Gas supply pipe for manufacturing semiconductor wafers

Abstract

Description

FIG. 1 is a perspective view of the design for a gas supply pipe for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof;

FIG. 7 is a sectional view through line 7—7 of FIG. 2;

FIG. 8 is a sectional view through line 8—8 of FIG. 2; and,

FIG. 9 is a sectional view through line 9—9 of FIG. 2.

The rear view of the gas supply pipe for manufacturing semiconductor wafers appears the same as its front view shown in FIG. 1. It supplies reactive gas in a process tube for semiconductor manufacture.

Claims

The ornamental design for a gas supply pipe for manufacturing semiconductor wafers, as shown and described.