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The ornamental design for a processing machine for electron beam lithography system, as shown. |
FIG. 1 is a front, top and right side elevational perspective view of a processing machine for electron beam lithography system showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left elevational view thereof;
FIG. 4 is a right elevational view thereof;
FIG. 5 is a top plan elevational view thereof;
FIG. 6 is a bottom plan elevational view thereof;
FIG. 7 is a rear elevational view thereof; and,
FIG. 8 is a rear, top and left side perspective view thereof.
Yamamoto, Takashi, Yamazaki, Takashi, Sakai, Hiroyuki, Miyata, Tomoyuki, Wada, Toshihiko, Ohnuma, Mitsuru, Hasimoto, Kazunori
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jan 25 1993 | YAMAMOTO, TAKASHI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | MIYATA, TOMOYUKI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | HASIMOTO, KAZUNORI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | OHNUMA, MITSURU | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | WADA, TOSHIHIKO | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | YAMAZAKI, TAKASHI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Jan 25 1993 | SAKAI, HIROYUKI | Hitachi, LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006997 | /0773 | |
Feb 08 1993 | Hitachi, Ltd. | (assignment on the face of the patent) | / |
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