Microwave introducing antenna for a plasma processing apparatus

The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.

FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:

FIG. 2 is a right side view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a sectional view taken along line 4—4 of FIG. 1 thereof; and,

FIG. 5 is a perspective view thereof.

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Executed on	Assignor	Assignee	Conveyance	Frame	Reel	Doc
May 18 2007	UEDA, ATSUSHI	Tokyo Electron Limited	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	019430	0656	pdf
May 18 2007	TIAN, CAI ZHONG	Tokyo Electron Limited	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	019430	0656	pdf
Jun 14 2007		Tokyo Electron Limited	(assignment on the face of the patent)

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