Top panel for microwave introduction window of a plasma processing apparatus

Abstract

Description

FIG. 1 is a front view of a top panel for microwave introduction window of plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof,

FIG. 3 is a right side view thereof,

FIG. 4 is a left side view thereof,

FIG. 5 is a top plan view thereof,

FIG. 6 is a bottom plan view thereof,

FIG. 7 is a sectional view taken along line 7—7 of FIG. 5;

FIG. 8 is an enlarged sectional view taken along line 8—8 of FIG. 7;

FIG. 9 is a perspective view thereof; and,

FIG. 10 is an enlarged detail view of the circled area 10 in FIG. 9.

The broken line showing of the top panel for microwave introduction window of a plasma processing apparatus is included for the purpose of illustrating portions of the microwave introduction window of a plasma processing apparatus and forms no part of the claimed design.

Claims

The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.