Patent
   D604257
Priority
Oct 27 2005
Filed
Apr 27 2006
Issued
Nov 17 2009
Expiry
Nov 17 2023
Assg.orig
Entity
unknown
1
7
n/a
The ornamental design for a heater for semiconductor manufacturing, as shown and described.

FIG. 1 is an enlarged front elevation view of a heater for semiconductor manufacturing showing our new design;

FIG. 2 is an enlarged left side elevation view, the right side being a mirror image thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is an enlarged top plan view of the area 55 shown in FIG. 3; and,

FIG. 6 is an enlarged bottom plan view of the area 66 shown in FIG. 4.

The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.

Honma, Hiroyuki, Yamaga, Kenichi, Inatomi, Yasuhiro

Patent Priority Assignee Title
D798250, Dec 01 2015 NuFlare Technology, Inc. Heater
Patent Priority Assignee Title
5408071, Jun 11 1992 SEVEX NORTH AMERICA, INC Electric heater with heat distributing means comprising stacked foil layers
5575941, Aug 31 1994 Cartridge heater
6061500, Jul 10 1998 Electronic heater for an aquarium
6407371, Dec 01 1998 COORSTEK KK Heater
7311520, Sep 24 2002 Tokyo Electron Limited Heat treatment apparatus
D424025, Aug 20 1997 Tokyo Electron Limited Quartz combustion chamber
JP1191934,
/////////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 20 2006INATOMI, YASUHIROTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
Apr 20 2006INATOMI, YASUHIROTOSHIBA CERAMICS CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
Apr 24 2006YAMAGA, KENICHITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
Apr 24 2006YAMAGA, KENICHITOSHIBA CERAMICS CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
Apr 27 2006Tokyo Electron Limited(assignment on the face of the patent)
Apr 27 2006Toshiba Ceramics Co., Ltd.(assignment on the face of the patent)
May 15 2006HONMA, HIROYUKITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
May 15 2006HONMA, HIROYUKITOSHIBA CERAMICS CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0180250001 pdf
Oct 01 2015Covalent Materials CorporationCOORSTEK KKCHANGE OF NAME & ADDRESS0384000465 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule