Patent
   D571739
Priority
Aug 12 2005
Filed
Nov 14 2005
Issued
Jun 24 2008
Expiry
Jun 24 2022
Assg.orig
Entity
unknown
2
15
n/a
The ornamental design for a semiconductor wafer delivery apparatus, as shown and described.

FIG. 1 is a front elevational view of a semiconductor wafer delivery apparatus, showing my design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a cross-sectional view taken along line 77 in FIG. 1;

FIG. 8 is a top, front and right perspective view thereof; and,

FIG. 9 is a top and left rear perspective view thereof.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Hosaka, Hiroki

Patent Priority Assignee Title
D935424, May 06 2019 Lam Research Corporation Semiconductor wafer processing tool
D962881, May 06 2019 Lam Research Corporation Semiconductor wafer processing apparatus
Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 14 2005Tokyo Electron Limited(assignment on the face of the patent)
Jan 18 2006HOSAKA, HIROKITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0175260610 pdf
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