Patent
   D424025
Priority
Aug 20 1997
Filed
Feb 02 1998
Issued
May 02 2000
Expiry
May 02 2014
Assg.orig
Entity
unknown
1
2
n/a
The ornamental design for a quartz combustion chamber, as shown.

FIG. 1 a perspective view of a quartz combustion chamber.

FIG. 2 a left side view thereof.

FIG. 3 a front elevational view thereof.

FIG. 4 a top plan view thereof.

FIG. 5 a bottom plan view thereof.

FIG. 6 a right side view thereof; and,

FIG. 7 a cross-sectional view taken along time 7--7 in FIG. 4.

Mori, Takahiro

Patent Priority Assignee Title
D604257, Oct 27 2005 COORSTEK KK Heater for semiconductor manufacturing
Patent Priority Assignee Title
5303671, Feb 07 1992 Tokyo Electron Limited System for continuously washing and film-forming a semiconductor wafer
5584934, Oct 13 1995 United Microelectronics Corp. Method and apparatus for preventing distortion of horizontal quartz tube caused by high temperature
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Feb 02 1998Tokyo Electron Limited(assignment on the face of the patent)
Apr 09 1998MORI, TAKAHIROTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0091500612 pdf
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