Patent
   D964443
Priority
Aug 18 2020
Filed
Feb 17 2021
Issued
Sep 20 2022
Expiry
Sep 20 2037
Assg.orig
Entity
unknown
0
16
n/a
The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.

FIG. 1 is a front, top and right side perspective view of a gas inlet attachment for wafer processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 4.

Murata, Satoru

Patent Priority Assignee Title
Patent Priority Assignee Title
3484122,
20130220221,
20170051408,
20170241015,
D326272, Jul 25 1988 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
D720051, Jan 20 2011 Victaulic Company Pipe element
D818509, Feb 10 2017 Hakko Corporation Nozzle for soldering iron
D827150, Aug 29 2016 HITACHI HIGH-TECH CORPORATION Column pipe
D872843, Dec 06 2017 Valve attachment for a pipe
D873392, Aug 31 2017 2010990 ALBERTA LTD Drill pipe
D890572, Jul 19 2018 KOKUSAI ELECTRIC CORPORATION Gas supply nozzle for substrate processing apparatus
D901564, Jan 28 2019 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for wafer processing apparatus
D924953, Jul 19 2018 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for substrate processing apparatus
D944661, Jul 17 2019 KOKUSAI ELECTRIC CORPORATION Calibrator for wafer handling robots
JP1624352,
JP1648531,
//
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Feb 17 2021KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
Mar 23 2021MURATA, SATORUKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0569900454 pdf
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