Patent
   D901564
Priority
Jan 28 2019
Filed
Jul 26 2019
Issued
Nov 10 2020
Expiry
Nov 10 2035
Assg.orig
Entity
unknown
7
17
n/a
The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.

FIG. 1 is a front, top and right side perspective view of a gas inlet attachment for wafer processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

Morita, Shinya, Murata, Satoru

Patent Priority Assignee Title
D924953, Jul 19 2018 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for substrate processing apparatus
D944661, Jul 17 2019 KOKUSAI ELECTRIC CORPORATION Calibrator for wafer handling robots
D964443, Aug 18 2020 KOKUSAI ELECTRIC CORPORATION Gas inlet attachment for wafer processing apparatus
D967210, Mar 25 2020 SEVENTY EIGHT Co., Ltd. Welding nozzle cleaner
D973738, Nov 13 2019 SEVENTY EIGHT Co., Ltd. Welding nozzle cleaner
D983151, Sep 09 2020 KOKUSAI ELECTRIC CORPORATION Exhaust liner for reaction tube
ER4299,
Patent Priority Assignee Title
10364493, Aug 25 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line
20040217217,
20070131168,
20080092815,
20100243166,
20110098841,
20150240359,
20150348755,
20170051408,
20180087152,
20180087156,
20180135173,
20180135179,
D326272, Jul 25 1988 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
D326273, Jul 25 1988 TEL SAGAMI LIMITED A CORPORATION OF JAPAN Heat insulating cylinder for thermal treatment of semiconductor wafers
D787458, Nov 18 2015 ASM IP Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
D796458, Jan 08 2016 ASM IP Holding B.V. Gas flow control plate for semiconductor manufacturing apparatus
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Jun 20 2019MURATA, SATORUKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0498690338 pdf
Jun 20 2019MORITA, SHINYAKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0498690338 pdf
Jul 26 2019KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
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