Microwave introducing antenna for a plasma processing apparatus

Abstract

Description

FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:

FIG. 2 is a right side view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a sectional view taken along line 4—4 of FIG. 1 thereof; and,

FIG. 5 is a perspective view thereof.

Claims

The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.