, each mobile carriage coupled to the lower face of the first upper plate, such that translational movement of the movement units creates the translational movement of the first upper plate.
0. 17. A system for generating θx, θY and Zi movements relative to an xy plane, the θx movement around an x direction parallel to the xy plane, the θY movement around a y direction parallel to the xy plane, the Zi movement along a z direction orthogonal to the xy plane, the system comprising:
a lower plate having an upper face;
an upper plate;
three movement units fixed to the upper face of the lower plate, each movement unit configured to generate movement along a direction of movement parallel to the xy plane;
an inclined guide rail coupled to each one of the movement units such that each inclined guide rail moves with the translational movement of the associated movement unit, each inclined guide rail having a sliding direction arranged longitudinally to the direction of movement and disposed at an angle with respect to the xy plane; and
a mobile carriage coupled to each one of the inclined guide rails and configured to be freely mobile along the associated inclined guide rail in the sliding direction, each one of the mobile carriages comprising a ball configured to rotate with respect to the associated mobile carriage, each ball articulated to the upper plate, such that translational movement of the three movement units generates the θx, θY and Zi movements.
1. A system for generating movement of a support plate in a neutral position, substantially parallel to an xy plane defined by along an x direction and a y direction relative to an xy plane, said system configured to move said support plate in at least one of six degrees of freedom, corresponding, respectively, to an xi translation along the x direction and a θx rotation around said x direction, to a Yi translation along the y direction and a θY rotation around said y direction, to a Zi translation along a z direction and a θZ rotation around said z direction, with the z direction being orthogonal to said x and y directions, said system comprising:
at least two control stages carrying the support plate, the control stages superimposed in the z direction and being secured to each other, at least one of said control stages comprising a first control module configured to generate a translational movement of the support plate in only parallel to the xy plane, wherein the first control module comprises:
a first lower plate having an upper face;
a first upper plate having a lower face spaced a distance apart from and opposing the upper face, the first upper plate movingly associated with the support plate;
at least two movement units having a movable portion capable of reciprocal configured to generate translational movement along a reciprocating direction of movement, the at least two movement units fixed on the upper face of the first lower plate;
a straight guide rail coupled to the movable portion of each one of said movement units, such that the straight guide rail moves with the reciprocal movement of the movable portion movement unit, each straight guide rail having a sliding direction arranged orthogonally to the reciprocating direction of movement; and
a mobile carriage slidably coupled to each one of the straight guide rails and configured to freely slide along the associated straight guide rail in the sliding direction, each mobile carriage coupled to the lower face of the first upper plate, such that the reciprocal translational movement of the movable portions movement units creates the translational movement of the first upper plate and, thereby, translational movement of the support plate.
2. The system of
3. The system of
a third movement unit having a movable portion capable of reciprocal configured to generate translational movement along a reciprocating direction of movement, the third movement unit fixed on the upper face of the first lower plate;
a straight auxiliary guide rail coupled to the movable portion of the third movement unit, such that the straight auxiliary guide rail moves with the reciprocal translational movement of the movable portion of the third movement unit, the straight auxiliary guide rail having an auxiliary sliding direction different from both of the reciprocating directions direction of the two movement units; and
an auxiliary mobile carriage slidably coupled to the straight auxiliary guide rail and configured to freely slide in the auxiliary sliding direction, the auxiliary mobile carriage fixed to the lower face of the first upper plate.
4. The system of
5. The system of
6. The system of
7. The system of
a second lower plate having an upper face;
a the second upper plate having a lower face spaced a distance apart from and opposing the upper face of the second lower plate, the second upper plate movingly associated with the support plate;
three movement units each having a movable portion capable of reciprocal configured to generate translational movement along a reciprocating direction of movement, the three movement units fixed on the upper face of the second lower plate;
an inclined guide rail coupled to the movable portion of each one of the movement units such that each inclined guide rail moves with the reciprocal translational movement of the movable portion of the three movement units, each inclined guide rail having a sliding direction arranged longitudinally to the reciprocating direction of movement and disposed at an angle with respect to the xy plane; and
a mobile carriage slidably coupled to each one of the inclined guide rails and configured to freely slide along the associated inclined guide rail in the sliding direction, each one of said mobile carriages comprising a ball configured to rotate with respect to the associated mobile carriage, each ball articulated to the lower face of the first upper plate, such that reciprocal movement of the movable portions the translational movement of the three movement units generates the θx, θY, and Zi movements of the second upper plate and, thereby, θx, θY, and Zi movement of the support plate.
8. The system of
an auxiliary control stage configured to generate an xi movement of the first and second control modules;
an auxiliary control stage configured to generate a Yi movement of the first and second control modules; and
an auxiliary control stage configured to generate a θZ movement of the first and second control modules.
0. 10. The system of claim 9, wherein the movement units are arranged in the xy plane and positioned to have different directions of translation that form, respectively, an angle of 120° therebetween.
0. 11. The system of claim 9, wherein the first control module is configured to generate xi and Yi movement, the system further comprising:
a third movement unit configured to generate translational movement along a direction of movement, the third movement unit fixed on the upper face of the first lower plate;
a straight auxiliary guide rail coupled to the third movement unit, such that the straight auxiliary guide rail moves with the translational movement of the third movement unit, the straight auxiliary guide rail having an auxiliary sliding direction different from both the direction of movement of the two movement units; and
a mobile carriage slidably coupled to the straight auxiliary guide rail and configured to be freely mobile in the auxiliary sliding direction, the mobile carriage fixed to the lower face of the first upper plate.
0. 12. The system of claim 11, wherein each one of the mobile carriages is provided with a rotation system coupled to the lower face of the first upper plate and configured to generate θZ rotation in the first upper plate.
0. 13. The system of claim 9, wherein each one of the mobile carriages is provided with a rotation system coupled to the lower face of the first upper plate and configured to generate θZ rotation of the first upper plate.
0. 14. The system of claim 13, further comprising an auxiliary control stage configured to generate an xi movement of the first control module.
0. 15. The system of claim 9, further comprising a second control module configured to generate θx, θY, and Zi movements relative to an xy plane, the second control module comprising:
a second lower plate having an upper face;
a second upper plate;
three movement units fixed to the upper face of the second lower plate, each movement unit configured to generate translational movement along a direction of movement;
an inclined guide rail coupled to each one of the movement units such that each inclined guide rail moves with the translational movement of the associated movement unit, each inclined guide rail having a sliding direction arranged longitudinally to the direction of movement and disposed at an angle with respect to the xy plane; and
a mobile carriage slidably coupled to each one of the inclined guide rails and configured to be freely mobile along the associated inclined guide rail in the sliding direction, each one of the mobile carriages being provided with a ball configured to rotate with respect to the associated mobile carriage, each ball articulated to a lower face formed on the second upper plate, such that translational movement of the three movement units generates the θx, θY and Zi movements of the second upper plate.
0. 16. The system of claim 15, further comprising at least one of the following auxiliary control stages:
an auxiliary control stage configured to generate an xi movement of at least one of the first or second control modules;
an auxiliary control stage configured to generate a Yi movement of at least one of the first or second control modules; and
an auxiliary control stage configured to generate a θZ movement.
0. 18. The system of claim 17, wherein the movement units are arranged in the xy plane and positioned to have different directions of translation that form, respectively, an angle of 120° between them.
0. 19. The system of claim 17, wherein the inclined guide rail is coupled to each of the movement units via a beveled support element.
0. 20. The system of claim 17, further comprising at least one of the following auxiliary control stages:
an auxiliary control stage configured to generate an xi movement of the system, wherein the system is carried by the auxiliary control stage;
an auxiliary control stage configured to generate a Yi movement of the system, wherein the system is carried by the auxiliary control stage; and
an auxiliary control stage configured to generate a θZ movement, wherein the auxiliary control stage configured to generate a θZ movement is mounted on the upper plate of the system.
0. 21. The system of claim 20, wherein the auxiliary control stage configured to generate the xi movement is carried by the auxiliary control stage configured to generate the Yi movement.
0. 22. The system of claim 20, wherein the auxiliary control stage configured to generate the Yi movement is carried by the auxiliary control stage configured to generate the xi movement.
|
one of these movement units U1 and U2 therefore defines a motorised motorized axis (according to its direction (or axis) of translation). Each movement unit (U1 and U2) includes a fixed portion and a movable portion. The fixed portion of each movement unit is configured to be fixed to a plate (e.g., the lower plate 5 for movement unit U1, or the lower plate 13 for movement unit U2). The movable portion of each movement unit is capable of reciprocal movement along a reciprocating direction (e.g., L3 as shown in FIG. 6) relative to the fixed portion of the movement unit. The movable portion of each movement unit is configured to carry a load (e.g., the straight guide rail 7 shown in FIG. 3, and the inclined guide rail 15) attached thereto.
The sought position of the plate 2 is obtained by a particular combination of controls (and therefore of positioning) of the various movement units U1 and U2 considered.
In addition, the movement units U1 and U2 are designed to generate, each one, a translational movement, respectively in different directions. More precisely, the movement units U1 and U2 are arranged in the XY plane and positioned in such a way as to have different directions of translation that form, respectively, preferably an angle of 120° between them.
In the preferred embodiment, shown in
More precisely, in a preferred embodiment, the control module M1 comprises, as shown in
Each one of the three guide rails 7 is mounted on one of the three movement units U1, to which it is associated.
As such, the control module M1 comprises one guide rail 7 per movement unit U1 and each movement unit U1 is provided with a guide rail 7.
Each one of the straight guide rails 7 is arranged orthogonally to the direction of movement of the associated movement unit U1, as shown for a straight guide rail 7 on the right portion of
Each one of the guide rails 7 is designed in such a way as to be moved (in the L1 direction) under the action of the associated movement unit U1.
Furthermore, each one of the guide rails 7 carries a mobile carriage 8. This mobile carriage 8 is designed to be freely mobile in the direction L2, i.e. orthogonally to the direction of movement L1 of the associated movement unit U1.
Moreover, each one of the mobile carriages 8 is provided with a rotation system 9 comprising, preferably, a ball bearing 10, which is designed to freely rotate in the plane of the upper plate 6 corresponding to the XY plane in the neutral position.
The three rotation systems 9 are each connected to the lower face 6A of the upper plate 6, by the intermediary of usual fastening elements 11 arranged in the upper plate 6.
In addition, the control module M1 comprises a closed side wall 12, which is integral with the lower plate 5, as shown in
Consequently, a command by an operator or an automatic control system of a movement unit U1 generates the movement of the guide rail 7. During this movement of the guide rail 7, the mobile carriage 8 can be moved freely and act on the position of the upper plate 6.
Moreover, in a preferred embodiment, the second control module M2 comprises, as shown in
Each one of the three guide rails 15 is mounted on one of the three movement units U2, to which it is associated. As such, the control module M2 comprises one guide rail 15 per movement unit U2 and each movement unit U2 is provided with a guide rail 15.
Each one of the movement units U2 is fixed on the upper face 13A in order to generate a movement in a given direction in the XY plane, as shown by the L3 direction for the movement unit U2 which can be seen on the right of
Furthermore, each one of the guide rails 15 is arranged longitudinally to the direction of movement L3 of the associated movement unit U2. In addition, it is designed in such a way as to be moved under the action of the associated movement unit U2. As such, each of the guide rails 15 has a sliding direction arranged longitudinally to the direction of movement L3 of the associated movement unit U2 and disposed at an angle relative to the XY plane.
Moreover, each one of the guide rails 15 carries a mobile carriage 16 which is designed to be freely mobile. Each one of the guide rails 15 is mounted inclined, in the Z vertical direction with respect to the associated guide rail.
As shown in
Due to its positioning on the movement unit U2, the mobile carriage 17 16 is moved in the XY plane in the L3 direction. As shown in
Moreover, the mobile carriage 16 comprises a bevelled support element 18, that cooperates with the bevelled support element 17, and which is adapted to the latter so that the upper face of the support element 18 is substantially parallel to the lower face of the support element 17.
Furthermore, each one of the carriages 18 is provided with a ball 19 designed to be freely rotating.
The three balls 19 are each mounted articulated to the lower face 14A of the upper plate 14.
Due in particular to its modular architecture and to the use of movement units U1 and U2 designed to generate only translational movements, the system 1 (for generating movement) such as described hereinabove is very compact, and in addition, it has an extended area of work, in particular in relation to the usual systems (in particular of the hexapod type).
In the preferred embodiment of the system 1 such as described hereinabove and shown in
However, in the framework of this invention, and as specified below:
As such, in a first alternative embodiment with respect to that of the aforementioned
In this first alternative embodiment (specifically not shown), the control module M1 comprises only two movement units U1, as well as a straight auxiliary guide rail. This auxiliary guide rail replaces the third movement unit U1 of the embodiments of
The auxiliary guide rail is arranged in a direction different from the directions of movement of the two movement units and identical to that of the third movement unit of
In addition, the guide rail carries a mobile carriage designed to be freely mobile, and the auxiliary guide rail is arranged in such a way that the mobile carriage can be moved, freely, in the direction of movement of said third replaced movement unit.
The three mobile carriages are directly fixed on the lower face 6A of the upper plate 6 and are not provided with a rotation system.
The movement module in accordance with this first alternative embodiment can be associated within a system for generating movement:
Furthermore, in a second alternative embodiment, the first control module M1 is designed to generate only Yi and θZ movements.
In this second alternative embodiment, the control module M1 comprises two movement units U1, as well as a straight auxiliary guide rail.
The auxiliary guide rail is arranged in a direction different from the directions of movement of the two movement units and identical to that of the third movement unit of
In addition, the auxiliary guide rail as well as the two movement units each carries a mobile carriage designed to be freely mobile.
In this case, each one of the three mobile carriages, similar for example to the mobile carriage 8, is provided with a rotation system designed to be freely rotating in the plane XY, such as the aforementioned rotation system 9.
In addition, the three rotation systems are each connected to the lower face 6A of the upper plate 6A.
In association with this second embodiment, the system 1 can comprise, in a particular embodiment, an auxiliary control stage E3 shown as a thin line (for the purpose of illustration) in
This auxiliary control stage E3 can comprise a movement element 20 in order to generate the Xi movement. In a particular embodiment, the movement element 20 is provided with a guide rail 21 carrying a mobile carriage 22, and means for controlling the movement (not shown) of the mobile carriage 22 on the guide rail 21, such as an electric motor for example.
The mobile carriage 22 is therefore mounted mobile on the guide rail 21 and it carries the control module M1 in accordance with the second alternative embodiment.
Moreover, in another alternative embodiment (shown in
All of the combinations of the control module M2 with one or several of the auxiliary control stages E4 to E6 are possible, according to the applications considered (and of the movements that are to be controlled).
As such, in a first embodiment shown in
The auxiliary control stage E4 can comprise a movement element 23 in order to generate the Yi movement. In a particular embodiment, the movement element 23 is provided with a guide rail 25 carrying a mobile carriage 26, and means for controlling the movement (not shown) of the mobile carriage 26 on the guide rail 25, such as an electric motor for example, which can be controlled, in a usual manner, by an operator or by an automatic control system. The mobile carriage 26 is therefore mounted mobile on the guide rail 25 and it carries the auxiliary control stage E5.
The auxiliary control stage E5 can comprise a movement element 24 in order to generate the Xi movement. In a particular embodiment, the movement element 24 is also provided with a guide rail 27 also carrying a mobile carriage 28, and means for controlling the movement (not shown) of the mobile carriage 28 on the guide rail 27, such as an electric motor for example, which can be controlled, usually, by an operator or by an automatic control system. The mobile carriage 28 is therefore mobile on the guide rail 27 and it carries the control module M2.
The system for generating movement according to this first embodiment is therefore able to generate Xi, Yi, Zi, θX and θY movements.
Furthermore, in a second preferred embodiment, shown in
As for the auxiliary control stage E6, it can comprise an element for driving a rotation 29, for example a motor, in order to generate the θZ movement, i.e. in order to generate a rotation around the Z axis. In the example shown in
The system for generating movement according to this second embodiment is therefore able to generate the Xi, Yi, Zi, θX, θY and θZ movements (i.e. movements in six degrees of freedom).
Patent | Priority | Assignee | Title |
Patent | Priority | Assignee | Title |
10073043, | Jul 03 2014 | BARCLAYS BANK PLC, AS COLLATERAL AGENT | Multi-axis positioning device |
10393308, | Jan 06 2016 | MICRO-CONTRÔLE - SPECTRA-PHYSICS SAS | System for generating the movement of a support plate in six degrees of freedom |
3142521, | |||
3155383, | |||
4607578, | Jun 02 1983 | Sumitomo Electric Industries Ltd | Positioning mechanism |
4934647, | Aug 09 1989 | Northrop Corporation | Universal mount |
5031547, | Mar 24 1988 | Hihaisuto Seiko Kabushiki Kaisha | Mechanism for moving a table lengthwise and crosswise and for turning the table |
5163651, | Mar 13 1990 | NTN Corporation | Movable table |
5228358, | Feb 21 1990 | Canon Kabushiki Kaisha | Motion guiding device |
5323712, | Aug 26 1987 | Kabushiki Kaisha Toshiba | Table moving apparatus |
5613403, | Jul 11 1994 | Nippon Thompson Co., Ltd. | Drive apparatus equipped with a ball screw and an XY drive apparatus containing said drive apparatus |
5685232, | Oct 19 1993 | Canon Kabushiki Kaisha | Positioning stage device exposure apparatus and device manufacturing method utilizing the same |
5794541, | Feb 07 1996 | HIHAISUTO SEIKO CO , LTD | Multi-degree-of-freedom table support unit, and a multi-degree-of-freedom table mechanism |
6077078, | Dec 27 1996 | Thomson-CSF | Motion simulator device with at least three degrees of freedom |
6405659, | May 01 2000 | Nikon Corporation | Monolithic stage |
6408767, | Mar 01 2000 | Nikon Corporation | Low stiffness suspension for a stage |
6681703, | Mar 21 2001 | Renishaw PLC | Tiltable table |
6891601, | Jul 17 2003 | BARCLAYS BANK PLC, AS COLLATERAL AGENT | High resolution, dynamic positioning mechanism for specimen inspection and processing |
7451710, | Dec 24 2003 | Seiko Instruments Inc | Actuator and table device |
8575791, | Dec 17 2010 | National Formosa University | Manufacturing-process equipment |
9739414, | Dec 10 2014 | Metal Industries Research and Development Centre | Multi-axis carrying device |
20040129856, | |||
20040144288, | |||
20040187743, | |||
20070119347, | |||
20080043325, | |||
20110219990, | |||
20120301067, | |||
20130112118, | |||
20150308921, | |||
CN103381601, | |||
DE19951919, | |||
EP946843, | |||
EP1501065, | |||
EP2584551, | |||
EP2816723, | |||
FR2757925, | |||
JP2004156679, | |||
JP2004301256, | |||
JP20044195620, | |||
JP2005140185, | |||
JP2012051054, | |||
JP2757925, | |||
KR20000062338, |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Aug 30 2018 | DURAND, ERIC | MICRO-CONTRÔLE - SPECTRA-PHYSICS SAS | NUNC PRO TUNC ASSIGNMENT SEE DOCUMENT FOR DETAILS | 063906 | /0759 | |
Sep 10 2018 | RETY, BRUNO | MICRO-CONTRÔLE - SPECTRA-PHYSICS SAS | NUNC PRO TUNC ASSIGNMENT SEE DOCUMENT FOR DETAILS | 063906 | /0759 | |
Aug 25 2021 | MICRO-CONTRÔLE—SPECTRA-PHYSICS SAS | (assignment on the face of the patent) | / |
Date | Maintenance Fee Events |
Aug 25 2021 | BIG: Entity status set to Undiscounted (note the period is included in the code). |
Date | Maintenance Schedule |
Aug 15 2026 | 4 years fee payment window open |
Feb 15 2027 | 6 months grace period start (w surcharge) |
Aug 15 2027 | patent expiry (for year 4) |
Aug 15 2029 | 2 years to revive unintentionally abandoned end. (for year 4) |
Aug 15 2030 | 8 years fee payment window open |
Feb 15 2031 | 6 months grace period start (w surcharge) |
Aug 15 2031 | patent expiry (for year 8) |
Aug 15 2033 | 2 years to revive unintentionally abandoned end. (for year 8) |
Aug 15 2034 | 12 years fee payment window open |
Feb 15 2035 | 6 months grace period start (w surcharge) |
Aug 15 2035 | patent expiry (for year 12) |
Aug 15 2037 | 2 years to revive unintentionally abandoned end. (for year 12) |