Patent
   D572707
Priority
Dec 15 2006
Filed
Jun 14 2007
Issued
Jul 08 2008
Expiry
Jul 08 2022
Assg.orig
Entity
unknown
0
17
n/a
The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown and described.

FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:

FIG. 2 is a right side view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a sectional view taken along line 44 of FIG. 1 thereof; and,

FIG. 5 is a perspective view thereof.

Yamashita, Jun, Tian, Cai Zhong

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Executed onAssignorAssigneeConveyanceFrameReelDoc
May 11 2007YAMASHITA, JUNTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0194300325 pdf
May 11 2007TIAN, CAI ZHONGTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0194300325 pdf
Jun 14 2007Tokyo Electron Limited(assignment on the face of the patent)
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