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Patent
D571739
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Priority
Aug 12 2005
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Filed
Nov 14 2005
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Issued
Jun 24 2008
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Expiry
Jun 24 2022
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Assg.orig
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Entity
unknown
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2
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15
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n/a
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The ornamental design for a semiconductor wafer delivery apparatus, as shown and described.
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FIG. 1 is a front elevational view of a semiconductor wafer delivery apparatus, showing my design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a cross-sectional view taken along line 7—7 in FIG. 1;
FIG. 8 is a top, front and right perspective view thereof; and,
FIG. 9 is a top and left rear perspective view thereof.
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Hosaka, Hiroki
Patent |
Priority |
Assignee |
Title |
5636960, |
Jul 29 1992 |
Tokyo Electron Limited |
Apparatus for detecting and aligning a substrate |
5740059, |
May 18 1995 |
JAPAN DISPLAY CENTRAL INC |
Method of transporting substrates and apparatus for transporting substrates |
5772386, |
Mar 28 1995 |
Brooks Automation GmbH |
Loading and unloading station for semiconductor processing installations |
5826129, |
Jun 30 1994 |
Tokyo Electron Limited |
Substrate processing system |
6132160, |
Jun 27 1997 |
Tokyo Electron Limited |
Substrate transferring apparatus |
6234738, |
Apr 24 1998 |
ASYST JAPAN INC |
Thin substrate transferring apparatus |
6811370, |
Mar 25 1999 |
n&k Technology, Inc. |
Wafer handling robot having X-Y stage for wafer handling and positioning |
6846149, |
Apr 02 1999 |
AVIZA TECHNOLOGY, INC |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
20020044860, |
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20020182040, |
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20020197138, |
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20030133776, |
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20040265100, |
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20050220581, |
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20070031222, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a