Patent
   D890572
Priority
Jul 19 2018
Filed
Dec 07 2018
Issued
Jul 21 2020
Expiry
Jul 21 2035
Assg.orig
Entity
unknown
6
13
n/a
We claim the ornamental design for a gas supply nozzle for substrate processing apparatus, as shown and described.

FIG. 1 is a front, top and right side perspective view of a gas supply nozzle for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 5.

Saiki, Koji, Tsuri, Makoto

Patent Priority Assignee Title
D924953, Jul 19 2018 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for substrate processing apparatus
D937385, Mar 20 2019 KOKUSAI ELECTRIC CORPORATION Return nozzle
D964443, Aug 18 2020 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for wafer processing apparatus
D965740, Jul 27 2020 KOKUSAI ELECTRIC CORPORATION Gas supply nozzle for substrate processing apparatus
D967941, Apr 28 2020 HYPERTHERM, INC Intensifier cylinder
ER1756,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 15 2018SAIKI, KOJIKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0477070279 pdf
Nov 15 2018TSURI, MAKOTOKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0477070279 pdf
Dec 07 2018KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
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